NVZseies

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

3 Way,3 Port Solenoid Valve NVZ Series

(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Application Example qBlow off valve (SYJ llR) 3 5 7 wValve for vacuum control eOperation of a single acting cylinder rDivider valve (SYJ llR) tSelector valve (SYJ llR) yPressure release Valve (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ llR) 3 5 7 3 5 7 3 5 7 (SYJ ll/SYJ ll R) X port X port X port X port X port Tank Tank 0.2MPa (R)3 2(A) (R)3 2(A) 2(A) (R)3 2(A) 2(A) 2(A) (R)3 (P)1 (R)3 (R)3 (P)1 Plug

Parallel Style Air Gripper: Wide Type Series MHL2

F G H 110 158 202 Model MHL2-32D MHL2-32D1 MHL2-32D2 60 108 152 150 198 242 220 318 402 86 134 178 272 370 454 56 104 148 DNote 1) J dimension is at fully closed.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the grommet style. 1.2-57 Series SYJ7000 3 Position Closed Center/Exhaust Center/Pressure Center 3 4 5 G H 3 4 5 G H C6 C8 Built-in One-touch fitting: SYJ7 20-l -ll Grommet (G), (H): SYJ7 20-l ll-01 2-3.2 (Mounting holes for manifold) A B 35 17 2-One-touch fitting (A, B port) Applicable tube C6: T0604 C8: T0806 17 36 (4.9) A B 13 3 46.6 33.6

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Plug-in/Plug Lead: Single Unit

(Station 5) W5Q55-05042Cz1 set VQ5150-5G 2 sets VQ5250-5G 2 sets VQ5350-5G 1 set 5 VQ5000 W Dusttight/Low jetproof type (IP65) Type of actuation Manual override 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center 3 position double check 1 2 3 4 5 6 Prefix the asterisk to the part nos. of the solenoid valve, etc.

Table of Contents

exhaust center: VFS3400-F 3 position pressure center: VFS3500-F 3 position double check: VFS3600-F VFN 2-5.6 mounting hole 170.5 (3 position: 175) 2-5.6 mounting hole Light window At Fz 86.5 (3 position: 96.5) Pilot valve manual override Light window At Fz With direct manual override Pilot valve manual override With direct manual override G 1/2 electrical entry 5-Rc , 1 4 3 8 G 1/2 electrical

Air Slide Table Series MXQ

61.5 79.5 89.5 K 21.5 31.5 41.5 51.5 61.5 J 17 27 37 48 65 I 9 9 9 16 9 G 6 13 11 21 H 23 26 28 28 NN 2 2 3 3 3 N 4 4 6 6 6 HA 16 26 20 28 28 Model F 22 25 21 26 27 GA 13 13 29 39 49 MXQ6L-10 MXQ6L-20 MXQ6L-30 MXQ6L-40 MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6L-30. 100 Air Slide Table Series MXQ With buffer (6): MXQ6L-F MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS Axial

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E G-00. ZQ1 3M-J1 L-F -00. ZQ1 3M-Q1 L-E G-00. In case of ZQ1 3M-F -00, the overall length is 91.7.

Air Slide Table Series MXS

Refer to the Specific Product Precautions. 22 24 Z ZZ G (NN 1) x H H 13 13 6.5 6.5 A B 3.2 6.5 7 7 15 1 4 3H9 depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 B A 3H9 depth 3 +0.025 0 HA GA Section AA Section BB (mm) F 25 25 40 50 38 50 N 4 4 4 4 6 6 G 9 12 13 15 20 27 H 28 30 20 28 23 28 NN 2 2 3 3 4 5 GA 17 12 33 43 43 83 HA 20 30 20 28 46 56 I 13 8.5 9.5 10.5 24.5 38.5 J 19.5 29 39 56 60

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

VZS

Plug-in F Note) A Single/ Double A side 5 24 VDC 2 2 position double 6 12 VDC G Grommet Grommet, With surge voltage suppressor 3 3 position closed center B Double B side 9 Other Option 4 3 position exhaust center GS 3A 3 position A side Option Electrical entry, Light/Surge voltage suppressor 5 3 position pressure center L L plug connector 6 3 position double check 3B 3 position B side

-fl Seies

Grfimet tefiiM Series NVFR3000: Base Mounted TlPe How to Order F-Through base --G {wa NWq qT.)" r Not ariailable ioi'ottom portea (gee pg. 28lor inclividual subpla'tes) NtvFR3(1) 0 (0x x3) F 2 posifon single Option -= Non-locking push type 2 position double 2 xA Non-locking 3 posrtion closed center D OIN Coonector & W 3 3 pooition exhausi cenlel 4 3 po6ilion tressue cenler 1 Non plug-in i

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Grfimet tefiiM Series NVFR3000: Base Mounted TlPe How to Order F-Through base --G {wa NWq qT.)" r Not ariailable ioi'ottom portea (gee pg. 28lor inclividual subpla'tes) NtvFR3(1) 0 (0x x3) F 2 posifon single Option -= Non-locking push type 2 position double 2 xA Non-locking 3 posrtion closed center D OIN Coonector & W 3 3 pooition exhausi cenlel 4 3 po6ilion tressue cenler 1 Non plug-in

Pin Cylinders Series CJP2/CJP

19 7 31 27 12 16.5 22.5 29 M5 x 0.8 NN R 5st 10st S 15st W Q 5st 10st Z Bore size (mm) 4 6 10 15 Q G C 15st K H 2 39.5 31.5 23.5 3 32 24 16 7 M8 x 1.0 Hose nipple A W F E S Z H Refer to page 38.

VZ3000

How to Order Type 40 1(P) port Stations VV5Z3 05 40 2 M5 Rc 1/8 4(A), 2(B) port size 1(P), 3/5(R) port thread type 02 2 stations 3, 5(R) port M5 M5 x 0.8 Nil Rc 4(A), 2(B) port Rc 1/8 F G 20 20 stations M5 x 0.8 N NPT Z NPTE How to Order Type 41 VV5Z3 05 41 1 M5 Applicable solenoid valve Stations 4(A), 2(B) port size 1(P), 3/5(R) port thread type 3/5(R) port 02 2 stations G L M D G L M

45

A 24 V 0 V Power supply FG Transmission line Twisted pair wire with shielding Master unit SI unit SI unit Terminal resistor Terminal resistor FG DG DB DA FG DG DB DA DG DB DA SLD FG b) 3-wire type Twisted pair wire with shielding Type 3 ground Type 3 ground Type 3 ground Type 3 ground Power supply 24 V 0 V 24 V 0 V D G D G 24 V 0 V Slave unit (S1 unit) Slave unit (S1 unit) Slave unit Master

Table of Contents

Rise time 1 ns Weight Note 3) 660 g Port size (Rc, NPT, G) 1/2, 3/4 3/8, 1/2 3/8 Note 1) The system accuracy when combined with PF2W3.