Series: 350 [3 Port COM (Single Unit)], Voltage: 3 (110VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT)

Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT)

Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: W (Grommet / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: F (Faston terminal / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT)

Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Faston terminal / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

Vacuum

-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!

IDX-OM-X004

. 3 1 3 3 Shutdown . 3 2 3 4 Check points before restart . 3 2 3 5 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Exchange of absorbent . 4 1 4 2 2 Service parts . 4 2 4 2 3 Exchange of other parts . 4 4 4 2 4 Check points book . 4 6 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5

2-Color Display

Piping Specifications Model 01 N01 C4H C6H N7H C4L C6L N7L R1/8 M5 x 0.8 NPT1/8 M5 x 0.8 Port size 4 mm 5/32 inch One-touch fitting, Straight type 6 mm 1/4 inch 4 mm 5/32 inch One-touch fitting, Elbow type 6 mm 1/4 inch Sensor pressure receiving area: Silicon Sensor pressure receiving area Wetted parts material PBT, POM, Stainless steel 304, C3604 (electroless nickel plated) O-ring: NBR

F/ISE

Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

Digital Pressure Switch

cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit for copy function ZS-38-U for copy function (10 copy destinations max) One-touch fitting 4 mm

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.

PSxx-OML0002CN

inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L 2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L

Digital Pressure Switch

Lead wire with connector ZS-38-3L 3 cores for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit