ZB-OM00301 10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.
-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!
-EC-M zx1-DR1-4 sra.3-4) NZXi071-EC-M zxl-DR16-4 NZZXl04-TB-A r:::r:l::t: l:l:l:lrrl:l:l:l :r:t:41:1it!
. 3 1 3 3 Shutdown . 3 2 3 4 Check points before restart . 3 2 3 5 Precautions for long-term non-operation . 3 2 Chapter 4 Maintenance 4 1 Daily inspection . 4 1 4 2 Periodical Maintenance . 4 1 4 2 1 Exchange of absorbent . 4 1 4 2 2 Service parts . 4 2 4 2 3 Exchange of other parts . 4 4 4 2 4 Check points book . 4 6 Chapter 5 Troubleshooting 5 1 Cause and countermeasure of errors . 5
Piping Specifications Model 01 N01 C4H C6H N7H C4L C6L N7L R1/8 M5 x 0.8 NPT1/8 M5 x 0.8 Port size 4 mm 5/32 inch One-touch fitting, Straight type 6 mm 1/4 inch 4 mm 5/32 inch One-touch fitting, Elbow type 6 mm 1/4 inch Sensor pressure receiving area: Silicon Sensor pressure receiving area Wetted parts material PBT, POM, Stainless steel 304, C3604 (electroless nickel plated) O-ring: NBR
Proper tightening torque N.m Nominal thread size 1/6 rotation after tightening by hand M5 13.6N.m R 1/4, NPT 1/4, G 1/4, URJ 1/4, TSJ 1/4 3. Apply wrench only to the metal part of the main housing when installing the pressure switch onto the system piping.
Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43
cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit for copy function ZS-38-U for copy function (10 copy destinations max) One-touch fitting 4 mm
Piping in the backward direction Nil None TSJ 1/4, Piping in the backward direction Bracket A URJ 1/4 and TSJ 1/4 are special fittings for semiconductor manufacturing equipment.
inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L 2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L
Lead wire with connector ZS-38-3L 3 cores for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit
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Max. flow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch fitting type Specifications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum flow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating
Caution -4- Specifications Model S F E 11 Port size Male thread type Plug-in type One-touch fitting type Max. flow capacity Symbol Port size Symbol Port size Symbol Applicable L/min (ANR) tube O.D. 11 M50.8 3 3A 4 3F 4 30 42 R1/8 4B 6 4G 6 65 52 R1/8 5C 8 5H 8 130 53 R1/4 130 73 R1/4 7D 10 7J 10 200 Accessory (Bracket) S F E B R 3 Symbol Applicable model 3 SFE3 4 SFE4 5 SFE5 6 SFE7
At the inlerseclion poinl with the line ol bore size 16mm move lettward and obtain a load of 1.54lbs. 4 I @silrc SERIES NCJ2 Technical Data Selection of bore size Load Relationship of power generation, bore size, and Pressure Power generation, bore size, and pressure can be expressed by the following equataonsl 4!
At the inlerseclion poinl with the line ol bore size 16mm move lettward and obtain a load of 1.54lbs. 4 @silrc I SERIES NCJ2 Technical Data Selection of bore size Load Relationship of power generation, bore size, and Pressure Power generation, bore size, and pressure can be expressed by the following equataonsl 4!
N femals 1/4 NPT NOTE: 1.
Max. ow capacity L/min (ANR) 3F 4 30 4G 6 65 5H 8 130 7J 10 200 Plug-in type Bracket SFE-BR 3 Symbol Applicable model 3 SFE3l 4 SFE4l 5 SFE5l 7 SFE7l One-touch tting type Specications Model SFE11 SFE3 SFE4 SFE5 SFE7 Fluid Note 1) Air Maximum ow capacity Note 2) Up to 3 L/min (ANR) Up to 30 L/min (ANR) Up to 65 L/min (ANR) Up to 130 L/min (ANR) Up to 200 L/min (ANR) Filtration rating Note
VFS2000, body ported and base mounted valves, Thread type: Rc(PT), Port sizes: 1/8, 1/4, Maximum operating pressure: 9.9kgf/cm2, Ambient and fluid temperature: -10 to 60 C, Manual override: non locking push style, VFS2200-5FZ-01N, VALVE, VFS2000 SOL VALVE 4/5 PORT, NE, VFS2000 BASE MT 1/8, 1.03617 lb