Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: N (NPT)

Series: 350 [3 Port COM (Single Unit)], Voltage: 4 (210VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: N (NPT)

Series: 350 [3 Port COM (Single Unit)], Voltage: 210VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 210VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 3 [350 (3 Port) ø3], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: -, Option: -, CE Compliance: -

Table of Contents

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

VEX1

2 (A) No.

Air Catch Sensor Series ISA

-6 Part no. 105 140 175 210 245 280 315 Description ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 L R L R L R L R L R L R No.

ISA2

With regulator + 2 port solenoid valve With 2 port solenoid valve 16-8-2 3 Air catch sensor Series ISA2 Optimum position is known at a glance.

VEX1

(Example) VVEX2-2-7-02N VEX3222-1LN 6 pcs. VEX1-17 1 pc. VVEX4-2-6-A VEX3420 5 pcs. VEX4-5 1 pc.

Serial Transmission System Series EX250 Series EX500

For 3 stations For remote I/O A1W DeviceNet PROFIBUS-DP CC-Link 16 For 16 stations A2W 0 Without SI unit Stations Ports 1, 3, 5 position Symbol 02 Stations 2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Note 1) Double wiring specifications 08 02 8 stations 2 stations Note 2) Supply/Exhaust block assembly specification Specified

0.01

Left Right 1 2 1 2 1 2 Left Right 1 2 1 2 1 2 ZSE30 ISE30 ZSE40 ISE40 MPa MPa MPa MPa MPa MPa ZSE10 ISE10 ISE70 With n stations, the bracket is mounted on the first and n th sensor from the left. ZSE80 ISE80 1 2 n 1 2 n ZSE ISE ZSP PS MPa MPa MPa ISA2 ISA2 PSE Addition of Manifold Stations IS 1. Loosen the screws and remove the 2 mounting brackets on the front and back side. 2.

Series 10-SV ® EX500 Decentralized Serial Wiring

2 stations Note U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Double wiring Note 1) 08 02 8 stations 2 stations Specified layout Note 2) SUP/EXH block assembly (up to 16 solenoids possible) 16 16 stations Internal pilot External pilot Nil R Double wiring: Single, double, 3 position and 4 position solenoid valves can be used on all manifold stations

EX500 Gateway System Serial Transmission System Series SV ® How to Order Manifold Mounting Direct mounting Nil D DIN rail mounting (With DIN rail) Series D0 DIN rail mounting (Without DIN rail) 1 SV1000 D3 When a longer DIN rail is For 3 stations

For 3 stations 0 Without SI unit 16 DeviceNet/PROFIBUS DP/ CC-Link/EtherNet/IP For 16 stations A2W Valve stations P, E port location Stations 2 stations Note Symbol 02 U D B U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) (1) Double wiring specifications 08 02 8 stations 2 stations (2) Specified layout (up to 16 solenoids possible.)

Vacuum

OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.

Vacuum

OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.

IDX-OM-X004

/ Compliance Requirements . i 5 Chapter 1 Name of each Parts 1 1 Name of each Parts . 1 1 Chapter 2 Transportation / Installation 2 1 Transportation . 2 1 2 2 Installation . 2 1 2 2 1 Location . 2 1 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Electric wiring . 2 3 2 3 Cautions about Reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation