VQ20/30

Series P port/Thread type VV2Q22-05 1 set VQ21M1-5G-C6 4 sets Manifold part No. Valve part No. (Stations 1 to 4) Valve part No. (Station 5) 2 3 Nil 00N 00T 00F VQ20 VQ30 Rc 3/8 NPT 3/8 NPTF 3/8 G 3/8 VQ21M1-5G-C8 1 set Stations VC 01 1 station is the symbol for assembly. Add a in front of the part numbers for solenoid valves, etc., to be mounted.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

1, 2, 3 and 4.

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

Series P port/Thread VV2Q22-05 1 set Manifold part No. 2 3 VQ20 VQ30 Rc3/8 NPT3/8 NPTF3/8 G3/8 VQ21M1-5G-C6 00N 00T 00F 4 sets Valve part No. (Stations 1 to 4) Stations VQ21M1-5G-C8 1 set Valve part No.

7.4

Electrical entry Type of actuation S07 1 5 5 G Connector kit SS0755-07C4C S0715-5G S0725-5G S07A5-5G 1 setManifold base part no. 3 setsValve part no. (Stations 1 to 3) 2 setsValve part no. (Stations 4 to 5) 2 setsValve part no.

Model: 3 (VDW30), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 1 (1.0 mm), Port Connection Type: C6 (One-touch fitting for ø6), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: None

Model: VDW30, Voltage: 24VDC, Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 1.0 mm, Port Connection Type: One-touch fitting for ø6, Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: None

1

3 SY 3 5 C6 1 0 3 1 SY EX600 Top ported VM !

VZ5000

length) 300 : With light/surge voltage suppressor Built-in One-touch fittings VZ5 20-DIN terminal (D) VZ5 20-D-01 C6 C8 3 4 5 3 4 5 C6: MAX. 6 C8: MAX. 6.5 2-One-touch fitting (A, B port) Applicable tubing model C6: T0604 C8: T0806 Applicable cable O.D. 3.5 to 7 3-3-59 Series VZ5000/Body ported Manifold Specifications Manifold Standard Manifold Specifications Type 20 Type 21 Single base/

Manifold Specifications

A/B) 4/2 5/3 (A/B R) Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1(P), 5/3(R) port 2(B), 4(A) port VV5Z5-20-01 VV5Z5-20-C6 VV5Z5-20-C8 VV5Z5-21-01 VV5Z5-21-C6 VV5Z5-21-C8 1/8 C6 C8 1/8 C6 C8 0.55 0.49 0.51 0.54 0.50 0.50 0.26 0.25 0.25 0.26 0.24 0.20 2.3 2.0 2.1 2.3 2.1 2.1 0.57 0.37 0.45 0.55 0.36 0.50 0.35 0.32 0.38 0.36 0.32 0.37 2.2 1.4 1.7 2.1 1.4 1.8 1/8 1/8 1/8 1

Model: 3 (VDW30), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 3 (3.0 mm), Port Connection Type: P7 (P7 Quick Fastener), Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: None

Model: VDW30, Voltage: 24VDC, Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 3.0 mm, Port Connection Type: P7 Quick Fastener, Body Material and Coil Insulation Type: PPS Body, NBR Seal, Class B Coil, Option: None

Rubber seal 5 Port Solenoid Valve Series SYJ5000

(One-touch fitting for 6) P, R port M5 x 0.8, Port size C4 (One-touch fitting for 4) C4 (One-touch fitting for 4) A, B port C6 (One-touch fitting for 6) M5 x 0.8 Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Manifold C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port M5 x 0.8 C4 C6 M5 x 0.8 M5 x 0.8 1/8 C6 C4 1/8 1/8 1/8 1/8 1/8 1/4

Rubber seal 5 Port Solenoid Valve Series SYJ7000

solenoid, individual SUP, EXH spacer SY3000-37-15A Symbol 01 C6 C8 N7 N9 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Port size 1/8 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 1/4" One-touch fitting for 5/16" Double solenoid, 3 position individual SUP/EXH spacer SY3000-37-34A Interface

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 60 or less 5 1.87 (1.82) Closed center VFR530 VFR531 80 or less 3 Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(A) (A) (A) 2 (A) 2 2 2 1 (P) 3 (R) 1 (P) 3 (R) h h 1 (P) 3 (R) 1 (P) 3 (R) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note Zinc die-casted No.

Manifold Specifications

For details, refer to pages 3-7-19 and 3-7-20.

Manifold Specifications

For details, refer to pages 3-7-35 and 3-7-36. 3-7-32 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Plug-in type Manifold With D-sub connector: VV5ZS2-51FStation 1Port size Manual override Indicator light 2-4.5 mounting hole U side VK (n) VZ VF (2) VFR (1) Stations VP4 D side VZS 2-C6, C8 VFS A 2 VS4 B D-sub connector VQ7 10.7 31.5 EVS (Port size: One-touch

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

N.O. c f a e b d (A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) h h 3 (R) 1 (P) 3 (R) 1 (P) g g Component parts Replacement parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Material Aluminum die-casted Resin Aluminum die-casted Resin Stainless steel Note White White White Description Note No.

Model: 3 (VDW30), Voltage: 5 (24VDC), Power-saving Circuit: None, Electrical Entry Direction: Piping Direction, Orifice Diameter: 1 (1.0 mm), Port Connection Type: C6 (One-touch fitting for ø6), Body Material and Coil Insulation Type: A (PPS Body, FKM Seal, Class B Coil), Option: None

Compatible Fluid: Air / Water, Operating Environment: Standard, Type: Electromagnetic Type, Number of Solenoids: Single Solenoid, Switching Type: Normally Closed, Body Material: Resin, Application: Individual Item, Connection Type: Tube Connection, Tube Diameter: φ6, Operating Temperature Range(°C): -10～50, Driving Type: Linear Motion Type, Orifice Diameter(Ø): 1, IP Rating: IP65, Acquired