Table of Contents

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Body type Plug-in type Non plug-in type VVFS2000-R-01-1 VVFS2000-R-01-2 VVFS2000-R-02-1 VVFS2000-R-02-2 Body type Plug-in type Non plug-in type ARBF2000-00-P-1 ARBF2000-00-P-2 P port regulation 1 8 Rc 1 4 Rc For details, refer to page 1247.

KJ

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFT04-01 KFT04-02 KFT06-01 KFT06-02 KFT06-03 KFT08U-01 KFT08U-02 KFT08U-03 KFT08N-01 KFT08N-02 KFT08N-03 KFT10U-02 KFT10U-03

JXCx-OMY0004

Movement mode 1: ABS (Absolute) 2: INC (Relative) (7, 10) 2-7.

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

JXCx-OMY0006

Safety Instructions 5 2.

JXCx-OMT0005CN

B RESET >+JOG (01-052) >+B RESET 65 - 112 12 0 2 3 4 5 6 7 Alarm _Comment _058 (01-058) 3A B RESET No.base PLC <> 1 1ABS 2INC 2PLC 2 14.2[2] (P.54) Alarm _Comment _061 (01-061) 3D B RESET <>+ <>+Alarm _Comment _062 (01-062) 3E B RESET <> (01-096) C RESET <> (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON SVRE ON DRIVE ON (01-099) <> SET OFF

Air Fittings & Tubing

T (M) L2 L1 M Nylon Urethane 1 4 13 13 M12 X 1 3.2 KQ2E23-02 3.4 2.9 17 14 14 31.5 15 15.5 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 M12 X 1 4 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 15 35 KQ2E04-02 17 KQ2E06-01 11 28 31.5 30 15 17 M14 X 1 19 KQ2E06-03 17 33.5 29 KQ2E06-02 15 6 13.1 10.4 17 17 17 KQ2E08-01 7.5 27.5 28 26.1 18.0 8 18.5 19 KQ2E08-02 13 33 27 17 M16 X 1 19 KQ2E08

SFOD-OMT0005CN

(PLC ) No. (01-051) <> (1)( )1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2 [2](P.53) No. B RESET <>(+) (-) (JOG ) <>(+) (-) (01-052) B RESET -63- () 12 (12 0 ) (2) (3) (4) (5) (6) (7) Alarm _Comment _058 (01-058) 3A B RESET <>No.

F

-2 TFU 0805B-3 Number of Tubes 2 3 2 3 2 3 TFU B Tube OD (mm) 4 6 8 Tube ID (mm) 2.5 4 5 OD/ID Flow Factor Cv/Metersote 3) 0.11 0.39 0.70 04254mm OD 2.5mm ID 06046mm OD 4mm ID 08058mm OD 5mm ID Max Operating Pressure 0.8MPaNote 2) / 120PSI Operating Temperature -20~+60C / 4~140F N U M B E R O F T U B E S Material Polyurethane 2 2 3 3 Color Black Note 1)Min Bending Radius (mm) 10 15 20 Tube

JXCx-OMT0061CN

) 2 2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP

-fl Seies

Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Sta. 2-6) NVFR221O-3G NW5FR2-10-06M-027 Mix: sta. 1) 1/4 side sta. 2-6) 1/8 bottom See Note 2) Four Station Manilold Ass'y as follows: sta. 1) NVF?

SQ1000/2000

BS+ BDH BSFG 24V 0V COMM BDL (108.5) Approx. 10 101 68 34 10 4.6 A A B A B A A 2.PUSH 2.PUSH 1.TURN 1.TURN B 28 5.5 35 74.5 ADDRESS No. 13 2-M4 clamp screw EXH outlet Approx. 9 1.5 D side U side Stations 1 2 3 4 5 6 7 8 n Approx. 9 C8: EXH port For top ported C8: SUP port 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 81.5 67 2n-C3, C4, C6, M5 (A, B port) C3:

JXCx-OMT0062

Example) When output the step data No.3 00 OUT0 01 OUT1 OUT5 OUT 4 OUT 3 OUT 2 OUT 1 OUT 0 02 OUT2 OFF OFF OFF OFF ON ON Caution 03 OUT3 1. When RESET is turned ON, these terminals are turned OFF. 2. During the alarm, these terminals output the alarm 04 OUT4 group. 3.

2-Color Display

included Mounting screw (with 2 pcs. of M3 x 8L) O-ring, one-touch clip included Panel mount adapter + Front protection cover Front protection cover Lead wire with connector Lead wire with connector Mounting screw (with 2 pcs. of M3 x 8L) O-ring, one-touch clip included O-ring, one-touch clip included 3 cores, for 1 output, 2 m 4 cores, for 2 outputs, 2 m 3 cores, for 1 output, 2 m O-ring

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

PSxx-OML0002CN

2 ) C ZS-38-A3 (M35 L 2 ) ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-38-3L 3 1 2m ZS-38-4L 4 2 2m ZS-38-3G 3 1 2m ZS-38-4G 4 2 2m ZS-38-5L 3 1m ZS-38-U (10 ) ZS-27-01 4mm ZS-38-C4H O 6mm ZS-38-C6H O 1/4 inch ZS-38-N7H O 4mm ZS-38-C4L O 6mm ZS-38-C6L O 1/4 inch ZS-38-N7L O -9No.PS-OML0002CN-G LCD ((OUT1),(OUT2)) LCD 4 ON/OFF ON/OFF (kPaMPa) -10No.PS-OML0002CN-G 2

Digital Pressure Switch

for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit for copy function ZS-38-U for copy function

Digital Pressure Switch

Lead wire with connector ZS-38-3L 3 cores for 1 output, 2 m Lead wire with connector ZS-38-4L 4 cores for 2 outputs, 2 m Lead wire with connector + connector cover ZS-38-3G 3 cores for 1 output, 2 m Lead wire with connector + connector cover ZS-38-4G 4 cores for 2 outputs, 2 m Lead wire with connector for copy function ZS-38-5L 3 cores (for copy function), 1 m Lead wire with connector unit