C95Series

Action Double actin si Ie rod o &ratin Istan d 0.2-2 irv'sec 5~50mm/s&C 1 SpeCIfications and dimensions 8)Ccept (!lOre mentioned above 8'8 1 00 same as standard port locatIon C95 Standard part number l-xC3 j B f@] Location 01 pons and cushion val\les On rod cover and head CO\lfH.

IP8101 Series

alarm 2 mode(on), non-alarm mode(oFF), and change the set value if alarm 2 mode is selected.

Series VQ Metal Seal/Rubber Seal Body Ported

Specifications Positive COM AXT661-14A-F Single (2 wire) VQ4 Negative COM AXT661-14AN-F Positive COM AXT661-13A-F VQZ Double (latching) (3 wire) Negative COM AXT661-13AN-F VQD Note) Lead wire length: 300mm Note) The parts numbers above are applicable to VQ0/1000 (2 to 16 stations) and 13 14 VQ2000 (2 to 10 stations). VQ2000 (11 to 16 stations) uses AXT661 A (N)F425. VZS VFS 3.

IP8001 Series

ExIP8001-010-EW F With feedback lever unit for stroke 50 to 140mm. 2: When 52ATEX type specify symbol M, 2, 5, blue cable grant is equipped for electric connection. W With body cover window.

VQC

3 18.5 9.5 7.5 4-M8 2-M12 M3 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

5 Port Solenoid Valve, Series VQC

(12) 40.5 2 PWR 25 18.5 3 9.5 7.5 4-M8 2-M12 M3 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread (7.5) 20.5 2-C8 1(P) port 34 P = 10.5 (mm) Formulas: L1 = 10.5n + 45, L2 = 10.5n + 167.5 (for 1 input block.

Speed Controller with Uni One-touch Fitting AS Series

lock nut J Nil Lock nut option Body size AS-F AS-F 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard Made to Order TMH X260 Antistatic type Refer to page 635 for details.

VQ

Part Material AXT662-11 (1: M5, 2: M3) 2 Sub-plate ZDC o Optional Parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(L3) L2 3 L1 2 1 A 4 B 2 14 Stations 4 P=10.5 17.7 D side 2n-M5 8 8 44 30.5 67 (Single, rubber) 69.5 (Single, metal) A 4 14.5 B 2 95 (Double) 103.5 (3 Position) 300 (Lead wire length) 14 6.5 Cover diameter 1.6 Cross section 0.34mm2 M5 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc(PT)1/8 R1, R2(EXH) port 15 16.5 16.5 15.5 15.5 33 57 (30.5) 7 2-Rc(PT)1/8 P

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

JXCx-OMT0061CN

2 3 3 4 READY 4 5 ALARM 5 6 6 7 7 0 0 8 8 9 9 A A () B B C C D D 1 E E 2 F F 0 1 F0 1 71 () F8 2 F0 2 F0 (1 )*2 (2 ) *1 3 F0 3 F0 ()*2 *1 RWw0,bit4F: 12 *2 RWw0,bit4F: 93 - (2)[IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

close type Electrical entry How to Order Valve Manifold Ass'y Pilot valve specifications F : Plug-in type With indicator light and surge voltage suppressor (Only for plug-in manifold) Y U L** N 1W (Std.)* 0.5W (Low power) Large flow capacity 1W (Latching coil, + com) Coil voltage 24VDC 12VDC 110VAC 1W (Latching coil, com 5 6 3 Indicator light and surge voltage suppressor 1 2 3 Stations

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

): VQZ1 2 wGwC3, C4, C6, M5 0 1 300 (Lead wire length) 103.5 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 Mounting holes 0.8 SY 4 8.6 10 SMC SMC 2 Cover diameter 1.6 Cross section 0.34mm2 R2 25.8 2-C3, C4, C6, M5 SYJ 60.3 C3: One-touch fittings for 3.2 Manual override SX C4: One-touch fittings for 4 C6: One-touch fittings for 6 VK M5: M5 thread VZ 9.5 (C3,C4,C6) VF (47.5) VFR VP7 25.5 (M5) 26.5 5.4

Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread

Series: 250 [3 Port COM (Single Unit)], Voltage: 100VAC 50/60HZ, Electrical Entry: Grommet / Molded, Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread, Thread: -, Material: -, Option: -, CE Compliance: -

1

P.T. 4 Max. 6 R port (3 port only) (68) 30 38 24 10.5 16 Symbol 2 port (A) 2 12 10 1 (P) 3 port (A) 2 17 44 25.4 10 12 1 (P) 3 (R) 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 8.5 14 * 0.5 MPa supply F.O.F.* 29 N P .T. 2 mm O.T. 1.5 mm T.T. 3.5 mm Cross roller plunger VM122-M5-07A VM132-M5-07A VM122-M5-07SA VM132-M5-07SA Panel mounting hole 2 x M14 x 1 Hexagon nut Thickness 5, Width across

ZP

C J H F I Hexagon width across flats 8 M5 x 0.8 J H F Hexagon width across flats 10 Hexagon width across flats 2 Hexagon width across flats 12 M8 x 1.25 Y D C Hexagon width across flats 12 Hexagon width across flats 3 2 A B 3 2 A B Dimensions: 10 mm Stroke (mm) With a stroke of 10 mm A B C D F H I J Y Model ZPT10F10-B5-A10 10 12 10 12.5 27 38.5 74.5 1.5 ZPT13F10-B5-A10 13 15 23 10.5 13 27.5

Table of Contents

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

ZP

2 F G H J K L M N P Vacuum inlet direction q Pad dia.