-fl Seies

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Terminal:2 position double/NVFB2210-OT 3 position closed center/WFR231 0-OT 3 position exhaust center/NVFR2410-OT 3 position pressure center/NVFB2s1o-OT o Series NVFRzO00:Base Mounted Tlpe M ani fo l.d P lug in T g pe / Non P lug in T U pe / D ime ns io rc inch (mm) Plug-in type (connector plug with lead wirc):NW5FR2-01@t@ Bottom podng Nl/vsFR2-01-@;r'3-)2.@ with indicatq xait 0 A5l2t.5)

Series VCS

stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. x 1 3 stns. x 3 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 2 stns. x 2 + 3 stns. 2 stns. x 1 3 stns. x 3 Note) Manifold bases are composed by connecting 2 station and 3 station bases.

Lubrication Equipment

Description Material Part No. # pieces 3 port switching valve (For operation control) VOA301-M VO307E, D-X56 1 e Relay valve Pressure gauge Diaphragm assembly Valve assembly NLP seal PNY seal Wear ring O ring VR4152-00-0 GA46-10-01 12702A 12705A NLP-100A PNY-25 SW-100 X 6 X 2 JIS B2401P3 1 1 1 1 2 2 2 1 r t y u i o !0 !

VCS

Series 2 3 4 Class 2 Class 3 Class 4 OUT port size Symbol 01 02 Port size 1/8 (6A) Stations 2 3 4 5 n Uside D side 1/4 (8A) Material All IN ports are 3/8.

ZL3-OM00801

H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19 No.ZL3-OM00801-A 8. 8.1 ZL3 12 1 22 3(0.760.84Nm) (ZL3-SE1-A) 1 2 8.2 ZL6 ZL6 P6 8.3 1) 2) 3)2 4) 5kPa 5)

Table of Contents

Metering valve with silencer (EXH) ASN2-M5 (CVRB1BW50) ASN2-01 (CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is in the case of VZ 140-1G.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Metering valve with silencer (EXH) ASN2-M5 (CVRB1BW50) ASN2-01 (CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is in the case of VZ 140-1G.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Metering valve with silencer (EXH) ASN2-M5 (CVRB1BW50) ASN2-01 (CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is in the case of VZ 140-1G.

Power Valve: Economy Valve Series VEX5

Port size port 3(R) port 1(P), 2(A) Body size Rated voltage (Only with solenoid) 04 06 10 10 12 14 20 1 2 3 4 1 2 100 VAC 50/60 Hz 1 2 3 (Ex.)

VP300/500/700

1P (Rc 1/8) VP300-2-2P (Rc 1/4) VP500-2-1P (Rc 1/4) VP500-2-2P (Rc 3/8) VP700-2-1P (Rc 3/8) VP700-2-2P (Rc 1/2) Mounting Screw Tightening Torques M3: 0.6 Nm M4: 1.4 Nm M5: 2.9 Nm VP300-17-1 VP344 SF4--50 VP500-17-1 VP544 VP700-17-1 VP744 How to Order Sub-plate VP 00 2 1 Series Port size Thread type VP744 3/8 1/2 VP544 1/4 3/8 VP344 1/8 1/4 3 5 7 P F N T VP344 VP544 VP744 Rc G NPT NPTF Symbol

Rotary Actuator/Vane Style Series CRB1

(When double solenoid is mounted) Solenoid B Solenoid A C2 (When double solenoid is mounted) B3 (When the needle is fully open) B2 2 x metering valve with silencer (EXH) ASN2-M5 (CVRB1BW50) ASN2-01 (CVRB1BW80, 100) Note 1) Solenoid valve in external appearance is for VZ 140-1G.

Cylinder

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

NCQ2/CQ2

2, !3, !

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

Aluminum High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

CV/MVGQ

) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8 Different sides n 100 + 100 (n 2) n = 2, 4, 6, 8 110 + 100 (n 2) n = 2, 4, 6, 8 100 + 100 (n 2) n = 2, 3, 4 Same side 10 35 55 100 100 110 90 100 110 90 100 110 1 Different sides 2 Same side 35 + 30 (n 2) n = 2, 3, 4 90 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 110 + 30 (n 2) n = 2, 4, 6, 8

CV/MVGQ

2, 3, 4 75 + 35 (n 2) n = 2, 4, 6, 8 80 + 35 (n 2) n = 2, 4, 6, 8 90 + 35 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 Different sides RB D-A44C n Same side J 10 75 80 90 1 2 (Different sides, Same side), 1 D85 90 95 105 15 80 D-Z7/Z80 D-Y59/Y7P D-Y7W (n 2) 2 15 + 40 n = 2, 4, 6, 8 (n 4) 2 (

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

8 1(IN), 2(OUT) port 17.5 17.5 2 x M5 x 6.5 15 15 2 x M5 x 6.5 CS: Conduit DS: DIN terminal DZ: DIN terminal with light Applicable cable 6 to 12 18 67 36 55.3 G1/2 48.9 500 18 36 NPT1/2 63 17.5 63 17.5 42.1 40.6 IN IN 8 8 28 30 30 28 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x Rc, NPT1/8 1(IN), 2(OUT) port 2 x M5 x 6.5 15 2 x M5 x 6.5 15 15 Direct Operated 2-Port Solenoid Valve JSX Series Dimensions