Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

15

Operate it at a full stroke at least once a day or ev ery a thousand cycles. If an external force over the allowable moment is applied, it may cause play in the guide or an increase in the sliding resis tance. 6. Keep the flatness of mounting surface should be within 0.1 mm/500 mm.

Proposals for Energy Saving

ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD with back light LCD LED -101 to 10kPa (-760 to 75mmHg) 200kPa OUT1: Green OUT2: Red Indicator light (lights up when ON) Green Response frequency 200Hz (5ms) Hysteresis mode Variable (3 digits or more) Variable (can be set from 0) Hysteresis Window comparator mode Fixed (3 digits) Air,

Multistage Ejector Series ZL112/212 1

(Full span) Class 3 0 to 50C Housing: Polycarbonate/ABS resin Operating temperature range Material Port exhaust JIS Symbol Standard P V 13-7-5 6 Series ZL Option Specifications With digital vacuum pressure switch (ZSE4) Digital Vacuum Pressure Switch Specifications ZSE4-00---X105 ZSE4B-00---X105 ZSE4E-00---X105 Part no.

Multistage Ejector (N)ZL Series

(full span) Class 3 Port exhaust 0 to 50C (32 to 122F) Housing: Polycarbonate/ABS resin Symbol Standard P V 5 Series (N)ZL Multistage Ejector Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light

Multistage Ejector Series ZL

(full span) Class 3 Port exhaust 0 to 50C Housing: Polycarbonate/ABS resin Symbol Standard P V 2 Multistage Ejector Series ZL Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light 101 to 10KPa

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LER MH LEH ML + Stroke MA MC MD Section XX LEY -X5 Section XX details 11LEFS XB 11LEJS XA H9 XA 25A[mm] Size Stroke range [mm] C D EH EV H J K L M O1 R S T U B V LEC 25 15 to 100 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 45 46.5 1.5 136.5 40 105 to 400 161.5 LEC S 32 20 to 100 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 10 60 61 1 156 60 105 to 500 186 LEC SS-T 63 50 to 200 21 40

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

HRX-OM-M005

Item Descriptions 1 AUTO TUNING Used to display the Auto tuning screen on page 5-50. 2 EV ADJUST Used to display the EV opening adjustment screen on page 5-51. 3 [Return] key Used to display the Detail setting screen 1 on page 5-22.

Integrated Controller

Dimensions [mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S S2 T T2 U CV V X2 Y Without lock With lock 25 15 to 100 136.2 121.7 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 58.1 115 113.6 1 66.3 57.8 144 184 32.2 101 to 400 161.2 146.7 32 20 to 100 153.6 135.1 13 25 51 56.5 M8 x 1.25 31 22 18.5 40 M6 x 1 10 60 70.8 142 140.3 2 83.5 69.8 144 189 39.1 101 to 500 183.6 165.1

CATALOG

ZSE4-00-26(L)-X105 Model (N)ZL112 (N)ZL112-G (N)ZL112-E (N)ZL212 Nozzle Diameter 1.2mm 1~5V + -5% FS load impedence 1k 1.2mm x 2 Output Specification 1 output, NPN open collector 30V 80mA Max Suction Flow 100 l/m (ANR) 200 l/m (ANR) 126 l/m (ANR) Air Consumption 63 l/m (ANR) Fluid Air Max Vacuum Pressure -84kPa (-12PSI) -12PSI Setting PressureRange 0~-101kPa, -760mmHg, -14.7PSI, 1.01bar

V

ZSE4-00-26(L)-X105 Model (N)ZL112 (N)ZL112-G (N)ZL112-E (N)ZL212 Nozzle Diameter 1.2mm 1~5V + -5% FS load impedence 1k 1.2mm x 2 Output Specification 1 output, NPN open collector 30V 80mA Max Suction Flow 100 l/m (ANR) 200 l/m (ANR) 126 l/m (ANR) Air Consumption 63 l/m (ANR) Fluid Air Max Vacuum Pressure -84kPa (-12PSI) -12PSI Setting PressureRange 0~-101kPa, -760mmHg, -14.7PSI, 1.01bar

AC Servo Motor Driver (Network card type ）

Bit Symbol Description 0 SO Switch-on 1 EV Enable voltage 2 QS Quick stop 3 EO Enable operation 4 OMS Differs depending on Modes of operation (6060h). (Refer to section 5.4.) 5 6 7 FR Fault reset 8 HALT 0: Operation ready 1: Temporary stop 9 OMS Differs depending on Modes of operation (6060h). (Refer to section 5.4.) 10 The value at reading is undefined.

This is a legacy product, and replaced byVQZ115-5L1-01T-X105, VALVE, BASE MOUNT (DC) *LQA, VALVE, VQZ100 VALVE, SOL 3-PORT, NA, VQZ100 BASE MNT 1/8, .05500 lb

The VBAT-X105 tanks are ASME UM stamped for use in countries such as the US and Canada who base their pressure vessel laws on ASME Section VIII, Division 1 Boiler and Pressure Vessel code.  These units include an ASME V1 stamped pressure relief valve.

The VBAT-X105 tanks are ASME UM stamped for use in countries such as the US and Canada who base their pressure vessel laws on ASME Section VIII, Division 1 Boiler and Pressure Vessel code.  These units include an ASME V1 stamped pressure relief valve.

Digital Flow Switch

] OUT1 Output mode All models 4 [ 1ot ] OUT1 Switch operation All models 5 [ ] OUT1 Set value All models 6 [ ] OUT1 Hysteresis All models 7 [CoL] OUT1 Display colour All models 8 [oU2] OUT2 Output mode 9 [2ot ] OUT2 Switch operation Models with NPN2 output, PNP2 output 10 [ ] OUT2 Set value 11 [ ] OUT2 Hysteresis 12 [r ES] Response time All models 13 [FL o] Display mode All models 14 [r Ev

PFMB.eng

[F10] [ FLo] Display mode [ inS] Display instantaneous flow Required torque Model Width across flats of attachment Nominal thread size Model [F13] [ r Ev] Reversed display mode [oFF] Unused Rc1/4, NPT1/4 17 mm PFMB7201 12 to 14 Nm 1 2 After maintenance is complete, perform appropriate functional inspections and leak tests.

Digital Flow Switch

] OUT1 Output mode All models 4 [ 1ot ] OUT1 Switch operation All models 5 [ ] OUT1 Set value All models 6 [ ] OUT1 Hysteresis All models 7 [CoL] OUT1 Display colour All models 8 [oU2] OUT2 Output mode 9 [2ot ] OUT2 Switch operation Models with NPN2 output, PNP2 output 10 [ ] OUT2 Set value 11 [ ] OUT2 Hysteresis 12 [r ES] Response time All models 13 [FL o] Display mode All models 14 [r Ev

DOC1003077

Aug V AV BV CV DV EV FV . Sep W AW BW CW DW EW FW . Danger In extreme conditions, there is a possibility of serious injury or loss of life. When the circulating fluid temperature is low, do not operate it at a low Oct X AX BX CX DX EX FX . flow rate. It may freeze circulating fluid in the product when used at low temperature and low flow rate. Nov y Ay By Cy Dy Ey Fy .