3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

Bracket Bracket 2-M5, Depth 7 For mounting 2-M5, Depth 7 For mounting VP S070 VQ ( ): DC [ ]: AC, with indicator light VKF VQZ Base mounted VS3110-G VS3110-D VZ VS 2-4.5 VFN Mounting hole 87.5 (111.5) [90.5] 2-4.5 Mounting hole Manual override Manual override 87.5 (111.5) [90.5] 300 (Lead wire length) G 1/2 (Cable 8 to 10) 3-Rc , 1 4 3 8 3-Rc , 1 4 3 8 ( ): DC [ ]: AC, with indicator light

NAMUR Interface 3 Port Solenoid Valve Series VFN200N 1

M5 x 10 DIN913-45H VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 12 2 8 VT G 1/4 DIN/ISO228/1 M5 Drive flange face VP VG 19.5 5.5 Solenoid valve flange face VP O-ring 16 x 2 1.5 3 S070 VQ VKF The solenoid valve can be attached with 2 mounting bolts.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted 1

Bracket Bracket 2-M5, Depth 7 For mounting 2-M5, Depth 7 For mounting VP S070 VQ ( ): DC [ ]: AC, with indicator light VKF VQZ Base mounted VS3110-G VS3110-D VZ VS 2-4.5 VFN Mounting hole 87.5 (111.5) [90.5] 2-4.5 Mounting hole Manual override Manual override 87.5 (111.5) [90.5] 300 (Lead wire length) G 1/2 (Cable 8 to 10) 3-Rc , 1 4 3 8 3-Rc , 1 4 3 8 ( ): DC [ ]: AC, with indicator light

VQZ100/200/300

VQZ300 Port size Symbol VQZ200 VZ 1 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc (PT)1/4 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VT (A) 2 N.O. 2 VT 1 (P) 3 (R) Note 1) Refer to p.2.10-18 for inch size Onetouch fittings. VP (A) 2 N.C. 3 VG 1 (P) 3 (R) Manual override (A) 2 N.O.

Hygienic Design Cylinder Series HY

10 12 12 16 16 10 10 10 15 15 15 20 20 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1.0 depth 12 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 11 10 14 12 17 17 12 13 14 14 20 20 CJ5 CG5 HY P Nil M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 3/8 Rc 1/2 Bore size (mm) 20 25 32 40 50 63 80 100 K KA NA NB R S ZZ C M TF

Vacuum System Peripherals:

Air operated Nil M6 x 1 (Option) M5 x 0.8 PV/V port size Applicable to only plug connector.

VQZ100V-OMT0001

(NPN ) No.VQZ100V-OMT0001 VQZ VQZ VQZ VQZ 3 3 3 3 5 5 5 5 / / / / 2 2 2 2 M5 M5 M5 M5 1/6~1/4 1 1.5Nm ( ( ( ( ) ) ) ) 2 2 2 2) ) ) )Rc Rc Rc Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 DC & & & & / / / / Best Pneumatics Best Pneumatics Best Pneumatics Best Pneumatics No. No. No.

VF1000-OMP0001

M5 M5 M5 1/61/4 11.5Nm ) Rc Rc Rc Rc Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 6 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN

VP300-OMP0001

O. 1( P) () O PE ( AC 13 No.VP300-OMP0001 N o. 1ISO VG 32 [ 3(R)PE] N .

SYJ300-OMU0003

No.SYJ300-OMU0003 -2- / *3) 1 1.5 *3)1 1 () No.SYJ300-OMU0003 -3- SYJ Series 3 / 1 DC () () () () EXH () () 4 No.SYJ300-OMU0003 SYJ Series 3 / ( ) 1 ( ),COMCOM 2 C-R () C-R Sol.1: DC 3% AC 8% Sol.2: (SSR)AC 1) (C-R) OFF 2) () 1.NPN 3) AC,, , SSR SSR 1) Sol.1: Sol.2: 2) ,1V + 2.NPN 5 No.SYJ300-OMU0003 SYJ Series 3 / 1 -10 1)M5 M3 1/4 0.4~0.5Nm M5 1/6~1/4 1~1.5Nm ()

VEX-OMY0001

-2No.VEX-OMY0001 / 1 1.5 *3) *3)1 1 () No.VEX-OMY0001 -3- VEX3 3 / / 1 VEX3 DC () () , () ,ON OFF () C-R ( )C-R ( ) DC VEX3121, VEX3122, VEX3221, VEX3222, VEX3 2% VEX3321, VEX3322, VEX3421, VEX3422 VEX3 , VEX3501, VEX3502, VEX3701, VEX3702, 3% VEX3901, VEX3902 AC 15% (SSRTRIAC )AC 1) (C-R ) OFF 2) () 4 No.VEX-OMY0001 VEX3 / / 1) 1 2) 1V 1) M5 0 1/6 1/4

SY3000V-OMY0001

-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529

SY3000-OMH0002

5 5 / / / / 1 DC VQ (DC ) N.O.( ) 3 () 0.1 2 C-R ( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM ( 2) 5 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 2)Rc ( ) Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 DC / Best Pneumatics No. 1 1 ()ISO VG32 MSDS 1 1 M5

VFS4000-OMY0001

1.52 Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 12 No.VFS4000-OMY0001 8 1EXH 260 9 () 1 ISO VG 32 0 10 1) SUP (AM)(AF) 2) SF4-*-* Nm M3 0.450.6 Nm M3 0.81.2 M4 1.42.5 13 No.VFS4000-OMY0001 11 1 2 3 14 No.VFS4000-OMY0001 EXH.

VFR2000-OMM0001

JIS B 9960-1: -(1 :) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 -2No.VFR2000-OMM0001 1 1 3) 3) 1 1 () -3No.VFR2000-OMM0001 5 5 5 5 ( ) () () 3 3 EXH VVFS2000-R-01-1,2 VVFS2000-R-02-1,2) ( ) ( ) 3 1 DC 3 () -4No.VFR2000-OMM0001 5 5 5 5 0.1 2 C-R () C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5

VFR5000-OMN0001

Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5

VFR3000-OMY0001

-2No.VFR3000-OMY0001 / 1 1.5 *3) *3)1 1 () No.VFR3000-OMY0001 -3- VFRA30004000 5 / () () () () -10 3 3 EXH (VVFS3000-R-03-1,2 VVFS4000-R-04-1,2) () () 3 , 4 VFR3000-OMY0001 VFRA3000,4000 5 1) 2) 1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 1 1) M5 1/61/4 11.5Nm ) 2) Rc Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMY0001 VFRA3000,4000 5 () () 5 3 30 ( ) 1 ()ISO

Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: R (3VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)

Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: S (5VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)

Type of Actuation: 2 (Normally Open), Flow Capacity: Standard, Coil Specification: Standard, Voltage: V (6VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: Non-Locking Push, Port Size: M5 (With Sub-Plate)