Vacuum

44[lq I lrars wurh:8 ,t ic I Appl|cable lube o D oP Applicable lube O.D oP " l " l ' l ' l E f F f e f n l e ^ | o L I r E t #l#ffiJ'xl,LI v ZPRlOB 1 0 1 6 25133.! 50 20 71 25 76 13.8 5.5 ZPRtSB 18 527 sB6.'52.!

ZSE30/ISE30

Note Lead wire length: 2m With mounting screws (M3 x 5L: 2 pcs.)

HRX-OM-X084

Piping thread type : When F is selected, G thread adapter set will be added.

ZSE F/ISE

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping with a hexagon socket cap screws. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Atmospheric release port To a safe place with no water or dust The tightening torque for bracket mounting screw should be 0.98 Nm or less.

Plate Cylinder with Lock Series MLU

Auto Switch Mounting Except for D-P5DWL D-P5DWL Auto switch mounting screw Hexagon socket head cap bolt With SW M3 x 0.5 x 5l M3 x 0.5 x 6l Auto switch Switch mounting bracket With SW, M3 x 0.5 x 14l Round head Phillips screw 8 x 3.3 x t0.8 Flat washer Auto switch Auto switch mounting nut Auto switch mounting nut Tightening torque of auto switch mounting screws should be 0.5 to 0.7Nm.

Series M Miniature Fittings M3, R(PT) 1/8, M5

M3 female -M3 male M-3UL For soft nylon tube. Barb elbow P. 92 3.18/2.18 Body rotates at 360 around the stud axis. Nipple M-5ALU-3 Fitting to workpiece and fitting to fitting connection. P. 90 For polyurethane tube. 3.18/2 M3 Universal tee M5 male -M5 male M-5N Body rotates at 360 around the stud axis. M3 female -M3 female -M3 male For soft nylon and polyurethane tube.

A_HEC-OM-K001

Indicated contents F i n e C o n t r o l o f Sets the fine adjusting value to calibrate the internal temp. sensor.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

VF VFR How to Order Valve Manifold Assembly (Example) VP7 VP4 VQZ2150-5L VQZ2250-5L VQ U side 2 3 4 5 VQZ2350-5L VQ4 VV5QZ2505C6C1 set (C kit 5 stations manifold base) VVQZ200010A-51 set (Blank plate assembly) VQZ21505L 1 set (Valve P/N single solenoid) VQZ22505L 2 set (Valve P/N double solenoid) VQZ23505L 1 set (Valve P/N 3 position) VQZ D side 1 VQD VZS Prefix mark to valves etc. to

LZ-OM003xx

F When mounting the work to the rod end, clamp the end across flat for tightening so that not Model no. A [Tightening torque] L[]ZB[]3 8 14 Across f l at 13 21 L[]ZB[]5 10 22 Across f l at 21 33 Model no. B C D E L[]ZB[]5 M 10 x 1. 25 x 12 deep [24.5Nm ] L[]ZB[]3 M 6 x 1. 0 x 8 deep [5.2Nm ] Model no. [Tightening torque] apply rotating force to the rod.

o

E@-M3 inch(mm) $ f grf r, i -, :,,1 i ,t1':-/,r:frt crommet(G).

o

E@-M3 inch(mm) $ f grf r, i -, :,,1 i ,t1':-/,r:frt crommet(G).

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

( Body Ported Type 2 Position Single : NVJA3120-M3(-F) 2 Position Double : NVJA322O-M3(-F) M3x0.5 2 po.ts (Piot r 0.07(1.8)Dia 2 Mounting hotes 0.13(3.2) Dia 2 Mounting holes \. I f---a I \ -"j f!'-ll L?

HRX-OM-W058

Model number: HRS0-F-0 The transition connector from Rc to G is enclosed as an accessory. For G piping, be sure to use this connector.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

F

F E R E N T D I A.

LZ-OM004xx

A [Tightening torque] L[]ZC[]3[] M3 x 0.5 x 3 deep [0.315Nm] L[]ZC[]5[] M4 x 0.7 x 4 deep [0.75Nm] L[]ZC[]3[] 8 14 Across flat 13 L[]ZC[]5[] 10 22 Across flat 21 *Use locking tool when m ounting foot. L[]ZC[]5[] M10 x 1.25 [24.5Nm] L[]ZC[]3[] M6 x 1.0 [3.0Nm] Caution Model no.

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

3 Port Solenoid Valve Series VQ100 1

Dimensions Grommet VQ10-G-M5 (M3) 29.2 6.1 Manual override 4.9 12.4 14.8 E 2-2.7 mounting hole 12 3.7 18.1 (Lead wire length) 300 Locking type manual override 30.7 28 11 A P (5.9) (5.9) 7 ( 4 . 1 ) 5 5 5 4.9 9.7 4.9 3-M5, (M3) (18.1) ( ): M3 Broken line: Locking type manual override 4-12-10 11 3 Port Solenoid Valve Series VQ100 Dimensions L plug connector VQ10-L-M5 (M3) 35.1 Manual override

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

G: 300 H: 600 2-3.2 eauivalent Bracket (Lead wire length) (Mounting holes) 18.5 (Non-locking) Manual override 28 [34.5] 15.6 18.5 20 13.5 9 46.5 35.5 40.4 (GZ, GS: 41.1) [42.1] 91.7 (GZ, GS: 93.1) [95.1] R R P 11 0.5 10 5-M3 X 0.5 (Piping port) 7 7 [ ] for AC M plug connector (M): SYJ3 20-lMll-M3 3 4 5 3 4 5 L plug connector (L): SYJ3 20-lLll-M3 30.5 19.5 30.5 19.5 300 5.3 1.8 1.8 5.3