3 Port Air Operated Valve

25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 1561 VPA300/500/700

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Example PSS5YJ3-20-03 SYJ3120-5G-M3 SYJ3000-21-1A PSS5YJ3-S41-03-C4 SYJ3140-5LZ SYJ3000-21-2A 1 pc. (Manifold base) 1 pc. (Manifold base) 2 pcs. (Valve) 2 pcs. (Valve) 1 pc. (Blank plate ass'y) 1 pc. (Blank plate ass'y) Use manifold specification sheet. 1.2-18 Series SYJ3000 Flat Cable Manifold Flat Cable Manifold Specifications/(Refer to p.1.2-28 for dimensions.)

5 Port Solenoid Valve

Bore size CJ2 series Pressure 0.5 MPa Load ratio 50% Stroke 60 mm CM2 series Pressure 0.5 MPa Load ratio 50% Stroke 300 mm CS1, CS2 series Pressure 0.5 MPa Load ratio 50% Stroke 1000 mm MB, CA2 series Pressure 0.5 MPa Load ratio 50% Stroke 500 mm Average speed [mm/s] 6 10 16 125 140 160 180 200 250 20 25 32 40 40 50 63 80 100 1100 1000 900 800 700 600 500 400 300 200 100 0 Vertically upward

7.5

silencer SJ3000-50-3AS-ll SJ3000-53-1A SJ3000-42-lA-l SJ3000-76-2A-l VZ1000-11-1-l EX180-ll SJ3000-53-2A End block assembly 2 For U side Refer to the connector block assembly part no. shown below.

LEC-OM07605CN

.1 1-1 EDB 2A.2 1-2 EDB 2A.3 1-3 EDB 2A.4 1-4 EDB 2A 1 2A.5 1-5 EDB 2A.6 1-6 EDB 2A.7 1-7 EDB 2A.8 1-8 EDB 2B 2B.1 1 EDB 2B.2 2 EDB 30.1 DB (1) (1) (1) 30.2 DB 30 (1) (1) (1) (1) 30.3 DB (1) (1) (1) 31 31.1 / SD 8 3 8.

AC Servo Motor Driver (Pulse input type/Positioning type ）

However, setting "0" will be 50%. Example: When you set "50" to the parameter, the filter will be readjusted at the 50 [%] time of 50% or more oscillation level.

Serial Transmission System Series EX250 Series EX500

SV4000 NPT 3/8 Rc 3/8 G 3/8 NPTF 3/8 In case of mixed specification (M), indicate separately on a manifold specification sheet.

0.4

Note 4) Refer to page 50 for details on enclosure.

Valve Single Unit

Port size M5 x 0.8 SX3000 SX3000-39-2A SX5000 SX5000-39-16 A SX7000 SX7000-39-16 A Series Assembly part no. Port size M5 x 0.8 SX3000 SX3000-38-2A SX5000 SX5000-38-16 A SX7000 SX7000-38-16 A Bolt and gasket part no. 1 8 1 4 Note) The SUP port may be either on the lead wire side or on the end plate side.

SYJ3000/5000/7000

/60 Hz L plug 25 2500 mm LN Without lead wire 2 200 VAC 50/60 Hz connector 30 3000 mm LO Without connector 110 VAC 50/60 Hz 50 5000 mm 3 M With lead wire [115 VAC 50/60 Hz] M plug MN Without lead wire 220 VAC 50/60 Hz connector 4 MO Without connector [230 VAC 50/60 Hz] W0 Without connector cable M8 connector For type W, DC voltage is only available.

VQ4000

) (+) 2A SOL.B 2B (+) () 2 stations 1.

Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

0.55

actuation 800 600 400 200 VF1120-01 0 1000 800 600 400 200 VF3130-02 0 1000 800 600 400 200 VF5120-03 0 With : when using steel piping Base Mounted 0.5 MPa = 73 psi Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor

AC Servo Motor Driver (Network card type ）

.1 Linear encoder error 1-1 EDB 2A.2 Linear encoder error 1-2 EDB 2A.3 Linear encoder error 1-3 EDB 2A 2A.4 Linear encoder error 1-4 EDB Linear encoder error 1 2A.5 Linear encoder error 1-5 EDB 2A.6 Linear encoder error 1-6 EDB 2A.7 Linear encoder error 1-7 EDB 2A.8 Linear encoder error 1-8 EDB 2B Encoder counter error 2B.1 Encoder counter error 1 EDB 2B.2 Encoder counter error 2 EDB 30.1

SYJ300/500/700

Example: SS3YJ7-20-03 .1 set (Manifold base) SYJ712-5LZ-01.2 sets (Valve) SYJ700-10-1A.1 set (Blanking plate assembly) SS3YJ7-42R-03-01 .1 set (Manifold base) SYJ714R-5G. 2 sets (Valve) SYJ700-10-2A.1 set (Blanking plate assembly) The asterisk denotes the symbol for assembly.

VQ5000

Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.

0.4

SQ 1000 3A 4 SQ 2000 AXT100 40 FL25 S 03 SSQ1000 Wiring Stations 2A 4 EX510 S D Single wiring Double wiring 01 For 1 station SSQ1000 24 For 24 stations 40 PL26 PL20 JL20 S SSQ1000 PR 4 C8 F AXT100 03 Port size kit C6

SQ1000/2000

3A 4 SSQ2000 AXT100 41 FL25 S 03 Wiring Stations Manifold mounting 01 S D Single wiring Double wiring 1 station DIN rail mount type Direct mount type Nil E 2A 4 1 12 12 stations SSQ2000 41 PL26 PL20 JL20 S Manifold mounting AXT100 03 DIN

4/5 Port Air Operated Valve Series SYJA3000

Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Function 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 220VAC (50/60Hz) 24VDC 12VDC Standard type (1W) Energy saving type (0.5W) External pilot Nil Y Note 1) Seal type R Note 2) Metal seal Rubber seal 0 1 1 2 3 Stations D side U side Note1) Applicable to DC specifications. Note2) See page 35 for details on external pilot specifications.