smcmaintenancepartslist

Contents Bore size (mm) 40 50 63 80 100 MBW40-PS MBW50-PS MBW63-PS MBW80-PS MBW100-PS #8 #9 40 Piston seal NBR Rod seal A NBR Set of left nos. #8, #9, $2, $4 Rod seal B NBR 41 $2 43 $4 45 Release piston seal NBR 40, 41, 43 and 45 to 48 are non-replaceable parts, so they are not included in the seal kit.

4/5 Port Air Operated Valve Series SYJA3000 1

) A B 1.5 11 17.5 Manual override A B 1.5 33 16 (18.5) (21) 18.9 13.5 15 54.5 Manual override 21.6 54.5 28.5 2-1 (Bleed port) 21 R2 P P1 P R R (11) (0.5) 13 10 5 2-1 (Bleed port) M5 x 0.8 (Piping port) 10 10 7 7 14 M3 x 0.5 28 (Piping port) 5-2-21 4 4/5 Port Air Operated Valve Series SYJA5000 How to Order A, B port size Bracket One-touch fitting for 6 C6 One-touch fitting for 4 M5 x 0.8 C4

PFxx-OMJ0005CN

) 10.1 8.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 8.3 C6 6 10.3 8.3 C8 8(5/16) 12 10 C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1

HRX-OM-X084

HRR Series 5.5 Advanced setting mode 5-43 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions Table 5.5-1 List of alarms which allow to continue pump operation Display Alarms which allow to Alarm no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

46 50 2 position 2 position C2 C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

ARM10/11

L 31 398 32 410.5 33 423 34 435.5 35 448 36 460.5 37 473 38 485.5 39 498 40 510.5 IC VBA One-touch Fittings for Regulator Block One-touch Fittings for Common Supply Block VE VVQ1000 50A C4 VVQ2000 51A C6 VY1 G Fitting type Fitting type One-touch fittings for regulator One-touch fittings for regulator block Nil L1 Straight Nil L1 Straight PPA Elbow Elbow AL Fitting size Fitting size C4 C6

Vacuum

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

Vacuum

High vacuum pressure type 26 (660) r-:--l:i:_: , i 55 3la 95 L,. , . 1 s : : High suction flow type 1 6 (400) High tlowBody poded Type -ta 3la 43 ZHl8DL 1 . 8 3la "/e 55 rl 95 Specif ications Ejector Symbol __-IR + I Max.

2

31.1 29.5 13.3 19 (20) AS231F-02-07(S)A 1/4" 11.2 19 33.8 (33.9) 21.4 43.9 21 (22) AS231F-02-09(S)A 5/16" 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-11(S)A 3/8" 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 57.8 50 48.4 44.5 42.9 13.3 42 (42) AS331F-02-09(S)A 5/16" 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-11(S)A 3/8" 15.9 17.4

Table of Contents

(inch) Model N L1 L2 Port B min. bore Weight (g) L3 L4 L5 L6 P Q1 Q2 MA MB FA FB KM11-03-09-6 KM11-03-09-10 KM11-07-11-6 KM11-07-11-10 KM11-09-13-6 KM11-09-13-10 6 65 10 19 40 5 32 5 16 18 29.5 19.5 27 10.6 12 16 18.5 6 10 86 6 77.8 10 104 6 85 10 115 26 61.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area

Air Fittings & Tubing

(inch) Min. hole dia. (1) Fitting size d (inch) D1 D2 M A L2 L1 KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 3 7 6 3 8 11 12 17 17 30 25 17 17.5 25 13.5 2.2 2.5 3 2.5 9.6 7 10 10 8 15.5 1 8 21.5 22.5 14.5 15.5 23 24.5 23.5 33 33.5 26 26.5 35.5 36.5 39.5 40.5 41.5 43 16 18 10.4

KJ

Please consult with SMC for availability. 15-4-43

KQ2

(inch) Min. port size Note) Mass (g) D1 D2 L1 L2 A M L1 Applicable tubing KQ2L01-03 KQ2L01-05 KQ2L03-05 KQ2L03-07 KQ2L05-07 KQ2L05-09 KQ2L07-09 KQ2L07-11 KQ2L09-11 KQ2L09-13 KQ2L11-13 5 32 3 16 3 16 1 4 1 4 5 16 5 16 3 8 3 8 1 2 1 2 17 17.5 25 13.5 2.2 2.5 3 2.5 3 7 6 3 8 11 12 17 17 30 25 9.6 7 10 10 8 15.5 1 8 33 33.5 26 26.5 35.5 36.5 39.5 40.5 41.5 43 21.5 22.5 14.5 15.5 23 24.5 23.5

Table of Contents

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

F

Applicable Model D L A Fitting Size d Inch 3.2(1/8) KQP-01 5 31.5 16 Applicable Model D L A Fitting Size d mm 3.2 KQP-23 3.2 31.5 16 4(5/32) KQP-03 6 32 16 4 KQP-04 6 32 16 4.8(3/16) KQP-05 6.8 34 17.5 6 KQP-06 8 35 18 6.3(1/4) KQP-07 8.5 35 18 8 KQP-08 10 39 20.5 8(5/16) KQP-09 10 39 20.5 10 KQP-10 12 43 22 9.5(3/8) KQP-11 11.5 43 22 12 KQP-12 14 46 24 12.7(1/2) KQP-13 15 46 24 16 KQP-14

One-touch Fittings

10 39 24.8 2 3/8 KQ2P-11 11.5 43 27.4 3.5 1/2 KQ2P-13 15 45.5 28.5 5 D d Applicable fitting size d *1 D is maximum diameter.

AC Servo Motor Driver (Pulse input type/Positioning type ）

The following shows an example of internal connection diagram of the point table method. 16 43 16. POSITIONING MODE Servo amplifier driver (Note 4) CN1 24 V DC Approx. 46 DOCOM CN1 6.2 k SON 15 16 47 DOCOM MD0 22 CPO RA ST1 17 ST2 18 23 ZP (Note 3) DI0 19 24 INP (Note 3) DI1 41 EM2 42 25 MEND LSP 43 Approx.

CATALOG VC10

NPT PORTS NPT PORTS WT. 0.25 350 350 1/16 1/16 .09 .09 73JJ9ZGV 73JJ9ZCV K73JJX 250 250 3/32 3/32 .22 .22 73KK9ZGV 73KK9ZCV K73KKX 175 175 1/8 1/8 .35 .35 73NN9ZGV 73NN9ZCV K73NNX 125 125 5/32 5/32 .45 .45 73OO9ZGV 73OO9ZCV K73OOX 100 100 3/16 3/16 .50 .50 73PP9ZGV 73PP9ZCV K73PPX 50 50 1/4 3/16 .78 .50 73RP9ZGV 73RP9ZCV K73RPX 3-WAY NORMALLY CLOSED GROMMET WHEN ORDERING VALVES OR REPAIR

TABLE OF CONTENTS

NPT PORTS NPT PORTS WT. 0.25 350 350 1/16 1/16 .09 .09 73JJ9ZGV 73JJ9ZCV K73JJX 250 250 3/32 3/32 .22 .22 73KK9ZGV 73KK9ZCV K73KKX 175 175 1/8 1/8 .35 .35 73NN9ZGV 73NN9ZCV K73NNX 125 125 5/32 5/32 .45 .45 73OO9ZGV 73OO9ZCV K73OOX 100 100 3/16 3/16 .50 .50 73PP9ZGV 73PP9ZCV K73PPX 50 50 1/4 3/16 .78 .50 73RP9ZGV 73RP9ZCV K73RPX 3-WAY NORMALLY CLOSED GROMMET WHEN ORDERING VALVES OR REPAIR