Valve Single Unit

13.6 B A Manual override 110.6 (Mounting hole for manifold) 2-4.2 (Press and turn for the locking type.) 18.4 42 (Light/Surge voltage suppressor) (13.4) (52) (5.5) 48.6 (2-4.2 mounting hole) 1.2 (5.5) 48.6 12.5 (47.5) (40.5) 31.5 33.3 28 1.5 H: 600 G: 300 (Lead wire length) SX7120-02 G H 108.9 (EA, EB port) 2-Rc 1/8 (A, B port) 2-Rc 1/4 39.4 Polarity indication 18 18 0.9 18 29.4 20 2 (23.9

5 Port Solenoid Valve

Dimensions Single unit Manifold 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting Mounting hole for M3 Mounting hole for M2.5 Manual override for residual pressure exhaust Manual override for residual pressure exhaust DIN rail clamping screw Stations12 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch

Compact 5-Port Solenoid Valve

JSY1000 manifold pitch for C2 and C4 is 6.5 mm, and 9 mm for C6.

3 Port Solenoid Valve

Double solenoid V110N-D5MOZConnector assembly (for junction common) SJ3000-46-SC Single solenoid V110N-S5MOZConnector assembly (for junction common) SJ3000-46-DC Common wiring Connector assembly SJ3000-46-S (Example) VV100-10-04U1-C6 1 set V110N-S5MOZ-C4 2 sets V110N-D5MOZ-C4 2 sets SJ3000-46-S 1 set (Connector assembly for single solenoid) SJ3000-46-SC 1 set (Connector assembly for single

5 Port Solenoid Valve Series VQZ1000/2000/3000

20.5 17 19.5 15.5 18 20.5 17 19.5 15.5 18 20.5 17 70 70 90 110 130 150 170 190 210 230 250 170 290 310 330 Note) The L dimension of 2 to 3 stations is the same.

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

SV

Valve Manifold Common Specifications Series SV Manifold Specifications Cassette base manifold Applicable series Manifold type 1 (P: SUP)/3, 5 (E: EXH) type Valve stations (maximum) Max. number of solenoids SV1000 SV2000 Stacking type cassette base manifold Common SUP, EXH 18 stations 18 points C8, N9 C3, C4, C6 N1, N3, N7 20 stations 26 points C10, N11 C4, C6, C8 N3, N7, N9 1(P), 3/5(E) port

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

Vacuum System Peripherals:

Section code 13-14-18 Date issued: 18 Photo copying this page is recommended.

smcmaintenancepartslist

hole (Round/Without Shim) For 30 hole (Round/Without Shim) For 18 hole (Round/With Shim) For 30 hole (Round/With Shim) For 18 hole (Diamond/Without Shim) For 30 hole (Diamond/Without Shim) For 18 hole (Diamond/With Shim) For 30 hole (Diamond/With Shim) Clamp Arm Assembly For 20 hole (Round/Without Shim) Kit no.

Fieldbus System

Note 3) When selecting the DIN rail mounting (with DIN rail) of the SV3000 series, and 9 I/O Unit stations will result in a total of 18 valve stations. With 19 and 20 stations, the DIN rail mounting (with DIN rail) cannot be indicated, so please exercise caution. (Refer to DIN Rail Overall Length on pages 45 and 46 .)

ZR

, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

Table of Contents

(Refer to the page 16-8-18.)

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

50 2 position 2 position C2 C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4

Intrinsically Safe Valve

(For details, refer to page 18.) The solenoid must be connected to a safety barrier located in a non-hazardous area.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Station L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 2.2-15 Series SYJ300 42 Type Manifold: Side Ported/SS3YJ3-42Station -M5, C4 Grommet (G), (H) C4 (Built-in one-touch fitting) (Lead wire length) 29.5 48.5

Proposals for Energy Saving

53 30 30 30 59 71 82 46 55 66 45 55 68 58 67 73 21 26 32 23.5 28 34.5 34.5 40 46.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) N NB P S XA XL Y WL WM ZZ M MA MB MC MM 40 50 63 44 50 56 74 83 89 1/4 1/4 1/4 168 183 204 12 16 16 6 6 6 9.5 12.5 15 42 42 52 10 14 14 18 18 18 4 5 5 12 15 15 M6 x 1.0 M8 x 1.25 M8 x 1.25 to 1000 to 1000 to 1000 39 42 52 208 228 254 10 &RXUWHV\RI6WHYHQ(QJLQHHULQJ

High Vacuum Angle Valve

(Refer to page 18.) * Standard lead wire length is 0.5 m. Add M to the end of the part number for 1 m, L for 3 m, and Z for 5 m.

Fieldbus System

Select a valve from R, U, NS or NZ when the SI Unit common is negative common. 18 Series SY3000/5000 Dimensions: Type 10/For EX600 (M12 Connector)/Series SY3000 (mm) C2 C3, N1 C4, N3 C6, N7 2 4 SS5Y3-10S6l l(D) Stations U D B D side U side L3 L4 (DIN rail mounting hole pitch: 12.5) 5.3 Manual override Note 2) (L5) L1 ( ) 4(A) port side : Blue (For rubber seal) : Gray (For metal seal) 2(B)

Large Size Vacuum Module: Series ZR

For nozzle size 18, 20 + with function plate ZR1-SR3-93-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate ZR1-SR3-37-A(a set of six threads) ZR1-SR3-41-A(a set of six threads) 10 ZR1-SR3-42-A(a set of six threads) For nozzle size 18, 20 + with function plate ZR1-SR3-46-A(a set of six threads) When the ejector is compatible