A

Bore size A B C DA DB E F G GA GB H J K L MM ML NN P PW 12 39 39 29 6 8 0 8 29 11 7.5 58 16 13 18 M4 x 0.7 10 M4 x 0.7 M5 7 16 43 43 33 8 10 0 8 33 11 8 64 18 15 22 M5 x 0.8 13 M5 x 0.8 M5 5 20 47 47 37 10 12 0 8 36 10.5 8.5 74 19 17 26 M5 x 0.8 13 M5 x 0.8 1/8 7 S L I D E B E A R I N G 25 47.5 47.5 37.5 12 16 0 8 42 11.5 9 88 21 21 32 M6 x 1.0 15 M6 x 1.0 1/8 8 32 71.5 47.5 37.5 16 20 24

Free Mount Cylinder

Note) 16 16 19 21.5 22 22.5 7 10 11 12 15.5 19.5 13 16 16 19 23 27 13 15 20 26 32 40 10 11 14 16 20 24 22 24 32 40 50 62 17 18 25 30 38 48 3 4 6 8 10 12 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 7 7 7 9 10 11 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 5 6 8 10 4 9 9 13.5 2 4.5

V100

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

15

7 1050 1000 1188 1006 1130 16 7 1050 LAT LZ LC3F2 Motor Mounting Dimensions [mm] Motor type FA FB FC FD FE FF NZ/NT M5 x 0.8 9 70 50 5 46 NY M4 x 0.7 8 70 50 5 46 NX M5 x 0.8 9 63 40* 4.5* 49.7 NW/NU M5 x 0.8 9 70 50 5 47.5 NV M4 x 0.7 8 63 40* 4.5* 49.7 NM1 M4 x 0.7 8 l47.14 38.1* 4.5* 21 NM2 M4 x 0.7 8 l50 36* 4.5* 40.1 * Dimensions after mounting a ring spacer (Refer to page 800.) 795

KQ2

3 16 KQ2H05-01S KQ2H05-02S KQ2H07-M5 KQ2H07-01S KQ2H07-02S 3.5 1 4 M5 x 0.8 M5> M5 x 0.8 2.5 13.6 Applicable tubing 1 8 1 4 1 4 14 13 17 4.6 3 8 KQ2H07-03S 21.9 16.5 17 27 15 16 1 8 1 4 5 16 KQ2H09-01S KQ2H09-02S 24 20.5 27.1 26 14 18.5 6 3 8 KQ2H09-03S 21.4 15.5 24 31 29 17 1 4 KQ2H11-02S KQ2H11-03S 27.5 22.5 33 27.9 Width across flats 8 17 3 8 3 8 21 7 1 2 KQ2H11

Table of Contents

H: M5 x 0.8 H: M6 x 1 Y Model A B C D E F G G Flat Flat with ribs C Y A B Model ZPR10UT 10 11 1 U C U C U C ZPR10 10 1.7 12 12 15 5 6 21 29.9 46 3 ZPR13UT 13 14 ZPR13 1.8 13 1.5 ZPR16UT 16 17 ZPR16 18 16 12.5 21.5 30.4 46.5 3.5 1.2 2.5 ZPR10CT 10 11 0.8 Deep ZPR13CT 13 14 1 ZPR16CT 16 17 H: M5 x 0.8 H: M6 x 1 Model A B C D E F Y G G Dimensions of D are the same.

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

ISO Cylinder

x 0.8 8 12 7 5 28 13.4 4.2 M4 x 0.7 19 6 15 12 10 46 7 6 16 64 76 86 10 12 M12 x 1.25 4 M5 x 0.8 8 12 7 5 28 14.2 4.2 M4 x 0.7 19 6 15 12 10 46 7 6 16 64 76 86 12 16 M16 x 1.5 6 M5 x 0.8 12 17 8 6 38 14.2 6.2 M6 x 1 24 8 18.3 16 14 50 10 9 22 75 91 105 16 16 M16 x 1.5 6 M5 x 0.8 12 17 8 6 38 14.2 6.2 M6 x 1 24 8 18.3 16 13 56 10 9 22 82 98 111 20 20 M22 x 1.5 8 G1/8 16 20 8 8 44 17 8.2 M8

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Port size M5 x 0.8 10-SY3000 SY3000-39-2A 10-SY5000 SY5000-39-16 A 10-SY7000 SY7000-39-16 A t 11 15 18 20 1 4 Series Assembly part no.

Free Mount Cylinder Series CU

15.5 19.5 13 15 20 26 32 40 22 24 32 40 50 62 3 4 6 8 10 12 7 7 7 9 10 11 15 16.5 16.5 Note) 16 16 19 21.5 22 22.5 13 16 16 19 23 27 10 11 14 16 20 24 17 18 25 30 38 48 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 12.5 14 18 22 5 6 8 10 4 9 9 13.5 2 4.5

KJ

(mm) (2) <M5, M6> Connection thread R <M5, M6> (1) A Weight (g) Model D P M L Nylon Urethane 2-applicable tubing D KQ2U23-M5 38 34.5 2.2 2.2 9 M5 x 0.8 10 1 8 KQ2U23-01S KQ2U23-02S 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 11 14 1 4 KQ2U04-M5 39.5 M5 x 0.8 M6 x 1.0 4 2.2 2.2 KQ2U04-M6 40 36 10 11 4 10.4 16 10.4 1 8 KQ2U04-01S 42 38 11 4.2 4.2 D 1 4 KQ2U04-02S 46 40 20 14 KQ2U06-M5 42.5 M5 x

Table of Contents

VB 4 4 5 6 6 SA 4.2 4.2 5.1 6.6 6.6 UB 10 10 12 16 16 O 4.5 4.5 5 5.5 6 R 44 52 63 78 98 TB 8 8 10 10 12 WA YA M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0

5

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

One-touch Fittings

KQ2 Series Model Applicable tubing Connection thread Part number 3.2 M3 x 0.5 KQ2H23-M3G1 3.2 M5 x 0.8 KQ2H23-M51 4 M3 x 0.5 KQ2H04-M3G1 4 M5 x 0.8 KQ2H04-M51 4 M6 x 1.0 KQ2H04-M61 6 M5 x 0.8 KQ2H06-M51 6 M6 x 1.0 KQ2H06-M61 6 R1/8 KQ2H06-01S1 1/8 10-32UNF KQ2H01-321 5/32 10-32UNF KQ2H03-321 3/16 10-32UNF KQ2H05-321 5/32 NPT1/16 KQ2H03-33S1 1/8 M5 x 0.8 KQ2H01-M51 3/16 M5 x 0.8 KQ2H05-M51

MXQ

x 16 M5 x 16 M5 x 12 4.4 4.4 4.4 M6 x 20 M6 x 18 M5 x 14 7.0 7.0 4.4 M8 x 20 M8 x 18 M6 x 18 18.0 18.0 7.0 Metal Stopper Caution 1.

4/5 Port Air Operated Valve Series SYJA3000 1

M5 x 0.8 (Piping port) (Piping port) With fiflter (80 mesh) 21.5 R1 P 8.5 6 6 2-1.8 (Bleed port) 17 17 15 R2 21 With fiflter (80 mesh) 24 32 45.5 3 position closed center/exhaust center/pressure center SYJA5 20-M5 3 position closed center/exhaust center/pressure center SYJA5 40-01 3 4 5 3 4 5 28 2-4.3 2-M5 x 0.8 2-M5 x 0.8 37.5 23 (Pilot port) (For mounting) (Pilot port) A B 11 20 23 5 3

Air Cylinder

30 25 M5 x 0.8 16 16 25 30 32 Rc1/8 16 16 28.5 25 40 Rc1/8 16 16 33 20 50 Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1

MGP

MB MC (Width across flats) MGPM, MGPL Common Dimensions (mm) MD Bore size (mm) MA MB MC MH ML MD MP MT 12 16 20 25 32 40 50 63 80 100 28 29 34 40 52 60 68 84 114 140 16 19 30 30 38 38 50 50 50 65 14 14 22 22 27 27 36 36 46 46 22 22 30 30 37 37 47 47 58 62 9 9 12.5 12.5 16 16 20 20 28 28 M5 x 0.8 M5 x 0.8 M8 x 1.25 M8 x 1.25 M14 x 1.5 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M22 x 1.5 3 3 3

C85

x 0.8 M12 x 1.25 86 7 9.5 11.5 15 19 46 28 10 12 16 16.7 7 5 12 4.2 6 12 10 M4 x 0.7 M5 x 0.8 M12 x 1.25 86 7 9.5 4 11.5 15 19 46 28 10.5 12 16 16.7 7 5 12 4.2 6 12 12 M6 x 1 M5 x 0.8 M16 x 1.5 105 10 10.5 6 12.5 18.3 24 5 50 38 14 17 22 19.7 8 6 16 6.2 8 16 16 M6 x 1 M5 x 0.8 M16 x 1.5 111 10 10.5 6 12.5 18.3 24 5 56 38 14 17 22 19.7 8 6 16 6.2 8 16 20 M8 x 1.25 G 1/8 M22 x 1.5 126 13

Air Slide Table Series MXQ

96 121 146 171 J 46 46 46 56 72 100 155 190 215 I 16 16 16 16 18 23 25 18 21 NN 2 2 2 2 3 3 4 4 4 H 46 46 46 56 56 56 59 62 G 22 22 22 22 17 18 37 56 N 4 4 4 4 6 6 8 8 8 HA 50 50 50 56 48 56 112 118 124 Model F 45 40 48 58 42 55 50 55 62 GA 18 18 18 22 48 73 74 96 118 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 MXQ2010 MXQ2020 MXQ2030 MXQ2040 MXQ2050 MXQ2075 MXQ20-100 MXQ20-125 MXQ20-150 Note