KJ

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 15 12.8 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

ISO Cylinder

x 0.8 8 12 7 5 28 13.4 M4 x 0.7 19 6 15 12 10 46 7 6 16 64 76 86 10 12 M12 x 1.25 4 4 M5 x 0.8 8 12 7 (5.5) 5 (5.5) 28 14.2 M4 x 0.7 19 6 15 12 10 46 (53) 7 6 10.5 16 64 (71) 76 (83) 86 (93) 12 16 M16 x 1.5 6 6 M5 x 0.8 12 17 8 (5.5) 6 (5.5) 38 14.2 5 M6 x 1 24 8 18.3 16 14 50 (54) 10 9 9.5 22 75 (79) 91 (95) 105 (109) 16 16 M16 x 1.5 6 6 M5 x 0.8 12 17 8 (5.5) 6 (5.5) 38 14.2 5 M6 x

Table of Contents

72 2-M5 x 0.8 thread depth 5.5 Mounting thread 26 52 10.6 E 20 20 24 33 E 0 -0.1 2-4.3 through (Mounting hole) 27 25 25 M5 x 0.8 2-7.5 1.2 1.2 Finger opening port E-E +0.1 0 Close: 0 Open: 161 4-M5 x 0.8 thread depth 5.5 Mounting thread 36 8-M4 x 0.7 thread depth 4 Attachment mounting thread Auto Switch Mounting Groove Dimensions 20 43 2.2 2-3H9 +0.025 0 depth 3 4 15 5 15 5 4.6 3 2-M5 x

5

(mm) Bore size A B C D F GA GB H MM NA NB NDh8 NN S Z 10 15 12 14 4 8 8 5 28 M4 x 0.7 12.5 9.5 8 0 0.022 M8 x 1.0 46 74 16 15 18.3 20 5 8 8 5 28 M5 x 0.8 12.5 9.5 10 0 0.022 M10 x 1.0 47 75 Single foot (L) CJ2YL Bore size Stroke Head cover port location Z Mounting nut Rod end nut Piping port 2 x M5 x 0.8 GB NN F GA Cover surface MM C D 0 0.3 LY LB B LH 0 0.3 B LX LT Piping port M5 x 0.8

Electric Actuators

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

MXQ

10 16 12 4 MXQ-CT12(L)-X11 15 32 G MXQ-CT12(L)-X12 25 42 B C MXQ-CT16(L) 5 23 J MXQ16(L) M10 x 1 M5 x 12 MXQ-CT16(L)-X11 15 33.5 35.5 20 12 17 14 5 33 MXQ-CT16(L)-X12 25 43 A K MXQ-CT20(L) 5 27 MXQ20(L) MXQ-CT20(L)-X11 M5 x 14 M12 x 1.25 15 41 44.5 25 23 37 13 17 6 MXQ-CT20(L)-X12 25 47 MXQ-CT25(L) 5 30 MXQ25(L) M14 x 1.5 M6 x 18 MXQ-CT25(L)-X11 15 40 49 53.5 31 15 28 19 6 MXQ-CT25(L)-X12

Air Cylinder

30 25 M5 x 0.8 16 16 25 30 32 Rc1/8 16 16 28.5 25 40 Rc1/8 16 16 33 20 50 Rc1/4 18 18 40.5 20 63 Rc1/4 18 18 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 MB MB1 CA2 CS1

C85

x 0.8 74 7 15 9.5 6 11.5 19 4.2 12 46 28 12 16.7 16 M12 x 1.25 7 5 12 10 10.5 4 M4 x 0.7 M5 x 0.8 74 7 15 9.5 6 11.5 19 4.2 12 46 28 12 16.7 16 M12 x 1.25 7 5 16 12 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 17 50 38 16 19.7 22 8 6 M16 x 1.5 16 16 14 6 M6 x 1 M5 x 0.8 88 10 18.3 10.5 8 12.5 24 6.2 5 17 50 38 16 19.7 22 8 6 M16 x 1.5 22 20 17 M8 x 1.25 8 G 1/8 106 13 24 15 11

ZP

Form w 1 Material e Vacuum inlet r Width across flats K Connection thread 10 13 A5 67 46 29.9 21 2.5 M5 x 0.8 21 8 4 10 8 M5 x 0.8 16 67.5 46.5 30.4 21.5 10 13 A Q 72 46 29.9 21 2.5 10 8 M5 x 0.8 16 72.5 46.5 30.4 21.5 20 25 83.5 57.6 39.8 29 3.5 25.9 12 12 M8 x 1.25 32 84 58.1 40.3 29.5 40 86.5 60.6 42.8 32 4 50 87.5 61.6 43.8 33 20 25 A8 26 D C B N S U F GN GS M A6 M6 x 1 8 4 04 06 08 ZP

Air Fittings & Tubing

D2 L A M D1 Nylon Urethane M5 X 0.8 M6 X 1.0 38.5 KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S 11 13 39 35 8 16 10.4 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 1 8 M5 X 0.8 M6 X 1.0 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 17 15 12.8 38 39 42 43 44 1 8 1 4 1 8 20 26 28 34 42 68

Table of Contents

E-M5 thread depth 10 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 46 76 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch

MGP

MGPM, MGPL Common dimensions (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL CV P PA PB PW Q 25, 50, 75, 100 71 58 1.5 1.5 11 8 8.5 9 M5 x 0.8 12 13 15 M5 x 0.8 4.3 5.6 5.6 M5 x 0.8 Rc 1/8 Rc 1/8 40 10 16 18 26 64 83 93 8 9.5 9.5 19 8 10 12 M4 M5 M5 4.5 5.5 5.5 8 10 10 15 18 21 5 6 6 15 18 21 30 36 42 22 24 30 16 20 25 78 62 10.5 M5 x 0.8 M5 x 0.8

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Rod End Lock: -R Bore size (mm) WH W P WA WB 20 30 M5 x 0.8 16 15(16) 23 25 30 M5 x 0.8 16 15(16) 25 32 25 Rc 1/8 16 15(16) 28.5 40 20 Rc 1/8 16 15(16) 33 50 20 Rc 1/4 18 17(18) 40.5 63 20 Rc 1/4 18 17(18) 47.5 80 20 Rc 3/8 22 22 60.5 100 20 Rc 1/2 22 22 71 ( ): Denotes the dimensions for long strokes.

REA/REB

Speed 600 mm/s (mm) Model A EA EB H HA HB HC HG HP HT J L LL LW M MM REBH15 REBH25 97 26.5 21 46 33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65 75 27 103 9.5 High Precision Guide

Electric Actuator with Integrated Guide

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

MY1

16 C 3.5 4.5 5.5 6.5 8.5 10.5 12.5 N 20 25 30 37 45 47 50 G 8.5 10.5 16 19 23 25 27.5 GB 16.2 20 24.5 30 36.5 37.5 39.5 H 40 46 54 68 84 107 130 J M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M10 x 1.5 M14 x 2 M16 x 2 K 10 12 9.5 16 15 28 32 LH 22.5 23 27 35 38 29 32.5 L 80 100 102 132 162 200 230 LD 3.6 4.8 5.6 6.8 8.6 11 13.5 MW 66 80 96 HG 13.5 17 22 27 34.5 45 59 MM M4 x 0.7 M5 x 0.8 M5 x 0.8

REA/REB

106 M5 x 0.8 17 45 33.5 33.5 46 21 26.5 97 50 8 23.5 M5 x 0.8 75.5 48.5 108 M5 x 0.8 16 53 41.5 42.5 54 22 26.5 102.5 58.5 10 28 M6 x 1.0 86 56 138 M6 x 1.0 25 61.5 46 46 63 24 29 125 W PP TW PB S PA ZZ P Z NT XB NL Model N REAH15 REAH20 REAH25 21 65 62 161 50 17.5 M5 x 0.8 194 8 88.5 15 16.5 23 70 65 169 50 19.5 Rc 1/8 205 8 92.5 15 18 27 75 75 209 65 23.5 Rc 1/8 250 9 103 9.5 18 20.5

REA/REB

REAH20 REAH25 42 19 M5 x 0.8 8 71.5 106 44 M5 x 0.8 17 33.5 33.5 45 46 97 26.5 21 50 8 23.5 M5 x 0.8 48.5 75.5 108 53 16 M5 x 0.8 41.5 22 54 42.5 26.5 102.5 58.5 28 M6 x 1.0 10 86 138 56 M6 x 1.0 25 46 46 61.5 63 125 29 24 TW S XB Z ZZ W PA PB PP P Model N NL NT REAH15 REAH20 REAH25 161 65 17.5 194 21 88.5 62 8 M5 x 0.8 50 15 16.5 70 169 92.5 205 19.5 50 65 23 Rc 1/8 18 15 8 209 75 23.5

Proposals for Energy Saving

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 59 71 82 46 55 66 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 4 5 5 16 16 16 12 15 15 44

CY1

A 97 102.5 125 NT 8 8 9 NL 15 15 18 N 16.5 18 20.5 MM 8 8 10 M M5 x 0.8 M5 x 0.8 M6 x 1.0 LW 71.5 75.5 86 LL 44 48.5 56 L 106 108 138 J M5 x 0.8 M5 x 0.8 M6 x 1.0 HT 19 23.5 28 HP 42 50 58.5 HG 17 16 25 HC 45 53 61.5 HB 33.5 41.5 46 HA 33.5 42.5 46 H 46 54 63 EB 21 22 24 EA 26.5 26.5 29 CY1H15 CY1H20 CY1H25 Model P M5 x 0.8 Rc(PT)1/8 Rc(PT)1/8 Z 194 205 250 XB 9.5 XA 11.3 W 88.5 92.5