Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Station L1 L2 Station 20 224.5 217.5 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 613 3 Port Pilot Solenoid Valve 10-SYJ300 C4 N3 [ ] for AC Type 42 Manifold: Side Ported/10-SS3YJ3-42Stations -M5, Grommet (G) For M5

5 Port Solenoid Valve

Dimensions Single unit Manifold 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting Mounting hole for M3 Mounting hole for M2.5 Manual override for residual pressure exhaust Manual override for residual pressure exhaust DIN rail clamping screw Stations12 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch

Compact 5-Port Solenoid Valve

JSY1000 manifold pitch for C2 and C4 is 6.5 mm, and 9 mm for C6.

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

SV

10 298 287.5 263.3 17.5 11 310.5 300 279.3 15.5 12 323 312.5 295.3 14 13 335.5 325 311.3 12 14 360.5 350 327.3 16.5 15 373 362.5 343.3 15 16 385.5 375 359.3 13 17 410.5 400 375.3 17.5 18 423 412.5 391.3 16 19 435.5 425 407.3 14 20 448 437.5 423.3 12.5 L1 L2 L3 L4 1-2-60 57 Circular Connector Series SV Dimensions: Series SV1000 for Circular Connector U D B C3, N1 C4, N3 C6, N7 Stations (S

5 Port Solenoid Valve Series VQZ1000/2000/3000

or less 26 or less 26 or less 18 or less 13 or less 30 or less 30 or less 30 or less 22 or less 13 or less 33 or less 33 or less 33 or less 0.20 0.40 0.20 0.40 0.29 0.38 0.28 0.38 0.41 0.21 0.39 0.21 0.39 0.21 0.33 0.23 0.33 0.28 0.34 0.23 0.34 0.23 0.34 0.19 0.30 0.19 0.30 0.25 0.38 29 or less 34 or less 13 or less 13 or less 40 or less 47 or less 40 or less 47 or less 47

VZ100/300/500

Material Aluminum die-casted Note Platinum silver Black Black Description Sub-plate Material Aluminum die-casted Epoxy/Stainless steel NBR Description No. q w e r t y DXT200-13-1P Piston plate Body DXT170-C13 x 11 x 1 Solenoid assembly O-ring Resin Aluminum die-casted Common with VZ100 End cover Piston Spool valve assembly Spool spring Thread type Resin Sub-plate part no.: DXT200-13-1P Nil

Vacuum System Peripherals:

ZSE30/ZSE40/ZSE5B 13-14-9 2. ZSE6B/ZSE3/ZSE1/ZSE2 13-14-10 3. PS1100/ZSP1/PSE200/530 13-14-11 Misc. Pressure gauge for vacuum: GZ46 13-14-12 Pressure Gauge for Vacuum Related Products: Air Line Equipment/Modular Type 1. Air filter: Series AF 13-14-13 2. Regulator: Series AR 13-14-13 3. Filter regulator: Series AW 13-14-13 4.

ZR

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

smcmaintenancepartslist

(FKM can be selected.) 12 12 Bumper A Bumper A Resin Resin 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) Tube gasket Tube gasket NBR NBR (FKM can be selected.) (FKM can be selected.) 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit. 11, 12 and 13 are non-replaceable parts, so they are not included in the seal kit.

3 Port Solenoid Valve Series SYJ300/500/700

Station n L1 L2 3 46 39 Station 20 224.5 217.5 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 Station 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 11 Series SYJ300 C4 N3 Type 42 Manifold: Side Ported/SS3YJ3-42Stations -M5, [ ] for AC Grommet (G) For M5 C4 N3 For (Built-in one-touch

Fieldbus System

, N1, N3 <4(A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting DIN rail clamping screw L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 n1: Valve stations n2: I/O Unit stations L1: DIN Rail Overall Length [mm] Valve I/O stations Unit (

Table of Contents

unit (digit) T 16-13-4 Temperature characteristics The amount of leakage TSJ 16-13-5 E N Ejector 16-13-3 U Noise resistance Non reversed output mode Normal mode NPN output 16-13-4 F Unit conversion URJ 16-13-5 F.S.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

50 2 position 2 position C2 C2 SJ3l60-C2 SJ2l60-C2 2 onetouch fitting 2 onetouch fitting 3 position 4 position 3 position 4 position 71 65 73 46 41 44 2 position 2 position C4 C4 SJ3l60-C4 SJ2l60-C4 4 onetouch fitting 4 onetouch fitting 3 position 4 position 3 position 4 position 77 48 73 61 69 44 39 42 2 position 2 position C6 SJ3l60-C6 SJ2l60-M3 6 onetouch fitting M3 x 0.5 3 position 4

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 17.2 10.2 3.6 3.6 XLFV-25-2 46 21.4 10.2 3.6 3.6 XLFV-40-2 54.5 33.9 10.2 3.6 3.6 XLFV-50-2 71 35.3 12 4 2 XLFV-63-2 80.5 43.8 12 4 2 XLFV-80-2 90.5 59.8 12 4 2 13 A Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Station L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 2.2-15 Series SYJ300 42 Type Manifold: Side Ported/SS3YJ3-42Station -M5, C4 Grommet (G), (H) C4 (Built-in one-touch fitting) (Lead wire length) 29.5 48.5

Proposals for Energy Saving

Specifications are the same as those on page 3.4-13.

Valve Single Unit

How to Order Port Block Assembly Only replacement of the fittings assembly is possible. 000 6A SY Metric size One-touch fitting for 6 One-touch fitting for 4 VVQ1000-51A-C4 VVQ1000-50A-C6 SX3000 VVQ1000-50A-C4 Series Thread type One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 Symbol Series Nil Rc 3 SX3000 SX5000 VVQ1000-51A-C6 VVQ1000-51A-C8 G F 5 SX5000 N NPT 7 SX7000

Fieldbus System

, N1, N3 <4(A), 2(B) port> C2: 2 One-touch fitting C3: 3.2 One-touch fitting C4: 4 One-touch fitting N1: 1/8" One-touch fitting N3: 5/32" One-touch fitting DIN rail clamping screw L2 = L1 10.5 L3 = 8.5 x n1 + 46 L4 = L3 + 81 + 47 x n2 L5 = (L1 L4)/2 L6 = 8.5 x n1 + 31 L7 = 47 x n2 + 86.1 (mm) L1: DIN Rail Overall Length Valve stations (n1) I/O Unit stations (n2) 1 2 3 4 5 6 7 8 9 10 11

Large Size Vacuum Module: Series ZR

For nozzle size 18, 20 + with function plate ZR1-SR3-93-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate ZR1-SR3-37-A(a set of six threads) ZR1-SR3-41-A(a set of six threads) 10 ZR1-SR3-42-A(a set of six threads) For nozzle size 18, 20 + with function plate ZR1-SR3-46-A(a set of six threads) When the ejector is compatible