SX

Refer to external dimensions in pages 1-6-44 to 1-6-46, and then mount it. 1-6-43 44 SX3000: SS5X3-20Stations Grommet (G) (P , EA, EB port) (M5 port) 2-One-touch fittings (A, B port) Applicable tubing O.D.: 4 6 Manual override (Press and turn for the locking type.) A: Orange B: Green (SUP port is mounted on the end plate side of single solenoid.)

One-touch Fittings Series KQ2

Nylon Urethane KQ2W23-M5 30 8 31 10 M5 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 1 8 KQ2W23-01S KQ2W23-02S 10 14 3.2 1 4 KQ2W04-M5 KQ2W04-01S 8 18 30 37.5 32 38.5 M5 0.8 11 3.0 3.0 8 10.4 1 8 4 16 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 KQ2W06-M5 KQ2W06-01S 30.5 40 33.5 42.5 M5 0.8 8 3 3 8 1 8 10 6 17 12.8 20 1 4 10 KQ2W06-02S 46 46.5 17 14 10.9 10.9 41 3 8 KQ2W06-03S

AC Servo Motor Driver (Network card type ）

40 38 37 36 40 41 42 43 44 45 46 47 48 49 4A 4B 4C 4D 4E 4F 50 51 52 53 54 55 56 57 58 59 5A 5B 5C 5D 5E 5F 17.6 16.5 15.6 14.8 14.1 13.4 12.8 12.2 11.7 11.3 10.8 10.4 10.0 2250 1125 750 562 450 375 321 281 250 225 204 187 173 160 150 140 132 125 118 112 107 102 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 13 14 15 16 17 18 19 1A 1B 1C 1D 1E 1F -8.5 -7.2 -6.0 -5.0 -4.1 -3.3 -2.5 -1.8 -1.2

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

LEC-OM07605CN

PB26](_ _ _ 1) 5 28 5. [] PB45 CNHF _ _ x x 5.5 00h _ x _ _ 5.6 0h x _ _ _ 0h 5.5 [Hz] [Hz] [Hz] 00 20 70 40 17.6 01 2250 21 66 41 16.5 02 1125 22 62 42 15.6 03 750 23 59 43 14.8 04 562 24 56 44 14.1 05 450 25 53 45 13.4 06 375 26 51 46 12.8 07 321 27 48 47 12.2 08 281 28 46 48 11.7 09 250 29 45 49 11.3 0A 225 2A 43 4A 10.8 0B 204 2B 41 4B 10.4 0C 187 2C 40 4C 10 0D 173 2D 38 4D

Stainless Steel 316 Fittings

Hexagon Socket Head Male Connector: KQG2S (M5) Applicable tube O.D.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

depth 4 (Mounting screw) VQ7 ( ): M5 x 0.8 : With light/surge voltage suppressor EVS M5 01 M5 01 Conduit terminal: VF1120-T-M5 01 DIN terminal: VF1120-DVF1120-YVFN Applicable cable O.D. 6 to 8 Applicable cable O.D.

ZP

(mm) Vacuum entry (Female thread) Vertical Vacuum entry direction M8 x 1.25 M5 x 0.8 Rc 1/8 Connection/Vacuum entry Connection 10 Female thread 10 to 16 17 14 19 M5 x 0.8 20 to 32 10 to 16 47 46 M5 x 0.8 40, 50 M8 x 1.25 20 to 32 Pad dia.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators (A, B port) 3/8, 1/4 21 13.5 (Light/surge voltage suppressor) (For mounting) 2 x 4.3 43.1 21.5 21 61 Manual override A B PE 38 46 + B A + X EA EB P 21.5 G: Approx. 300 H: Approx. 600 77 121.4 [125.8] 21 (External pilot port) M5 x 0.8 M5 x 0.8 (Lead wire length) (Pilot EXH port) 58.5 [65.5] Air Preparation Equipment

ZP

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

ZP

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Vacuum Pad

ZP2-TB20MB-H5 ZP2-TB06MB-B5 ZP2-TB08MB-B5 15 M5 x 0.8 11 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) 2.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 2.5 Width across flat 3 (Hexagon) (18) 5 5.5 5.5 3.5 (14.5) Width across flat 3 (Hexagon) (17) 8 8 (17) 13 11 18 9 9 14.4 9.6 8.4 5.5 4.5 4 4 20 15 2 2 21 3.3 4.7 16 8 6 9 7 15 Symbol/Type Bellows Pad ZJ: Bellows 2, 4, 5, 6, 40, 46 Pad diameter

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS131FG-M5-23 AS131FG-U10/32-01 19.8 19.8 3.2 8.4 1/8" 8.4 17.5 28.7 28.7 12.7 17.5 7 12.7 AS131FG-M5-04 AS131FG-U10/32-03 28.6 M5 0.8 25.8 20.3 20.3 4 9.3 5/32" 9.3 9.6 9.3 7 8 25 22.2 10.8 28.6 25.8 10-32 UNF 22.2 25 9.6 9.3 10.8 8 AS131FG-M5-06 AS131FG-U10/32-05 20.6 31.8 34.5 13.5 23.3 21.4 21.3 6 11.6 3/16" 11.4 16.5 8 AS231FG-01-23 AS131FG-U10/32-07 31.9 20.7 24.4 21.6 3.2 8.4 1

JXCx-OMT0023

PD ) 4 -46 4.4.1 Parameter list 4 -46 4.4.2 List of details 4 47 4.4.3 Using forward/reverse rotation stroke end to change the stopping pattern 4 58 5.

Manually Operated Integral Fitting Type/Threaded Type Series LVH

55 3.5 Rc 1/4, NPT 1/4 27 37 20 4 77 75.5 36 30 56 19 15 80 5.5 Rc 3/8, NPT 3/8 37 46 34 7.5 111.5 109.5 47 36 PPS 68 20.5 22 99.5 5.5 Rc 1/2, NPT 1/2 50 57 42 8 142.5 138.5 60 46 44 10 14.5 58.5 3.5 Rc 1/4, NPT 1/4 27 37 20 4 80.5 79 36 30 56 19 19 84 5.5 Rc 3/8, NPT 3/8 37 46 34 7.5 115.5 113.5 47 36 PFA 68 20.5 22 99.5 5.5 Rc 1/2, NPT 1/2 50 57 42 8 142.5 138.5 60 46 484 Series

30

KQB2W16-03S KQB2W16-04S 31.2 31.3 35.1 31.6 31.7 35.5 32.7 32.8 36.6 38 37 40.2 41.6 46.6 45.9 50.1 47.7 49 53.2 57.6 61.4 13.1 32.4 32.3 34.5 33.2 33.1 35.3 13.5 15.3 34.7 14.1 16.2 35.6 16 17.8 37.2 60.3 28.9 39.2 63.7 42.1 64.5 123 46 58.2 118 89.6 116 M5 x 0.8 1/8 1/4 M 3.2 12 8.3 2.8 13.6 D 3 13.7 M5 x 0.8 1/8 1/4 4 12.6 9.1 14.4 4 3 A L2 14.7 M5 x 0.8 1/8 1/4 3/8 1/8 1/4 3/8 1/4 3/8