SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

SZ3000

112.5 97 13 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 External Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 198 187.5 170.5 14 210.5 200 181 15 223 212.5 191.5 16 235.5 225 202 17 248

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

Intrinsically Safe Valve

53-SS5Y5-41-05-01 1 set (Type 41, 5 station manifold base part no.) 53-SY5240-LL3 2 sets (Double solenoid part no.) 53-SY5140-LL3 2 sets (Single solenoid part no.)

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Fittings & Tubing Air Cylinders Rotary Actuators Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 20 20 20 Positive pin (Common) Positive pin 19 19 19 18 18 Station 9 SOL.b Negative pin Negative pin (Common) 18 17 17 SOL.a Station 16 Station 16 17 16 16 Station 8 SOL.b 16 15 15 SOL.a 15 6 6 SOL.b Station 5 SOL.b Station 5 4 5 4 5 Station 2

ZR

17 Series ZR Vacuum Switch + Suction Filter Unit: ZR1-F Specifications Combination unit of vacuum pressure switch for vacuum pressure detection and suction filter to protect the unit from dust and contamination.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

For the DIN rail model number, refer to page 4-14-17.

Table of Contents

OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Refer to p.2.10-17 for DIN rail part number.

Table of Contents

Dimensions . 5 5 5 5 6 7 9 9 10 12 15 17 23 23 24 24 25 29 34 37 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 39 39 40 40 41 41 43 45 47 54 54 55 55 56 60 65 68 70 70 71 71 72 77 78 82 84 87 89 91 93 96 97 98 99 99 100 101 102 Series MSUB Rotary Table: Basic Type

CRB2/CRBU2/CRB1

A B C D G E (g6) F (h9) Model Y X W V U T S2 S1 R N M L K H CRBU2WU10-S 0 0.036 4 0.004 0.012 3 41 31 25 3 17 M3 x 0.5 3.5 M5 x 0.8 10.5 10.5 0.5 9 15.5 1 14 19.5 22 29 9 CRBU2WU15-S 0 0.043 0.004 0.012 3.2 48 36 29 3 21 M3 x 0.5 3.5 M5 x 0.8 10.5 10.5 0.5 10 15.5 1.5 18 21.2 25 34 12 5 CRBU2WU20-S 0 0.043 0.004 0.012 4 59 44 36 4 26 M4 x 0.7 4.5 M5 x 0.8 11 11.5 0.5 10 17 1.5 20 25 34.5

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(The standerd valve has an individual exhaust for the pilot valve.) 2.10-38 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting size Series M5 (VQZ100 only) VQZ100 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-50A-M5 VQZ200 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 SY VQZ300 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 4 0.004 0.012 0 0.036 0 0.043 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 1 14 19.5 22 29 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 12 5 1.5 18 21.2 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0.004 0.012 0 0.043 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 14 6 1.5 20 25 34.5 42 17 10 0.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) A B C D G E(g6) F(h9) H K L M N R S1 S2 T U V W X Y Model CRBU2WU10-S 0 0.036 0 0.043 4 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 17 3 25 31 41 9 1 14 19.5 22 29 15.5 9 0.5 10.5 10.5 3 CRBU2WU15-S 0.004 0.012 M5 x 0.8 3.5 M3 x 0.5 21 3 29 36 48 12 5 1.5 18 21.2 25 34 15.5 10 0.5 10.5 10.5 3.2 CRBU2WU20-S 0 0.043 0.004 0.012 M5 x 0.8 4.5 M4 x 0.7 26 4 36 44 59 14 6 1.5 20 25 34.5 42 17 10 0.5

Vacuum System Peripherals:

17 Date issued: Photo copying this page is recommended.

Table of Contents

, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 2-C4, C6 C4: One-touch fitting for 4 C6: One-touch fitting for 6 4.5 4.5 M3 mounting hole M2.5 mounting hole Residual pressure release manual override DIN rail clamp screw 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread D side U side Stations 1 2 3 Dimensions

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

Interchargeable Cylinder Ports High Speed Response Time SY3000 double, 0.5MPa 24VDC, without surge voltage suppressor Interchangeable port sizes [ports A, B] Series C4, C6, M5 C4, C6, C8, Rc(PT) 1/8 C8, C10, Rc(PT) 1/4 SY3000 The innovated design of the pilot valve enables the SY to achieve a response time of 10ms while only consuming a half watt of power.

PFxx-OMJ0005CN

C8 8(5/16) 12 10 N7 1/4 10.3 8.3 N7 1/4 10.3 8.3 PFM7-01/02--X693 PFM7S-01/02--X693 A B C() A B C() Rc1/81/4 Rc1/81/4 NPT1/81/4 NPT1/81/4 13 11 17 13 11 17 G1/8 G1/8 G1/4 17 15 21 G1/4 17 15 21 -73No.PF-OMJ0005CN-I PFM7-C4/C6/C8/N7--X694 PFM7S-C4/C6/C8/N7--X694 A B A B C4 4(5/32) 10.1 36.1 C4 4(5/32) 10.1 8.1 C6 6 10.3 36.3 C6 6 10.3 8.3 C8 8(5/16) 12 37 C8 8(5/16) 12 10 N7 1/4 10.3 36.3