Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting Formula L1 = 16n + 36.5 L2 = 16n + 186 (In case of 1 pc.

Table of Contents

0.36 4.7 18 0.40 5.0 20 0.28 5.2 23 0.32 6.2 23 0.27 5.8 25 0.21 6.2 16 0.37 4.6 18 0.41 5.1 20 0.27 5.2 23 0.32 6.1 23 0.26 5.8 25 0.20 6.1 15 0.38 4.1 16 0.31 4.3 17 18 0.31 0.28 4.6 4.7 20 21 0.33 0.30 5.4 5.4 14 0.38 3.6 17 [16] 0.39 [0.35] 4.8 [4.3] 17 0.29 4.6 18 0.29 4.6 21 [18] 23 [20] 0.31 [0.34] 5.6 [5.0] 0.27 [0.33] 5.9 [5.2] 16 [9.4] 0.39 [0.40] 4.2 [2.6] 17 0.36 4.5 20 0.31

VQZ1000/2000/3000

seal) (Lead wire length) 23.5 mounting hole 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole VQC 0.8 4 SQ 8.6 17 10 24 SMC SMC 2 R2 25.8 Cover diameter 1.6 Cross section 0.34 mm2 VQ0 2-C3, C4, C6, M5 16.6 23.6 60.3 C3: One-touch fitting for 3.2 VQ4 C4: One-touch fitting for 4 Manual override C6: One-touch fitting for 6 M5 : M5 thread VQ5 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Series SV

12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 L1 L2 L3 L4 47 47 Series SV Circular Connector Dimensions: Series SV2000 for Circular Connector 1in = 25.4mm U D B Cassette base manifold: SS5V2-W16CDStations (S, R, RS) C4, N3 C6, N7 C8, N9 When P, E port outlets are indicated on

5 Port Solenoid Valve

Max. 32 stations Slim compact Plug-in manifold Bar base C2 (2) C3 (3.2) C4 (4) N1 (1/8") N3 (5/32") SS0751-m F kit: D-sub connector 185 17 Max. 24 stations P kit: Flat ribbon cable 181 17 Max. 24 stations J kit: PC wiring compatible flat ribbon cable 181 17 Max. 16 stations S kit: Serial transmission (EX500) 260 Note 2) 20 Max. 16 stations S kit: Serial transmission (EX250/260/600) 260 Note

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. 0.2 SS5YJA3-41-03-M51 pc. SYJA3140 1 pc. SYJA3240 1 pc.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

Modular F.R.L. Units

1/4 Width across flats 17 1/4 Width across flats 17 1/4 Standard specifications Model P1 P2 A B C E F G J K Bracket mount M N Q1 Q2 R S U V AC20C-B 1/8, 1/4 1/8 126.4 87.6 26.5 41.6 40 28.5 2 1 30 43.2 24 33 5.5 12 3.5 29 AC25C-B 1/4, 3/8 1/8 167.4 115.1 28 30 55.1 50 27.5 0 41 57.2 35 7 14 4 41 AC30C-B 1/4, 3/8 1/8 167.4 115.1 30.7 30 55.1 50 29.4 3.5 41 57.2 35 7 14 4 41 AC40C-B 1/4

SV

L Dimension n: Stations L n 2 148 137.5 119.3 14.5 3 160.5 150 129.8 15.5 4 173 162.5 140.3 16.5 5 185.5 175 150.8 17.5 6 185.5 175 161.3 12 7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300

0.4

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357

0.

DIN terminal (Y): VQZ2l2l-lYll1-C4, C6 L-type plug connector (L): VQZ2l2l-lLl1-C4, C6 (Lead wire length) Approx. 300 79 [81.2] 28.8 [35.8] 85.4 Max. 10 45.5 Pg7 Applicable cable O.D. 3.5 to 7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ2l2l-lMl1-C4, C6 (Lead wire length) 61.4 53.9 42.6 40.1 [47.1] Approx. 300 27.9 69.2 [71.4] 64.2

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

smcmaintenancepartslist

6 17 !8 19 Rod seal NBR Component part numbers: !4, !5, !6, !8. Cushion seal Urethane 17 and 19 are non-replaceable parts, so they are not included in the seal kit. Piston seal NBR Seal kit includes a grease pack (40 g). Order with the following part number when only the grease pack is needed.

Mechanically Jointed Rodless Cylinder Series MY1

Grease pack part number: D-X GR-S-010 (10 g), GR-S-020 (20 g) Individual -X Technical data 961 Series MY1B Construction: 16 to 100 MY1B16 to 100 23 33 32 31 30 24 8 4 6 7 5 1 2 11 19 16 3 6 47 30 37 39 26 MY1B16/20 38 40 MY1B80/100 36 MY1B16 45 43 11 13 15 12 17 20 28 26 10 18 SMC SMC 22 27 MY1B63 36 21 46 44 34 MY1B50/63/80/100 S 42 41 16 9 MY1B80/100 17 MY1B16 29 MY1B80/100 25 14 35 29

SZ3000

When the port size of the external pilot block assembly is 4, indicate with C4 in section (c).

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

SZ3000

112.5 97 13 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 External Pilot Manifold L Dimension n: Stations (n1 + n2) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 L1 L2 L3 L4 135.5 125 107.5 14 148 137.5 118 15 160.5 150 128.5 16 173 162.5 139 17 173 162.5 149.5 12 185.5 175 160 13 198 187.5 170.5 14 210.5 200 181 15 223 212.5 191.5 16 235.5 225 202 17 248