Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

02 16 stations y SUP/EXH block assembly 2 stations Symbol Communication connector Number of outputs Specified layout Note 2) (Available up to 32 solenoids) Protocol Nil R Internal pilot External pilot 20 0 QA QB NA NB NC ND VA VB DA DB FA FB EA EB 20 stations Without SI unit 32 16 32 16 32 16 32 16 32 16 32 16 32 16 For 16-output SI unit DeviceNet M12 i Mounting Symbol 02 Stations Note 2

VQZ1000/2000/3000

L2 L3 L4 2-7-50 Base Mounted 51 51 Series VQZ1000/2000/3000 Plug Lead Unit: Manifold VQZ2000 VV5QZ25Stations Port size C Grommet (G) 36.5 (12) (35) (5.5) 44.5 mounting hole DIN rail clamp screw 33 (7.5) 2n-C4, C6, C8 C4: One-touch fitting for 4 15 7.7 (2) C8: One-touch fitting for 8 C6: One-touch fitting for 6 U side n A 4 B 2 VQC Manual override 5 4 SQ P = 16 23.9 P = 16 (L4) (L3) L1 L2

Table of Contents

Model A B C D E Y Y B C D A E Flat Model ZPY10D--A10 10 12 15 25 41 6 Flat with ribs U C ZPY16D--A10 ZPY10 -A10 16 18 16 26 42 7 15 12 22 1.7 10 12 1.8 3 38 ZPY13 -A10 U C 13 Dimensions by Stroke ZPY16 -A10 U C 38.5 16 18 12.5 22.5 1.2 3.5 10 16 H Model Dimensions by Stroke F G F G 10, 13 16 ZPYD10--A10 52 23 86 53 87 H Model F G F G ZPYD20--A10 62 124 63 125 51 U C U C U C U C U C ZPYD30

5 Port Solenoid Valve Series VQZ1000/2000/3000

240 257 274 291 16 16 16 16 20 17.5 15.5 19.5 17 21 19 16.5 20.5 18.5 16 94 94 94 94 111 128 145 162 179 196 213 230 247 264 281 Note) The L dimension of 2 to 5 stations is the same.

0.4

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs

Table of Contents

1 D side VS4 16 stations 16 Max. 16 stations.

Series SV

Flat Ribbon Cable 1in = 25.4mm C3, N1 C4, N3 C6, N7 Stations Cassette base manifold: SS5V1-16 D (S, R, RS) P PG PH U D B 1 2 When P, E port outlets are indicated on the U side or D side, the P, E ports on the opposite side are plugged.

5 Port Solenoid Valve

size) N9: 5/16" (For A, B port inch size) 2n x C2, C3, C4, N1, N3 (4(A), 2(B) port) C2: 2 one-touch fitting C3: 3.2 one-touch fitting C4: 4 one-touch fitting N1: 1/8" one-touch fitting N3: 5/32" one-touch fitting Formula L1 = 8.5n + 31, L2 = 8.5n + 74 n: Station (Maximum 16 stations) Dimensions n L L1 L2 L3 L4 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 48 56.5 65 73.5 82 90.5 99 107.5 116 124.5

0.4

fitting DIN rail clamp screw R EXH EXH R B B B B B B B B X P X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

Modular F.R.L. Units

*16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

SV

to 16 solenoids possible.)

0.

, 1/8" 4, 5/32" 6, 1/4" 38.4 13.8 6 10 2 A 16 4.3 2 x 3.2 (For mounting) + 24.3 Manual override (Lead wire length) 29.9 Approx. 300 53.8 1.2 C6: 29.1 N7: 32.9 (3.2) With bracket Note) For bracket assembly part no., refer to page 16. 19.5 16.3 13.6 7 2 x 3.4 (For mounting) 41 VQZ115l-lGl1-M5-PR M5 x 0.8 (X: External pilot port) M5 x 0.8 [1(P), 3(R) port] M5 x 0.8 [2(A)

High Vacuum Angle Valve

C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

smcmaintenancepartslist

Bore size 16 20 25 32 40 50 63 16 20 25 32 40 50 53 Recommended length Part No.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=16 23.9 (L4) (L3) P=16 SYJ L1 L2 3 2n-Rc(PT)1/8 2 P=16 20.4 SX 1 SMC A 4 16.9 18 A 4 B 2 B 2 Stations VK 5 D side 15 7.7 VZ 10 10 Rc(PT)1/8 53 38 VF 84.5 (Singles) 109

Mechanically Jointed Rodless Cylinder Series MY1

(mm) PA PB PG Q PP QW QQ RR SS TT UU WW Model VV XX Z YH PC PD PE PF ZZ 60 50 7 206 12 42 16 16 6 14.5 15 12.5 MY1H25 16 28 220 37.5 14.5 32 13 5.5 Rc 1/16 80 60 8 264 17 51 16 23 4 16 16 16 MY1H32 19 32 280 47 15 42 13 6.5 Rc 1/16 100 80 9 322 18.5 59 24 27 10.5 20 22 19.5 MY1H40 23 36 340 59.5 20.5 37.5 23 8 Rc 1/8 Y 2 x d S R WX D Bottom ported (ZZ) (Applicable O-ring) DHole Size for Centralized