Table of Contents

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

Manifold Specifications

(Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. 0.2 SS5YJA3-41-03-M51 pc. SYJA3140 1 pc. SYJA3240 1 pc.

5 Port Solenoid Valve Series VQZ1000/2000/3000

For 115 VAC and 230 VAC, the allowable voltage is 15% to +5% of rated voltage.

0.4

(+) () 19 Station 10 (+) () 20 17 16 15 14 2 1 Plug terminal no.

Table of Contents

0 o VFS6000-15 VFS6000-15 NBR !2 VFS6000-8A !

Series SV

9 260.5 250 234.5 13 10 285.5 275 250.5 17.5 11 298 287.5 266.5 16 12 310.5 300 282.5 14 13 323 312.5 298.5 12.5 14 348 337.5 314.5 17 15 360.5 350 330.5 15 16 373 362.5 346.5 13.5 L1 L2 L3 L4 18 EX500 Decentralized Serial Wiring Series SV Valve Manifold Common Specifications Dimensions: Series SV1000 for EX500 Decentralized Serial Wiring 1in = 25.4mm C3, N1 C4, N3 C6, N7 U D B Tie-rod

5 Port Solenoid Valve

Dimensions Single unit Manifold 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting 2 x C4, C6 C4: 4 one-touch fitting C6: 6 one-touch fitting Mounting hole for M3 Mounting hole for M2.5 Manual override for residual pressure exhaust Manual override for residual pressure exhaust DIN rail clamping screw Stations12 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

0.4

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357

SV

9 260.5 250 234.5 13 10 285.5 275 250.5 17.5 11 298 287.5 266.5 16 12 310.5 300 282.5 14 13 323 312.5 298.5 12.5 14 348 337.5 314.5 17 15 360.5 350 330.5 15 16 373 362.5 346.5 13.5 L1 L2 L3 L4 1-2-30 27 Series SV Series EX500 Decentralized Serial Wiring Dimensions: Series SV1000 for EX500 Decentralized Serial Wiring C3, N1 C4, N3 C6, N7 Tie-rod base manifold: SS5V1-W10SAWDU D B (S, R, RS

Modular F.R.L. Units

*15 *15 *15 *15 *15 *15 *15 ZA*14 Digital pressure switch: With unit selection function *16 *16 *16 *16 *16 *16 *16 *16 *8 The only difference from the standard specifications is the adjusting spring for the regulator.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

0.

) For details on external pilot type, refer to page 15.

smcmaintenancepartslist

Qty. 1 MY3B16 MY3B25 MY3B40 MY3B63 9 Seal belt MY3B16-16AStroke MY3B25-16AStroke MY3B40-16AStroke MY3B63-16AStroke Polyamide 10 Dust seal band MY3B16-16BStroke MY3B25-16BStroke MY3B40-16BStroke MY3B63-16BStroke 1 Stainless steel 15 Tube gasket RMB-16 RMB-25 RMB-40 RMB-63 2 NBR 16 Piston seal RMY-16 RMY-25 RMY-40 RMY-63 2 NBR 18 Scraper MYA16-15-R6656 MYA25-15-R6657 MYA40-15-R6658 MYA63-15

Mechanically Jointed Rodless Cylinder Series MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1B MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 MY1M 115 38 15 120 48 14 140 60 19 180 72 21 MY1C 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 MY1H 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1HT 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1W 150 50 50 130 60 16 The above values

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Port size 41 (12) Grommet (G) (35) (5.5) 33 (7.5) 2n-C4, C6, C8 44.5 Mounting holes 15 7.7 C4: One-touch fitting for 4 C6: One-touch fitting for 6 (2) DIN rail clamp screw C8: One-touch fitting for 8 U side n A 4 B 2 Manual override SY 5 4 P=16 23.9 (L4) (L3) P=16 SYJ L1 L2 3 2n-Rc(PT)1/8 2 P=16 20.4 SX 1 SMC A 4 16.9 18 A 4 B 2 B 2 Stations VK 5 D side 15 7.7 VZ 10 10 Rc(PT)1/8 53 38 VF

Large Size Vacuum Module: Series ZR

For nozzle size 18, 20 + with function plate ZR1-SR3-93-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate ZR1-SR3-37-A(a set of six threads) ZR1-SR3-41-A(a set of six threads) 10 ZR1-SR3-42-A(a set of six threads) For nozzle size 18, 20 + with function plate ZR1-SR3-46-A(a set of six threads) When the ejector is compatible