Table of Contents

0.28 3.4 15 0.30 3.8 14 0.30 3.8 14 0.31 3.4 14 0.26 3.4 15 0.30 4.0 14 0.30 3.7 13 0.32 3.2 13 0.25 3.0 14 0.28 3.5 13 0.29 3.4 13 0.31 3.2 14 [13] 14 [13] 0.32 [0.30] 3.6 [3.2] 14 0.30 3.7 0.32 [0.30] 3.6 [3.2] 13 [5.0] 0.27 [0.42] 3.2 [1.3] 13 0.28 3.1 15 [5.3] 0.22 [0.42] 3.7 [1.5] 13 0.28 3.3 0.30 2 position 3 position Single 5 50 or less VFR420 VFR421 VFR424 Double 5 50 or less VFR430

Manifold Specifications

(Manifold base) VZ3123-5MOZ-C4. 3 pcs. (Valve) VZ3223-5MOZ-C4. 3 pcs. (Valve) DXT192-13-3A. 1 pc. (Blanking plate assembly) DXT192-52-1-4A. 3 pcs. (Connector assembly) DXT192-52-2-4A. 3 pcs. (Connector assembly) The asterisk denotes the symbol for assembly.

VQZ1000/2000/3000

Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23 mm2 < >: AC 61.5 M plug connector (M): VQZ2220 1(R)-M-C4/C6/M5 54 36 (Lead wire length) Cover diameter 1.5 Cross section 0.23 mm2 300 73.5 124.5 147 62 Indicator light 37.5 <42.5> < >: AC 2-7-13 Body Ported 14 14 Series VQZ1000/2000/3000 Dimensions: VQZ2000 3 position closed center/exhaust center/pressure center Grommet (G):

5 Port Solenoid Valve Series VQZ1000/2000/3000

Entry is the same as standard products. 966 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (for Cylinder port) Fitting size C3 C4 C6 C8 C10 Model VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ3000 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 Note) Purchasing order is available in units of 10 pieces

Series SV

L dimension Weight (g) 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 348 335.5 323 310.5 298 285.5 273 260.5 248 235.5 223 210.5 198 185.5 173 160.5 148 135.5 123 110.5 98 62.5 60.4 58.1 55.9 53.6 51.4 49.1 46.9 44.6 42.4 40.1 37.9 35.6 33.4 31.1 28.9 26.6 24.4 22.1 19.9 17.6 29 28 27 26 25 24 23 22 21 39 38 37 36 35 34 33 32 31 30 41 40 No.

5 Port Solenoid Valve

D side 41 Plug-in Manifold Stacking Base EX500 Gateway-type Serial Transmission System Series S0700 5.25 L4 L3 L2 4.4 L1 1.5 (n-1) x 8.5 12.8 8.5 (12) 60 Indicator light 13 Manual override Slim Compact Plug-in Manifold Bar Base Plug Lead Manifold Bar Base Plug Lead Single Unit (5.5) PWR 14 14 14 14 14 14 14 14 COM (35) S0710-5 S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72

Modular F.R.L. Units

57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/4, 3/8, 1/2 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70

SV

13 335.5 325 311.3 12 14 360.5 350 327.3 16.5 15 373 362.5 343.3 15 16 385.5 375 359.3 13 17 410.5 400 375.3 17.5 18 423 412.5 391.3 16 19 435.5 425 407.3 14 20 448 437.5 423.3 12.5 L1 L2 L3 L4 1-2-60 57 Circular Connector Series SV Dimensions: Series SV1000 for Circular Connector U D B C3, N1 C4, N3 C6, N7 Stations (S, R, RS) (-D) Tie-rod base manifold: SS5V1-W10CDWhen P, E port outlets

0.4

, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch fitting 2 L n Dimensions Formula L1 = 16n + 53, L2 = 16n + 73 n: Station (Maximum 24 stations) 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 L1 L2 (L3) (L4) 85 101 117 133 149 165 181 197 213 229 245 261 277 293 309 325 341 357

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

SYJA3000

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions. 0.2 SS5YJA3-41-03-M51 pc. SYJA3140 1 pc. SYJA3240 1 pc.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VQZ115-M VQ110-L 4-14-41

0.

plug KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 P.14 DIN rail AXT100-DR-l Piping specifications Applicable solenoid valve Applicable stations Series Base model Bore size Piping direction 1(P), 3(R) 2(A) C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) Rc 1/8 Top VQZ115 VQZ100 2 to 20 stations VV3QZ12-lll P.14 Silencer (for EXH port) C4 (for 4) C6 (for 6) M5 (M5 thread) Rc 1/8 Top VQZ2l2 VQZ200

smcmaintenancepartslist

Plate mount bolt tightening torque (kgfcm) Width across flat (mm) 5 Bore size (mm) Retaining ring size 12 RTW-13 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 q w 32 RTW-34 14 220 40 RTW-42 14 220 Not to hurt 50 RTW-52 17 440 63 RTW-65 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 Removal of End Lock (With End Lock) 1.

Mechanically Jointed Rodless Cylinder Series MY1

Individual -X Technical data 985 Series MY1M Construction: 16 to 63 MY1M16 to 63 33 22 21 29 47 20 9 4 5 7 8 6 2 2 19 12 13 18 MY1M16/20/50/63 3 1 48 MY1M16/20 45 17 14 15 42 35 27 32 11 24 44 28 23 17 14 15 36 MY1M63 MY1M16/20 37 41 24 25 43 MY1M16/20 38 26 10 36 34 MY1M50/63 16 31 39 40 986 Series MY1M Mechanically Jointed Rodless Cylinder Slide Bearing Guide Type MY1M16 to 63 Component

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4

3 Port Solenoid Valve Series SYJ300/500/700

C4 Type SS3YJ3-S42-M5 Type SS3YJ3-S42-C4 M5 x 0.8 C4 SYJ34 1/8 Body ported for external pilot Type SS3YJ3-20R 0.9 SYJ32R 1/8 M3 x 0.5 Type SS3YJ3-42R-M5 Type SS3YJ3-42R-C4 Type SS3YJ3-S42R-M5 Type SS3YJ3-S42R-C4 0.17 0.36 0.30 0.17 0.31 0.33 0.32 0.35 0.075 0.086 0.079 0.082 0.32 0.33 0.33 0.35 0.11 0.20 0.35 0.26 0.072 0.082 0.086 0.086 M5 x 0.8 C4 SYJ34R 1/8 Base mounted for external

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Description Material Aluminum die-casted Note Body q Spool/Sleeve Stainless steel Metal seal w Spool valve Aluminum/HNBR Rubber seal Piston Resin e r Pilot valve assembly For How to Order Pilot Valve Assembly, refer to page 4-14-19. 4-14-7 Body Ported 8 Series VQZ100/200/300 Dimensions: VQZ100 Single unit Grommet (G): VQZ115-G-C3/C4/C6/M5-PR C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4

SZ3000

8 210.5 200 187 12 2 160.5 150 134.5 13 3 173 162.5 145 14 4 185.5 175 155.5 15 5 198 187.5 166 16 6 210.5 200 176.5 17 7 210.5 200 187 12 8 223 212.5 197.5 13 L1 L2 L3 L4 L1 L2 L3 L4 L n 9 223 212.5 197.5 13 L n 9 235.5 225 208 14 10 235.5 225 208 14 11 248 237.5 218.5 15 12 260.5 250 229 16 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5