Table of Contents

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) (mm) Q1 = M Q2 Y L2 max Size C1 = C L2-(3 x P) Q1 X L1 max Size 10 M3 5.5 to 8 Y 1 10 M3 X 3 7.5 to 14 Y = 15 M3, M4 7.5 to 9 Y 1.5 15 M3, M4 X 4 10 to 18 L2 = X = C2 = C 20 M3, M4, M5 9 to 10 Y 1.5 L1-(3 x P) 20 X 4.5 12 to 20 M3, M4, M5 30 11 to 13 Y 2 M3, M4, M5, M6 M3, M4, M5, M6 L1 = 30 Q2 = M X 5 14 to 22 M3, M4, M5, M6, M8 14 to 15 Y 4.5 40 11-2-28 28 Simple Specials

Table of Contents

Description Material Gasket Hexagon socket head screw Pilot valve assembly Sub-plate assembly NBR Steel AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) AXT624-20-2 AXT624-26 (M3 x 31) Refer to How to Order Pilot Valve Assembly on page 3-5-10. Refer to How to Order Sub-plate Assembly on page 3-5-11. !3 !4 !

MY1

, 63 SMC EY EC FH W 58 58 70 88 104 128 152 TT 5.4 (max. 11) 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 6 6 7 12 12 15 15 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FW 66 80 91 FH 13 16 17.5 FC 14 14 13 17 17 26 31 FB 54 67 78 F 4 4 6 6 6 6 6 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8 5.8 6.5 8.5 10 14 14 EB 30 32 38 50 57

1

M3 x 0.5 M3 7.5 15 34 3.3 10.5 10 6.5 23 3.4 5.5 3.5 9.5 5 7 26 M3 x 0.5 M3 7.5 15 38 3.3 13 12 6.5 30 3.4 7 3.5 11.5 5 7 33 -X M4 x 0.7 M4 8.5 17 53 4.4 14.5 14 8 35.5 4.5 7.5 4.5 18 4.5 6.5 38.5 M4 x 0.7 M3 14.5 29 62 6.5 3 26 14 34 4 4.5 16.5 6 45 7 20M5 x 0.8 M4 14.5 29 70 8 3 31 17 39 4 5.5 20.5 7 51 8 M6 x 1 M5 17 34 76 9.5 3 41 22 50 4.5 6.5 21 7.5 62.5 10

CRB2/CRBU2/CRB1

Q1 M3 5.5 to 8 Y-1 10 15 X-3 7.5 to 14 M3 Y = M3, M4 7.5 to 9 Y-1.5 L2 = L1(3 x P) C2 = C 15 20 X-4 M3, M4 10 to 18 9 to 10 Y-1.5 M3, M4, M5 X = 20 30 12 to 20 X-4.5 M3, M4, M5 11 to 13 Y-2 M3, M4, M5, M6 L1 = Q2 = M 30 40 14 to 22 X-5 14 to 15 Y-4.5 M3, M4, M5, M6 M3, M4, M5, M6, M8 24 Simple Specials Series CRB2 Axial: Top (Long-shaft side) Axial: Bottom (Short-shaft side) Symbol: A10 Symbol

Table of Contents

Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size B D E F H K L M N A C Model Note) Q V R Q R Q R S Q R S U 22 23 45 44 43 58 40.5 46.5 99 43 66 83 13.5 28 31 56.5 12.5 28 14 12.8 M4 4.5 64 1/8 VCL21 22 23 46 44 44 58 41.5 46.5 99 44 66 86 18 36 31 58.5 12.5 28 18 12.8 M4 6 67.5 1/4 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 99 22 40 36.5 11 15 32 20 19

F

11.2 8 38 KQV08-U03 14 15.2 20.6 27.5 18.5 34 28 18.5 14.3 10 14 KQV10-U02 14 18.5 20.6 31 18.5 34 28 21 27 10 38 KQV10-U03 14 18.5 20.6 31 18.5 34 28 21 27 12 38 KQV12-U03 17 20.9 25.2 34 20 36.5 30.5 22 39 12 12 KQV12-U04 17 20.9 25.2 34 22.5 39.5 31.5 22 39 Courtesy of Steven Engineering, Inc. !

Made to Order

x 0.5 9.5 3.4 6.5 3.3 5 7 5.5 10.5 26 23 34 15 7.5 M3 3.5 10 M3 x 0.5 11.5 3.4 6.5 3.3 5 7 7 13 33 30 38 15 7.5 M3 3.5 12 M4 x 0.7 18 4.5 8 4.4 4.5 6.5 7.5 14.5 38.5 35.5 53 17 8.5 M4 4.5 14 M4 x 0.7 16.5 6 4 45 14 62 29 14.5 M3 4.5 26 6.5 7 34 3 M5 x 0.8 20.5 7 4 51 17 70 29 14.5 M4 5.5 31 8 8 39 3 M6 x 1 21 7.5 4.5 62.5 22 76 34 17 M5 6.5 41 9.5 10 50 3 M6 x 1 25.5 7.5 7.5 74.5 28 90 39

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Model Tightening torque Thread size 10-SY3000 M2 0.8Nm 0.16Nm 10-SY5000 10-SY7000 10-SY9000 M3 M4 M3 1.4Nm 0.8Nm 491

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6

REA/REB

x 0.5 13 7 M3 38 15 7.5 12 33 30 3.5 Order Made Auto Switches 15 6.5 4.5 4.4 8 18 4.5 M4 x 0.7 7.5 14.5 17 8.5 M4 14 53 38.5 35.5 4.5 20 6 6.5 16.5 4 M4 x 0.7 14.5 M3 3 29 26 45 14 62 7 4.5 34 25 7 8 20.5 M5 x 0.8 4 M4 14.5 3 17 70 29 5.5 39 31 51 8 32 7.5 9.5 21 M6 x 1 4.5 M5 76 34 17 50 41 3 62.5 22 10 6.5 40 7.5 9.5 25.5 M6 x 1 7.5 39 19.5 M5 45 3 90 60 74.5 28 10

ISO Cylinder

29.5 45 9.5 [3.5] D-F7l/J79 D-F7lW D-J79W D-F7lV D-F7lWV D-F79F/J79C D-F7BA D-F7BAV D-A72 D-A7lH/A80H D-A73C/A80C 8 16 16 16 4 10 14 14 14 4 12 15.5 15.5 15.5 5 20 6.5 (31.5) 56.5 81.5 5.5 D-A9l Rail mounting 25 6.5 (31.5) 56.5 81.5 7 Band mounting 16 15.5 31 46.5 11 [5] 8 14 14 14 2 10 12 12 12 2 12 13.5 13.5 13.5 3 20 8 (33) 58 83 7 D-H7l D-H7C D-H7lW D-H7BA D-H7NF 16 13.5 29 44.5 9 [3

ZP

Inlet 5 3 2 14 2 3 14 3 2 7 M3 x 0.5 7 M3 x 0.5 3 3 3 M3 x 0.5 14 Vertical 3 3 3 7 0.3 With Buffer: Vacuum Inlet 0.3 0.3 0.8 0.8 0.8 2 3.5 1.5 Lateral 2.5 4 2 With Adapter: Vacuum Inlet 5 5 5 5 5 Lateral Vacuum Inlet Dimensions With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List ZP3-Y015U;-B3-U4 ZP3-Y02U;-B3-U4 ZP3-Y035U;-B3-U4 ZP3-Y015U;-B3-U2 ZP3-Y02U;-B3-U2 ZP3-Y035U;-B3

CQS

X 25 l M3 X 30 l M3 X 35 l M3 X 40 l M3 X 45 l M3 X 50 l M3 50 55 60 65 70 25 30 35 40 45 50 6.5 6.5 Secure the cylinder by using Secure the cylinder by using the OA screws that are the OA screws that are provided with the cylinder provided with the cylinder tube. tube.

CQS

Example) Bolt M3 x 25l 4 pcs. (Standard stroke) Bolt M3 x 75l 4 pcs.

Fluoropolymer Piping Equipment

LQ1R35-M 8 5.5 LQ1R36-M 6 3.6 LQ1R39-M 10 1/8" 17 34.5 20.5 4.4 4.4 20 17 23 9 LQ1R4B-M3/8" 5.8 LQ1R4C-M1/2" 1/2" 24.5 32 9 LQ1R4D-M3/8" 5.8 LQ1R4G-M1/2" 1/4" 27.5 7 29 14 28 26 54 33.5 39 6 6 LQ1R5A-M3/4" 1/2" 30.5 29 6 24 9 18 21 43 28 10 LQ1R310-M 8 4.4 LQ1R41-M 12 3/8" 23 9.4 LQ1R42-M 10 7.4 LQ1R43-M 12 1/2" 24.5 32 9.4 LQ1R44-M 10 7.4 LQ1R49-M 12 1/4" 27.5 7 29 14 28 26 54 33.5 39

Compact 5-Port Solenoid Valve

Connector entry direction SY30M-14-9A1 Upward SY30M-14-9A2 Lateral Series Part no.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

9 4 15.5 0.5 29 22 8 14 1 5 9 24 3.5 M3 x 0.5 17 3 25 31 41 8.5 9.5 10.5 10.5 -0.004 -0.012 0 -0.043 12 5 15.5 0.5 M3 x 0.5 34 25 9 18 1.5 6 10 29 3.5 M3 x 0.5 21 3 29 36 48 11 10 11.5 11 -0.004 -0.012 0 -0.043 14 6 17 0.5 M4 x 0.7 42 34.5 10 20 1.5 7 10 36 4.5 M4 x 0.7 26 4 36 44 59 M5 x 0.8 14 13 D12 13 -0.005 -0.014 0 -0.043 16 8 1 4.5 17.5 M5 x 0.8 50 47.5 13 22 2 8 12 43 5.5 M5