0.4

(L4) (L3) (5.25) L2 L1 Made by CONINVERS GmbH HC-26P1NRAWF00 34.5 6.5 59 Indicator light Manual override 4 x M5 mounting hole 73.5 <77.5> 1 0.9 29.5 (35) (5.5) 120 <126.9> 22 10.6 80 4 46.2 (12) 13 73.7 U side D side n 8 7 Stations 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting C10 [1(P) SUP port] C10: 10 One-touch fitting R EXH R EXH DIN rail clamp screw B B B B B B B B P X P

A

17 6 16 12 MAX. 20 ML2B40 4.5 15 31 9.5 94 81.5 67.3 43 17 6 16 12 MAX. 25 Part No.

5

Applicable bore size (mm) Dd9 L d L2 m t Included retaining ring IY-G02 20 8 0.040 0.076 21 7.6 16.2 1.5 0.9 Type C8 for axis IY-G03 25, 32 10 0.040 0.076 25.6 9.6 20.2 1.55 1.15 Type C10 for axis IY-G04 40 10 0.040 0.076 41.6 9.6 36.2 1.55 1.15 Type C10 for axis IY-G05 50, 63 14 0.050 0.093 50.6 13.4 44.2 2.05 1.15 Type C14 for axis IY-G08 80 18 0.050 0.093 64 17 56.2 2.55 1.35 Type C18

5 Port Solenoid Valve

EtherCAT is registered trademark and patented technology, licensed by Beckhoff Automation GmbH, Germany. 43 These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for control unit.

Vacuum Regulator

SET side tubing O.D. 6, 8, 10 1/4" , 5/16" , 3/8" 6, 8 1/4" , 5/16" 135 g (IRV10-C08) 125 g (IRV10A-C08) 250 g (IRV20-C10) 250 g (IRV20A-C10) Weight (Without accessories) Standard connections Single sided connections Note 1) Use caution it varies depending on the pressure in vacuum pump side.

Manifold Type: 43 (Individual Wiring), Valve Stations: 4 Stations, P, R Port Location: U (U Side 2~10 Stations), SUP/EXH Block Specification: S (Internal Pilot, Built-in Silencer), Port Size: 03 (3/8), Thread: N (NPT)

Manifold Type: Individual Wiring, Valve Stations: 4 Stations, P, R Port Location: U Side 2~10 Stations, SUP/EXH Block Specification: Internal Pilot, Built-in Silencer, Port Size: 3/8, Thread: NPT, Manifold Mount Style: -

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(The standard valve has an individual exhaust for the pilot valve.) 1.12-58 Series VQZ Base Mounted Replacement Parts One-touch Fitting Assembly (For cylinder port) C3 C4 C6 C8 C10 Fitting Size Series VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VVQ1000-51A-C8 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 VQZ3000 SY VVQ2000-51A-C6 Note) Order is accepted in

IP8001 Series

Hold down again for 1sec. or longer after interval No.IP8S-OM09 61 Mode button 1s Set button 1s or Mode button 1s Set button 1s or Mode button 1s Mode button 1s Set button Set button 1s 1s Fig. 43-1 Mode button 1s Set button 1s or Lower limiter Upper limiter Fig. 43-2 Mode button 1s Set button 1s Alarm setting Fig. 43-3 No.IP8S-OM09 62 Possible to select analog output proportional

0.

L-type plug connector (L): VQZ3l2l-lLl1-C6, C8, C10 85.8 [88] Approx. 300 (Lead wire length) 32 [39] 93.7 Max. 10 53.8 Applicable cable O.D. 3.5 to 7 Pg7 Unless otherwise indicated, dimensions are the same as Grommet (G). [ ]: AC M-type plug connector (M): VQZ3l2l-lMl1-C6, C8, C10 61.3 53.8 (Lead wire length) 42.5 33.4 Approx. 300 43.3 [50.3] 76 [78.2] 71 94.6 Unless otherwise indicated,

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-43 (5(R1), 3(R2) port) Before using, refer to page 3-3-8.

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

45

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

VQ7-6/7-8

Rc1/4 Rc3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 6 Series VQ7-6 DIN Connector Type VV71-100 80 2n-Rc1/4, 3/8 100 80 9 37 9 23 14 U side 15 R4.5 Manual override Indicator light R4.5 53.5 P=43 9 9 53.5 P=43 20 9 23 38 B B B B B B B B B SMC SMC SMC A PA PA PA PA A A A A B A L1 L2 L2 L1 B A B SMC A B A 4n-Rc1/4, 3/8 (ports A, B) PA L side R side

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

40 20 35 142 3 M12 x 1.75 depth 14 245 (311) 8 0 0.036 38.5 CVRA1BS 100 12.5 85 28 85 25 60 5 18 112 43 45 25 40 172 4 ( ) are the dimensions for rotation of 180 and 190.

Air Cylinder

Applicable bore size (mm) Dd9 L1 d L2 m t Included retaining ring IY-G02 20 8 0.040 0.076 21 7.6 16.2 1.5 0.9 Type C8 for axis IY-G03 25, 32 10 0.040 0.076 25.6 9.6 20.2 1.55 1.15 Type C10 for axis IY-G04 40 10 0.040 0.076 41.6 9.6 36.2 1.55 1.15 Type C10 for axis IY-G05 50, 63 14 0.050 0.093 50.6 13.4 44.2 2.05 1.15 Type C14 for axis IY-G08 80 18 0.050 0.093 64 17 56.2 2.55 1.35 Type C18

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

40 20 35 142 3 M12 x 1.75 depth 14 245 (311) 8 0 0.036 38.5 CVRA1BS 100 12.5 85 28 25 85 5 18 60 112 43 45 40 25 172 4 ( ) are the dimensions for rotation of 180 and 190.

MB

Z Bore size (mm) Z B DA DB DL DU DC DX DE DR DO DT DS DH DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 32 40 50 63 80 100 125 32 40 50 63 80 100 125 33 33 45 45 65 65 75 46 52 65 75 95 114 136 32 32 43 43 64 64 78 22 22 30 30 45 45 60 10 10 11.5 11.5 14 14 15 44 44 60 60 86 86 110 14 14 20 20 30 30 32 62 62 81 81 111 111 136 6.6 6.6 9 9 11 11 13.5 15 15 18 18 22 22

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) (5.25) L2 L1 Made by CONINVERS GmbH HC-26P1NRAWF00 34.5 6.5 59 Indicator light Manual override 4 x M5 mounting hole 73.5 <77.5> 1 0.9 29.5 (35) (5.5) 120 <126.9> 22 10.6 80 4 46.2 (12) 13 73.7 U side D side n 8 7 Stations 6 5 4 3 2 1 C10 [3(R) EXH port] C10: 10 One-touch fitting C10 [1(P) SUP port] C10: 10 One-touch fitting R EXH R EXH DIN rail clamp screw B B B B B B B B P X P