SI Unit: Q (DeviceNet Omron CompoBus/D), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

Vacuum Ejector Series ZM

Maximum Ejector Stations (Max. operable nos. simultaneously) Ejector model ZMA053 ZMA054 ZMA073 ZMA074 ZMA103 ZMA104 ZMA133 ZMA134 ZMA153 ZMA154 Manifold model R L 10 8 5 4 3 ZZMA Stations 06 10 10 8 6 5 ZZMA Stations 06B R L 10 8 5 4 3 ZZMA Stations 04 10 10 8 6 5 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

SI Unit: Q (DeviceNet Omron CompoBus/D), Stations: 8 Stations, PE Port Location: U (U Side 2~10 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

SI Unit: Q (DeviceNet Omron CompoBus/D), Stations: 8 Stations, PE Port Location: B (Both Sides 2~16 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting)

SI Unit: Q (DeviceNet Omron CompoBus/D), Stations: 3 Stations, PE Port Location: B (Both Sides 2~16 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting)

SI Unit: DeviceNet Omron CompoBus/D, Stations: 8 Stations, PE Port Location: U Side 2~10 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: -

SI Unit: DeviceNet Omron CompoBus/D, Stations: 8 Stations, PE Port Location: Both Sides 2~16 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: 1/4" One-touch Fitting, Mounting Method: -

SI Unit: DeviceNet Omron CompoBus/D, Stations: 3 Stations, PE Port Location: Both Sides 2~16 Stations, Pilot: Internal Pilot, A, B Port: 1/4" One-touch Fitting, Mounting Method: -

Table of Contents

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

One-touch Fittings

D P [mm] M L2 A L1 2 x N Q Q D 2 x O d Applicable fitting size d Different Diameter Union Y: KQ2U Applicable tubing O.D.

Air Fittings & Tubing

D.

Proposals for Energy Saving

Air Preparation Equipment 35 D H2 H1 8.5 A L1 High efficiency nozzle/KNH (mm) Model Nozzle size D Connection size L1 A Width across flats H1 Connection thread 1 1.5 2 R 1/4 R 1/4 R 1/4 14 14 14 52 52 52 46 46 46 KNH-R02-100 KNH-R02-150 KNH-R02-200 D H1 A L1 Low noise nozzle with self-align fitting/KNS (mm) Model Nozzle size D Connection size L1 L2 Width across flats H1 H2 L2 D 0.75

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

VS7-6

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

VM

D.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of solenoids Port size (A) 4 (B) 2 S D Single Piping specifications Symbol Size 2 Size 3 Size 1 FG Double Nil A02 A03 A04 A06 A10 B02 B03 B04 B06 Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/4 Side-ported 3/8 (A) 4 (B) 2 Rated coil voltage

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 12 (1 Station/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 43 (4 Stations/M8: 4 Inputs 3 Pins), Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: Internal Pilot, A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)