Max. Suction Flow Rate: Max. Suction Flow Rate: 300 L/min (ANR, Supply Pressure: 0.50 MPa, Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: Push-turn Locking Lever

Max. Suction Flow Rate: 3 (Max. Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: P (Port Exhaust, Rc1, G1, NPT1), Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor

Max. Suction Flow Rate: 3 (Max. Suction Flow Rate: 300 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: 06 [Vacuum: Rc3/4; Supply: 8 (Metric)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual Override: E (Push-turn

Max. Suction Flow Rate: 6 (Max. Suction Flow Rate: 600 L/min (ANR), Supply Pressure: H (0.50 MPa), Vacuum (2/V) Port Size/Supply (1/P) Port Tubing O.D: N04 [Vacuum: 2 x NPT1/2 (Branch Spec.); Supply: 5/16" (Inch)], Exhaust Method: Silencer Exhaust, Supply Valve/Release Valve Combination: w/o Valve, Rated Voltage: None, Electrical Entry: None, Light/Surge Voltage Supprressor: None, Manual

5 Port Solenoid Valve Series SY3000/5000/7000/9000

P EA X PE EB P EA EA P EB PE X EA P EB PE X 161.2 139.4 159.4 124.6 174.2 152.4 137.6 Note) Refer to page 340 for dimensions of connector types.

Table of Contents

0 e (B) (A) 4 2 (EA)(P)(EB) 5 1 3 Exhaust center: VFR640 (B) (A) 4 2 (EA)(P) (EB) 5 1 3 o r Pressure center: VFR650 (B) (A) 4 2 PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE This figure shows a closed center type. (EA)(P)(EB) 5 1 3 Component Parts Material Aluminum die-casted Note No. No.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(A) 4 2(B) (A)4 (EA)5 1 (P) 3(EB) 3(EB) 1(P) 5(EA) 3 position closed center / exhaust center / pressure center Symbol 3 position closed center (B) 2 (A) 4 2(B) (A)4 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 (EA)5 1 (P) 3(EB) 3(EB) 1(P) 5(EA) (This figure shows a closed center type.)

VFR

0 e (B) (A) 4 2 (EA)(P)(EB) 5 1 3 Exhaust center: VFR640 (B) (A) 4 2 (EA)(P) (EB) 5 1 3 o r Pressure center: VFR650 (B) (A) 4 2 PE 5(EA) 4(A) 1(P) 2(B) 3(EB) PE This figure shows a closed center type. (EA)(P)(EB) 5 1 3 Component Parts Material Aluminum die-casted Note No. No.

1

(B) 3 (EB) 4 (A) 5 (EA) (EA)5 1 (P) 3(EB) Component Parts No.

SY

Plug Plug (A) 4 (B) 2 (A) 4 (B) 2 Number of solenoids Single 1 (P) 5 (EA) 3 (EB) 5 (EA) 3 (EB) 1 (P) Locked position Plug Plug (A) 4 (B) 2 (A) 4 (B) 2 Double PUSH LOCK 5 (EA) 3 (EB) 1 (P) 5 (EA) 3 (EB) 1 (P) Caution Caution How to Use Plug Connectors When operating the locking type D with a screw driver, turn it gently using a watchmakers screw driver. 1.

Intrinsically Safe Valve

(A)4 2(B) (A)4 2(B) Locked position Number of solenoids Single 1 (P) (EA)5 3(EB) 1 (P) (EA)5 3(EB) LOCK 2(B) (A)4 2(B) (A)4 Double PUSH (EA)5 1 (P) 3(EB) (EA)5 1 (P) 3(EB) Caution How to Use Plug Connector When operating the locking type D with a screwdriver, turn it gently using a watchmakers screwdriver. [Torque: Less than 0.074 lbfft (0.1 Nm)] Caution 1.

SX

P SZ EB EA P 20 20 21 21 SY 62.5 60 (5.5) 141.1 93.8 30 SYJ 128.1 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (P, EA, EB port) 6-Rc 1/4 Manual override (Press and turn for the locking type.)

5 Port Air Operated Valve

)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1 (P) 3(EB) VPA VPA3 3 position closed center/exhaust center/pressure

Table of Contents

Eb Q1 Zb1 JJ H H Eb Eb P A2 A1 L (Counterbore depth) Detail drawing of Zb2 (adjustable range) 2 x 2-LD L (Counterbore depth) Detail drawing of Zb1 (adjustable range) 2 x 2-LD MY3 Floating Bracket Mounting Dimensions (mm) Adjusting range Applicable cylinder Model Common JJ L P LD H G Ea Eb MYAJ16 MYAJ25 MYAJ40 MYAJ63 MY316 MY325 MY340 MY363 M4 x 0.7 M6 x1 M8 x1.25 M10 x1.5 1 1 1 1 1 1 1 1

Series SV

Sub-plate 3 position pressure center 1 (P) 4 (A) 2 (B) (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 5 (EA) 3 (EB) Parts list Description No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

/N.C. 4(A) 2(B) 4(A) 2(B) A 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.O./N.O. 4 position dual 3 port valve: N.O./N.O. 2(B) 4(A) 2(B) 4(A) B 1(P) 5(EA) 3(EB) 1(P) 5(EA) 3(EB) 4 position dual 3 port valve: N.C./N.O. 4 position dual 3 port valve: N.C.

Micro Mechanical Valve Series VM1000

3 EA EA y A A P P r q B EB B !7 EB !4 !1 !2 t Component Parts Aluminum alloy NBR Note No. 10 Description Material No.

VFS

marks 3 to 8 or EA, EB ports should be taken as individual port using a block plate.

5 Port Solenoid Valve SY Series

Series SY5000 Series SY9000 Weight (g) Weight (g) Port size Flow characteristics Port size Flow characteristics Valve model Type of actuation 1, 5, 3 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Type of actuation 1, 5, 3 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ L, M plug W M8 L, M plug W M8 (P, EA, EB) 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal DIN terminal

5 Port Air Operated Valve Series SYA3000/5000/7000 1

, , 1 8 1 4 3 8 , 3 8 1 2 EA, EB 3 8 1 2 3 8 1 2 1 4 3 8 VSA420 VSA430 Common EXH Common EXH standard standard Piping specifications/Side ported is only available.