Rubber seal 5 Port Solenoid Valve Series SYJ5000

Type 20 (5 Port/Body ported) How to Order Applicable solenoid valve M5 C4 C6 M5 C4 C6 SS5YJ520 05 SYJ520-A, B port M5 x 0.8 SYJ523-Applicable blanking plate assembly SYJ5000-21-1A Applicable individual EXH spacer assembly SYJ5000-17-1A P, R port thread type Number of stations -+ -+ P port 1/8 02 2 stations R R P Nil 00F 00N 00T Rc G NPT NPTF : : 20 20 stations R port 1/8 Type 40 (5 Port/

Piping: 41R (Base Mounted), Stations: 12 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 3 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 4 Stations, A, B Port: C6 (ø6 One-touch Fitting)

Piping: 41R (Base Mounted), Stations: 6 Stations, A, B Port: C6 (ø6 One-touch Fitting)

SZ3000

Stations...3 2 1 Serial unit (D side mounting) SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) The symbol indicates built-in.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

manifold 10-SS5Z3-60PD2-05U-P 10-SS5Z3-60PD2-05U-P 1 set (Manifold part no.) 10-SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Type 42 (5 Port/Base mounted) How to Order SS5YJ742 05 C6 Applicable interface regulator ARBYJ7000-00-P Thread type A, B port size Stations C6 Nil F N T 02 Rc G NPT NPTF One-touch fitting for 6 2 stations + + P port 1/4 C8 : One-touch fitting for 8 : B R P R N7 20 One-touch fitting for 1/4" 20 stations A, B port A N9 One-touch fitting for 5/16" R port 1/4 B Note) For more than stations,

Proposals for Energy Saving

M5 x 0.8 through hole 0.5MPa 0.35MPa (except 05) 0.45MPa (13,15 only) H M S 112 85.4 74 70 62 10 P ZM1 K5LZ-E15L-X235 26 30 Body type Conforms to the standard product.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

How to Order Manifold Assemblies (Example) Example (OMRON Corporation compatible serial unit) Double solenoid (24VDC) SZ3260-5LOZ-C6 (3 sets) Single solenoid (24VDC) SZ3160-5LOZ-C6 (2 sets) Supply/Exhaust block assembly SS5Z3-60SRID-05U-C6 . 1 set (manifold part number) SZ3160-5LOZ-C6. 2 sets (single solenoid part number) SZ3260-5LOZ-C6. 3 sets (double solenoid part number) (U side mounting

Intrinsically Safe Valve

Thread type Nil F N T Rc A, B port size Thread piping G Symbol 01 Port size Applicable series NPT 1/8 53-SY5000 NPTF EB P EA One-touch fitting (Metric size) Symbol C6 C8 Port size Applicable series A B 6 One-touch fitting 53-SY5000 A, B port size 53-SS5Y5-41-05-01 Manifold base (5 stations) 01: 1/8 8 One-touch fitting One-touch fitting (Inch size) Symbol N7 N9 Port size Applicable series

Piping: Base Mounted, Stations: 12 Stations, A, B Port: ø6 One-touch Fitting

Piping: Base Mounted, Stations: 3 Stations, A, B Port: ø6 One-touch Fitting

Piping: Base Mounted, Stations: 4 Stations, A, B Port: ø6 One-touch Fitting

Piping: Base Mounted, Stations: 6 Stations, A, B Port: ø6 One-touch Fitting

V

Wiring 04 04 Specs 05 05 Applicable up to 8 Solenoids .. .. Use Manifold Specs Form to 08 08 specify wiring 26 Pole (P) Connector Symbol Station Note 02 2 Double .. .. Wiring 10 10 Specs 11 11 Applicable up to 20 Solenoids .. .. Use Manifold Specs Form to 20 20 specify wiring Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 !

SZ3000

How to Order Valve Manifold Assembly Ordering example (OMRON Corporation compatible serial unit) Double solenoid (24 VDC) SZ3260-5LOZ-C6 (3 sets) SS5Z3-60SR1D-05U 1 set (manifold part number) SZ3160-5LOZ-C6 2 sets (Single solenoid part no.) SZ3260-5LOZ-C6 3 sets (Double solenoid part no.)

Table of Contents

(ZX1A) ZX1AK6 r 05 ZX1 1 D W Table (2) How to Order Solenoid Valves Assembly no. Z L 5 ZX1 VJ114 Ejector unit nozzle dia. 05 07 0.5 mm 0.7 mm 10 1.0 mm 1 2 With silencer Port exhaust 3 Common exhaust Z L 4 2 5 ZX1 VJ3 Ejector type (Exhaust type) Manual override Type of actuation Nil B Non-locking push type Locking slotted type 1 2 N.C. (Normally closed) N.O.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Back cover 8 2-Color Display Digital Flow Switch RoHS PF2M7 Series How to Order PF2M7 10 C6 A M Integrated display q r t y u i w e q Rated flow range e Port size Piping variations 01 0.01 to 1 L/min 02 0.02 to 2 L/min 05 0.05 to 5 L/min 10 0.1 to 10 L/min 25 0.2 to 25 L/min 50 0.5 to 50 L/min 11 1 to 100 L/min 21 2 to 200 L/min With One-touch fitting Female thread C4*2, C6, C8, N7 01, 02,