1

C4, C6 : 14.8 C8 : 17.2 1/4 [1(P), 5(EA), 3(EB) port] L3 Note) These figures show the SS5Y5-51S5-05D-C8.

CATALOG

Stations) N A M E P L AT E [-N7] VVQ1000-87A-B-50 SUP-EXH B L O C K P U S H A S S E M B LY C3 C4 C6 KQP B L A N K I N G P L U G AN103-X233 S I L E N C E R 23 04 06 01 03 07 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

V

Stations) N A M E P L AT E [-N7] VVQ1000-87A-B-50 SUP-EXH B L O C K P U S H A S S E M B LY C3 C4 C6 KQP B L A N K I N G P L U G AN103-X233 S I L E N C E R 23 04 06 01 03 07 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

5 Port Solenoid Valve Series SY3000/5000/7000/9000

C6 Symbol Port size Applicable series C4 C6 M C4 C6 C8 M 02 2 stations Single wiring spec.

Table of Contents

08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 AMJ 5/16" ZFC201-09 Misc.

SX

One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 SX3000 (1) One-touch fitting for 6 C6 Double wiring specifications SX3000 (1) Double wiring specifications Mixed M Mixed M 08 8 stations 04 4 stations One-touch fitting for 4 C4 One-touch fitting for 4 C4 02 2 stations 02 2 stations One-touch fitting for 6 C6 One-touch fitting for 8 C8 Mixed M (2) One-touch

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

How to Order 10 SS5YJ3 32P 07 C4 Applicable connector assembly Refer to page 294. A, B port M5 x 0.8, C4 Clean series P, R port thread type Stations Applicable blanking plate assembly Refer to page 302.

SYJ3000/5000/7000

Type 32P How to Order SS5YJ332P 07 C4 SYJ A, B port M5 x 0.8, C4 Applicable connector assembly Refer to page 1-5-15.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

, N3 C6, N7 Foot bracket 10-SY3120-F1 G H C4, N3 C6, N7 Directional Control Valves Air Grippers Modular F.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Stations 4 stations 04 SY Applicable blank plate assembly SYJ3000-21-3A (With dust cap) : : 12 stations 12 SYJ P port Rc(PT)1/8 Rc(PT)1/8 R port SX Applicable valve Refer to the p.1.2-19. 32P Type How to Order SS5YJ3--32P-07 -C4 VK A, B port M5 X 0.8, C4 Applicable connector assembly Refer to the p.1.2-19.

ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

Compact Manifold Regulator

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Condition: Inlet pressure 0.7 MPa Condition: Inlet pressure 0.5 MPa 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.0 0.00 0 50 100 150 0 20 40 60 80 100 Flow rate L/min (ANR) Flow rate L/min (ANR) ARM10F-08 ARM10-08 (One-touch fittings

ARM10/11

ARM10-07 (One-touch fittings: IN 6, OUT 4) ARM10F-07-1 ARM10-07-1 (One-touch fittings: IN 6, OUT 4) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa 0.30 0.35 0.7 0.6 Outlet pressure MPa Outlet pressure

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Type 32P How to Order SS5YJ332P 07 C4 A, B port M5 x 0.8, C4 Applicable connector assembly Refer to page 12.

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Type 32P How to Order SS5YJ332P 07 C4 SYJ A, B port M5 x 0.8, C4 Applicable connector assembly Refer to page 1-5-15.

Compact manifold regulator ARM5 Series

(located on both the right and left side) Before disassembly, be sure to check that no inlet or outlet pressure is applied and exhaust the internal pressure thoroughly before starting the job. 707 Regulator Single Unit Type ARM5S Series How to Order A 07 S ARM5 Single unit type 1.

Proposals for Energy Saving

Box Type (with Built-in Silencer) B S 07 ZH 06 06 Body Ported Type (without Silencer) D S 07 ZH 01 01 01 EXH port size Note) Nozzle diameter Symbol Size Type One-touch One-touch One-touch One-touch One-touch Threaded Threaded Threaded Threaded 05 07 0.5mm 0.7mm 6 8 10 12 16 06 08 10 12 16 01 02 03 04 10 1.0mm 13 1.3mm 15 1.5mm 18 1.8mm Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 20 2.0mm Maximum

Valve Mounting: Pilot Valve Same Side of A Port, Stations: 03, A Port Size: One-touch Fitting for ø4, P, R Port Thread: -

Valve Mounting: S (Pilot Valve Same Side of A Port), Stations: 03, A Port Size: C4 (One-touch Fitting for ø4)