EXxx-OMU0020CN

LED EX245-DX1 LED16 015 015 OFF OFF ON ON ON . 7-2 LED 54 No.EX-OMU0020CN 7.6. EX245-DX1 8 x M12, 5-way sockets (0 to 7) Short circuit protection 24 V DI (n+1) Sensor interface 0V DI (n) FE / Sheild Input circuit / Bus interface 24 V (logic / sensors) 0 V (logic / sensors) 24 V (valves / loads) 0 V (valves / loads) FE BUS . 7-3 EX245-DX1 55 No.EX-OMU0020CN 8.

ML2B

%6 %7 %8 %9 ^1 ^2 ^3 ^4 ^5 ^6 ^8 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring O-ring O-ring O-ring Connector guide O-ring O-ring Special resin MY40-16A-stroke MY32-16A-stroke MY25-16A-stroke Stainless steel NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR MY40-16B-stroke MY32-16B-stroke MY25-16B-stroke MYB40-15AA5902 GMY40 RCS-12 NLP-40A C-4 C-9 SO-015

CJP

Bore (mm) Description Mounting nut Rod end nut SNPS-006 NTP-006 SNPS-010 NTP-010 SNPS-015 NTP-015 6 10 15 1.2-9 Series CJP Recommended Mounting Hole Dimensions for Plug Mounting Style Machining dimensions for Mounting When plug mounted Bore (mm) Stroke A B G F C E D 5 16 12.5 10 6 10 23 3 19.5 8.5 M10 X 1.0 17 3.5 15 30 26.5 24 5 17 13.5 10.5 10 10 23.5 4 12 20 M15 X 1.5 3.5 17 15 30.5 27

VQ4000

For details, refer to page 2-5-11. 2-5-10 11 Base Mounted Series VQ4000 Plug-in Unit Electrical wiring specifications D-sub connector assembly 015 030 050 Standard wiring Wiring with control unit AXT100-DS25D-sub connector Wire colors Terminal no. Terminal no.

VQ5000

Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 11 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U D U D Note) Indicate on a manifold specification h i f i d i 10 Base Mounted Type Series VQ5000 Electrical wiring specifications Standard wiring D sub connector assembly (AXT100-DS25) wire colors 015 030 050 D sub connector Terminal No. Polarity Lead wire color Dot marking 1 2 3 .

PSxx-OMH0002CN

4No.PS-OMH0002CN-D () * (ISE70 ) SUS630SUS430SUS304 (ISE75(H)) ON/OFF (ISE70 ) (10 10 ) UL1310 UL1585 UL -5No.PS-OMH0002CN-D * (50 N ) , ,ISE70 40 NmISE75(H)80 Nm 1.52 FG *() 6 33 2 () ( etc.) 10 m10 m DC(-)() -6No.PS-OMH0002CN-D * () CE (FKM) * 2030 1 LCD * ()(), (ISE70 ) O -7No.PS-OMH0002CN-D ISE ISE ISE ISE ISE ISE ISE ISE 70 01 MPa 02 43 70 75H 02 43 2 75 010 MPa A 75H 015

Series SV

L dimension AXT100-DS25-015 1.5m AXT100-MC26-015 1.5m AXT100-DS25-030 3m AXT100-MC26-030 3m AXT100-DS25-050 5m AXT100-MC26-050 5m When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L (60) L 44 8 16 14 25 1 13 47.04 50 Approx. 10 Multi-core vinyl cable 0.3mm x 25Ca 2-M2.6 x 0.45 Terminal no. Socket side Plug terminal no.

VQ5000

U D U D Note) Indicate on a manifold specification h i f i d i 10 Base Mounted Type Series VQ5000 Electrical wiring specifications Standard wiring D sub connector assembly (AXT100-DS25) wire colors 015 030 050 D sub connector Terminal No. Polarity Lead wire color Dot marking 1 2 3 .

Direct Solenoid

Includes (3)O-rings AFP 568-015 1 pr. AXT336-5j Ti+ RodsIndudes (2) M6X25 screws pr rod 2 NXT336-4-' Conduitcover Note: Not reouired it usino ME401 SLR end olates I AXT 3(]6-6 Gallrv blockino Disc AXT33G7A Blankslationkit AXT 3S5 Slop Valve (SV-1) sP0100 Inlerface Soeed Conlrol (use adder'M') AXT622-5A TminalBlock Manifolds Part No.

Prefix: Applicable to 6, 10, 16mm Bore Sizes, Applicable Bore Size: 10mm

Prefix: Applicable to 6, 10, 16mm Bore Sizes, Applicable Bore Size: 6mm

Type: Double, Applicable Bore: 015 [056 (9/16")]

Type: Single, Applicable Bore: 015 [056 (9/16")]

•

rtical Mounting Use Connection For Vacuum Entry Bellows type Bellows type F Width across flats G Width across fla.ts 7 015 -c. ., C (mm) ,Model _tA 'B' . f C IL .. .~ l _ _ ZPT06B 6 7 M4X07 3.3 9.1 4 , cZlIT08II 8 " 9 2.5 ::~5:>O;Q8 ,.4.7 , 10,1 Width across flats G Bellows type Bellows type F Width aClOSS lIats 12 o 1!.8 UJ (mm) .

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Note Conductor resistance /km, 20C 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 Cable 25 cores x 24AWG AXT100-DS25-030 Withstand limit VAC, 1 minute 1000 AXT100-DS25-050 For other commercial connectors, use a 25 pin type with female connector conforming to MIL-C24308. Insulation resistance Mkm, 20C 5 or less Note) The minimum bending radius of the D-sub connector cable is 20 mm.

Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: Y (DI Control Kit)

Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: YZ (Y+Z)

Cooling Capacity: 015 (15 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: S (Pump Inverter Type), Option: YZ (Y+Z)

PFxx-OMJ0005CN

1 0.526.3 L/min 152.5 L/min 2105 L/min 2 CO2 0.25.2 L/min 0.513.1 L/min 126.2 L/min 252 L/min N2Ar 010.5 L/min 1 026.3 L/min 052.5 L/min 0105 L/min 2 CO2 05.2 L/min 013.1 L/min 026.2 L/min 052 L/min / 0.01 L/min 0.1 L/min 0.1 L/min 0.1 L/min / 3 09 L / 1 L 0.1 L/Pulse 0.1 L/Pulse 0.1 L/Pulse 1 L/Pulse -2 L/minCFM10 310 -1 Lft 4 1F.S.() 3%F.S 5F.S.(0.35 MPa ) 2F.S.(1535 ) 5F.S.(015