Electric Slide Tables

load m [kg] Work load m [kg] 300 0 50 100 150 200 250 300 350 600 Mey 250 500 Horizontal Vertical 200 400 m L3 [mm] L3 [mm] L3 [mm] 150 300 L3 100 200 50 100 0 0 Yawing Pitching Yawing Rolling 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L4 200 400 L4 [mm] L4 [mm] L4 [mm] 150 300 100 200

Step Motor Controller

100 400 200 Absolute 18-bit encoder (Resolution: 262144 p/rev) Compatible encoder Three phase 200 to 230 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Power voltage [V] Single phase 100 to 120 VAC (50/60 Hz) Main power supply Three phase 170 to 253 VAC Single phase 170 to 253 VAC Allowable voltage range [V] Single phase 85 to 132 VAC Rated voltage [A] 3.0 5.0 2.6 1.5 0.9 Control

IDG

IDG50HV IDG60HV IDG75HV IDG100HV 25 50 100 200 300 500 600 750 1000 25 50 100 200 300 500 600 750 1000 IDG30LV IDG50LV IDG60LV IDG75LV IDG100LV 75 110 170 240 300 IDG60SV IDG75SV IDG100SV 50 100 150 Note) Standard dew point : Outlet air atmospheric pressure dew point under standard performance conditions Standard purge rate : Ratio of purge air flow rate to inlet air flow rate under standard

Series IDG

170 (6.00) 240 (8.48) 300 (10.59) IDG30LM IDG50LM IDG60LM IDG75LM IDG100LM 50 (1.77) 100 (3.53) 150 (5.30) IDG60SM IDG75SM IDG100SM V type A regulator combined with the M type 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) IDG3V IDG5V IDG10V IDG20V IDG30V IDG50V IDG60V IDG75V IDG100V 25 (0.88) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59

Electric Grippers

Basic Compact LEHZ25 LEHZ25L 250 250 200 200 Overhang H [mm] Overhang H [mm] 70%, 40% 150 150 40% Pushing force 100% Pushing force 100% 100 100 70% 50 50 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] LEHZ32 250 200 Overhang H [mm] 150 40% 100 Pushing force 100% 70% 50 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 250 200 Overhang H [mm] 150

Air Cylinder Series CM2

32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250, 300 Note 1)Other intermediate strokes can be manufactured upon receipt of order.

Tie-rod Type Hydraulic Cylinder

340 42 140 130 204 20 16 125 170 340 42 170 162 234 20 16 160 187.5 375 52 212 200 284 24 20 423 CHAW Series Dimensions Rod trunnion type: CHAWU Z T T Cushion adjustment screw 2 x Rc P Width across flats G Width across flats G V V TT GA Air release GA M 4 x J MM MM R (max.)

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-34A-, for 200/220 VAC.

MB

152 177 202 150 227 50 127 51 25 12.5 25 37.5 89 102 114 75 100 125 152 177 202 150 227 50 139 56 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 50 139 61 29 12.5 25 37.5 101 114 126 75 100 125 164 189 214 150 239 175 200 264 289 125 10 75 27 30 120 130 140 20 40 60 80 100 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket Refer to Basic

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 15 266 248 16 282 264 17 298 280 18 314 296 11 202 184 12 218 200 13 234 216 14 250 232 19 330 312 2 stations 58 40 20 stations 346 328 531 Manifold specifications 10-SYJ5000 Type 41: Side ported / 10-SS5YJ5-41Stations -M5 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) L1 L2 4.5 Manual override

LG1H

encoder (Resolution: 262144 p/rev) Three phase 200 to 230 VAC (50/60 Hz) Power voltage [V] Single phase 100 to 120 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Main Three phase 170 to 253 VAC power supply Allowable voltage range [V] Single phase 85 to 132 VAC Single phase 170 to 253 VAC Rated voltage [A] Control power supply voltage [V] 3.0 5.0 0.9 1.5 Single phase 100 to 120 VAC

MNB

Standard Stroke/ Bore size (mm) 32 40 50 63 80 100 Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

MNB

100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 100 80 80 500 400 300 500 400 300 63 63 100 100 50 50 40 40 80 80 200 200 63 63 100 100 32 32 50 50 40 40 Load weight: m (kg) Load weight: m (kg) 50 40 30 50 40 30 32 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100

LJ1H

MSM021P1A Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Station 2 58 40 Station 20 346 328 3 74 56 4 90 72 5 106 88 6 122 104 7 138 120 8 154 136 9 170 152 10 186 168 11 202 184 12 218 200 13 234 216 14 250 232 15 266 248 16 282 264 17 298 280 18 314 296 19 330 312 Station L1 L2 331 5 Port Solenoid Valve 10-SYJ5000 [ ]: AC Type 40: Bottom Ported/10-SS5YJ5-40Stations -M5 Grommet (G) Directional Control Valves Air Grippers Modular F. R.

LJ1H

encoder (Resolution: 262144 p/rev) Three phase 200 to 230 VAC (50/60 Hz) Power voltage [V] Single phase 100 to 120 VAC (50/60 Hz) Single phase 200 to 230 VAC (50/60 Hz) Main Three phase 170 to 253 VAC power supply Allowable voltage range [V] Single phase 85 to 132 VAC Single phase 170 to 253 VAC Rated voltage [A] Control power supply voltage [V] 3.0 5.0 0.9 1.5 Single phase 100 to 120 VAC

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) 50 Main

C95

AH AB XV Z TL h14 TD TM TF H9 h14 H14 0.5 1.2 e8 h14 Max. 157 Max. 195 Max. 238 Max. 290 90 115 135 165 45 60 70 80 20 20 25 25 245 280 300 330 16 18 22 26 25 30 30 40 Max. 157 Min. 30 275 315 335 375 130 170 170 200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 199 242 257 289 25 32

NCG/CG1

7 5.5 32 2 14 44 40 Up to 200 7 6.6 38 2 18 53 40 Up to 200 8 6.6 46 2 25 61 50 End boss is machined on the flange for E.

C95

200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250 Max. 209 Min. 35 Max. 31 Max. 25 Max. 50 Max. 220 Max. 280 Max. 195 Max. 209 Min. 35 Max. 31 Max. 35 Max. 50 Max. 260 Max