Series MXP Precision Air Slide Table

100 150 Load (N) 0 50 100 150 Load (N) 0 50 100 150 Load (N) 200 16 16 16 L=120mm L=120mm L=120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table deflection (mm) Table deflection (mm) Table deflection (mm) 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load (N) 150 100 50 200 250 Load (N)

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

MGTM100 200 P = 0.5 MPa 100 P = 0.5 MPa Load weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100

Turntable Cylinder Series MGT

75st Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1N: Approx. 0. 102kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212 178 204 63

CRQ2

40 5 18 9 6 35 44 53 6 40 60 20 10 7 50 10 89 59 30 15 11 74 12 97 65 13 32 18 20 83 15 109 73 36 93 15 11-8-11 12 Series CRQ2 (Size: 10, 15, 20, 30, 40) Simple Specials: -XA1 to -XA24: Shaft Pattern Sequencing I Shaft shape pattern is dealt with simple made-to-order system.

Series 11-/12-, 21-/22- CXSJ Dual Rod Cylinder/Compact Type

ST 10 20 30 40 50 9+ST 19 29 39 49 59 10+ST 20 30 40 50 60 37+ST 47 57 67 77 87 47+ST 57 67 77 87 97 CXSJ6-10 21-/2211-/12CXSJ6-20 CXSJ6-30 CXSJ6-40 CXSJ6-50 21-/2211-/1221-/2211-/1221-/2211-/1221-/2211-/12850 Dual Rod Cylinder/Compact Type CXSJ 2122CXSJ/ 1112Dimensions: 10 16 17+ST 4 x M3 x 0.5 thread depth 4.5 3.5 8 7.5 2 x M5 x 0.8 thread depth 4 (Piping port) 21 8 Steel ball 34 M3 x 0.5

CU

L A93L 5m .

MXU

0.103 0.089 0.212 46 30 0.115 0.099 0.296 37.5 5 0.115 0.099 0.296 37.5 10 0.153 0.132 0.380 46 15 MXU16 12 0.153 0.132 0.380 46 20 0.190 0.165 0.464 50 25 0.190 0.165 0.464 52.5 30 4.

MXU

Stroke 5 10 15 20 25 30 5 mm 10 mm 15 mm 20 mm 25 mm 30 mm Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

Precision Cylinder Series MTS

241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19 57 42 101 75 157 118 245 179 402 302 628 471 8 5, 10, 15, 20, 25, 30 OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN OUT IN 50 37 113 84 201 150 314 235 490 358 804 603 1,256 942 8 12, 16 25, 50, 75, 100 25, 50, 75, 100, 125, 150, 175, 200 12 20, 25, 32, 40 16

Free-Mounting Cylinder with Air Cushion Series CU

L A93L 5m .

CRQ2

TG effective depth TL TD TB TC D (g6) DD (h9) A AU B BA BB BE J JA JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (H9

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

TL TG effective depth TL TD TB TC D (g6) DD (h9) A AU B BA BB BE J JA JB BC BD BU CA CB F H Size Rotation 20 30 90, 180 90, 180 40 90, 180 16 16 5.2 10 12 15 8.3 32 30 32 36 6.5 8.5 8.6 2.5 3 3 63 (11) 50 14 34 69 (11) 68 14 39 14.5 16.5 49 30.4 34.7 4.7 4.9 7 8.1 25 30 11 14 14 M8 x 1.25 M10 x 1.5 M10 x 1.5 78 (13) 76 16 47 18.5 55 40.4 Size Rotation K Q S W Key dimensions TF (H9) TG (

Smooth Cylinder Series CQSY

5, 10, 15, 20, 25, 30, 35, 40, 45, 50 Replacement Parts: Seal Kits Theoretical Output Table OUT IN Unit: N Bore size (mm) Contents Kit No.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

82 65 102 11-/22-MXP16-30 28 70 119 50 42 56 70 29 30 108 75 128 837 Air Slide Table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive guide unit -X42 Be sure to read this before handling.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

28 70 119 50 42 56 70 29 30 108 75 128 11-/22-MXP16-30 104 Precision air slide table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive specifications for guide unit -X42 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air preparation equipment

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

10, 16 5, 10, 15, 20, 25, 30, 40, 50 20, 25, 32 Specific Product Precautions Be sure to read before handling.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Cylinder stroke (mm) Nil C M Standard strokes (mm) 5, 10, 15, 20, 25, 30 Bore sizes (mm) Action 12, 16 D Double acting 20 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 25 Auto switch specifications Manufacturing intermediate strokes Intermediate strokes can be manufactured in 1mm increments by installing spacers in a standard stroke cylinder.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

This is a legacy product, and replaced byNCDRA1BW30-90Z-A93L, NCRA 30 DBL ROD W/AUTO-SW, ACTUATOR, NCRA ROTARY ACTUATOR, KE, 30MM NCRA DBL-ACT AUTO-SW, .86533 lb

Series 11-MXJ Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 4.5 8 11-MXJ4 Model 11-MXJ6 11-MXJ8 6 M3 x 0.5 Air Double acting 0.15 to 0.7 MPa 1.05 MPa 10 to 60C Bore size (mm) Piping port size Fluid Action Operating pressure Proof pressure Ambient and fluid temperature Suction flow rate L/min (ANR) Size 4 6 8 1 1 1 Operating speed range (Average operating speed) Note) 50 to 500 mm/s (Metal stopper: 50