0.4

Nil Standard (0.4 W) Quick response type (0.95 W) High pressure type (145 psi) Negative common External pilot B: Locking type (Tool required) B K Note 2) N Note 3) R Note 4) 2-position double (Metal) 4-position dual 3-port valve (B) (A) 4 (B) 2 (A) 4 (B) 2 Note) B B A 5 (R1) 3 (R2) 1 (P) 1 (P) 5 (R1) 3 (R2) Note 1) When two or more symbols are specified, indicate them alphabetically.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

VQZ SQ (Station 1) (Station n) VFS (Light/surge voltage suppressor) VFR 63.3 VQ7 47.9 45.9 40.9 34.5 7.5 Block separation button (Push type) 15 14 13 12 11 10 9 8 7 6 5 4 3 2 stations 16 stations Stations n L1 285.5 273 260.5 260.5 248 235.5 223 210.5 198 185.5 185.5 148 173 298 160.5 L2 275 262.5 250 250 237.5 225 212.5 200 187.5 175 175 137.5 162.5 287.5 150 L3 223.5 213 202.5 192 181.5

Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2WB18010DC C (D) Q2WB20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2WB18020DC C (D) Q2WB20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2WB18030DC C (D) Q2WB20030DC M18 x 155 l M18 x 165 l 155 165 36 39 C (D) Q2WB18040DC C (D) Q2WB20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2WB18050DC

Large Bore Compact Cylinder Series CQ2

C A D Model D C Model D C Mounting bolt (mm) Mounting bolt (mm) M18 x 125 l M18 x 135 l 125 135 C (D) Q2WB18010DC C (D) Q2WB20010DC M18 x 135 l M18 x 145 l 135 145 C (D) Q2WB18020DC C (D) Q2WB20020DC M18 x 145 l M18 x 155 l 145 155 C (D) Q2WB18030DC C (D) Q2WB20030DC M18 x 155 l M18 x 165 l 155 165 36 39 C (D) Q2WB18040DC C (D) Q2WB20040DC M18 x 165 l M18 x 175 l 165 175 C (D) Q2WB18050DC

LJ1H

32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143 Deflection Data 145

Air Cylinder

137 170 25 8 20 M5 x 0.8 87 120 112 145 137 170 32 12 20 M6 x 1 89 122 114 147 139 172 164 197 40 13 21 M8 x 1.25 113 150 138 175 163 200 188 225 213 250 Stroke Symbol * When female thread is used, use a thin wrench when tightening the piston rod. * When female thread is used, use a washer etc. to prevent the contact part at the rod end from being deformed depending on the material of

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n: Stations L n 2 148 137.5 119.3 14.5 5 185.5 175 150.8 17.5 6 185.5 175 161.3 12 7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 4 173 162.5 140.3 16.5 3 160.5 150

Single Axis Electric Actuator Series LJ1H

Page 101 Clean room specification . 104 Dust seal specification . 110 TSUBAKI CABLEVEYOR specification . 122 Construction . 134 Mounting . 140 Non-standard Motor Mounting Dimensions . 143 Deflection Data . 145 LJ1H/High Rigidity Guide .

Compact Cylinder with Lock Series CLQ

-35D -35D 8.5 15.5 16.5 x 100 L x 115 L x 140 L x 90 L 100 115 140 90 RLQ -40D -40D x 105 L x 120 L x 145 L x 95 L 105 120 145 95 -45D -45D x 110 L x 125 L x 150 L x 100 L 110 125 150 100 MLU -50D -50D x 115 L x 130 L x 155 L x 105 L 115 130 155 105 -75D -75D x 150 L x 165 L x 190 L 150 165 190 MLGP -100D -100D x 175 L x 190 L x 215 L 175 190 215 ML1C CDLQB: Without Auto Switch Cylinder

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

C76

C76F32B C76F40B Standard stroke (mm) 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 Bore size (mm) 32 40 Max. stroke (mm) Mounting bracket 1000 Trunnion Clevis Single knuckle joint Double knuckle joint Floating joint C76T32 C76C32 KJ10DA GKM10-20A JA25-10-150 C76T40 C76C40 KJ12DA GKM12-24A JA40-12-175 20Example of How to Order Data Accessory 1.

C76

C76F40B C76F32B Standard stroke (mm) 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 Bore size (mm) 32 40 Max. stroke (mm) Mounting bracket 1000 C76T40 C76C40 KJ12DA GKM12-24A JA40-12-175 C76T32 C76C32 KJ10DA GKM10-20A JA25-10-150 Trunnion Clevis Single knuckle joint Double knuckle joint Floating joint 20Example of How to Order Data Accessory 1.

Electric Actuator/Slider Type

Note 4) speed [mm/s] Stroke range Note 8) Horizontal Not required Not required Vertical 6 or more 4 or more Motor output/Size 100 W/ 40 200 W/ 60 Motor type AC servo motor (200 VAC) AC servo motor (200 VAC) Encoder Absolute 20-bit encoder (Resolution: 1048576 p/rev) Power consumption [W] Note 9) Horizontal 45 65 65 Vertical 145 175 175 Standby power consumption when operating [W] Note 10)

NCG/CG1

145 151 135 165.5 190.5 215.5 140.5 167.5 192.5 217.5 142.5 185 210 235 160 Other dimensions are the same as basic style.

CL

CL-40 CL-50 CL-63 CL-80 CL-100 Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Maximum Stroke For the maximum stroke of the CA1 series 40 to 100, and CS1 series

CXS

CXS15 CXS20 CXS25 CXS32 Model 120 150 200 175 150 125 120 110 200 175 150 125 120 110 200 175 150 125 120 110 125 120 110 150 125 110 100 90 80 Stroke SS ZZ Z 175 210 282 257 232 207 202 192 272 247 222 197 192 182 270 245 220 195 190 180 185 180 170 205 180 165 155 145 135 Symbol Made to Order 192 229 312 287 262 237 232 222 296 271 246 221 216 206 294 269 244 219 214 204 204 199 189 222

NCQ8

400 NCQ8B150-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B300-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B400-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #10-24UNC-1 1/8 1 1/4

NCQ8

Mounting bolt C D Mounting Bolt Size for NCDQ8B056 to 250(With Auto Switch) (Inch) Model C D Bolt size Model C D Bolt size NCDQ8B056-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B075-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B106-025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCDQ8B150-025 037 050 062 075 087 100 125 150 175 200 250

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

) Head end lock (-H) Double end lock (-W) Bore size (mm) l e f h IJ JH JW ZZ 149 ZZ 30 55 27 (14.5) (11.5) 138 20 16 30 62 32 (17.5) (11.5) 145 144(152) 156 25 17 35 62 38 (19.5) (11.5) 145(153) 145 155 32 17 0.25 stroke 35 70 48 (22.5) (13) 164 159(168) 173 40 17 40 78 59 (25) (13) 187 182(194) 199 50 17 40 78 72 (25) (13) 187 182(194) 199 63 18 207(221) 213 229 80 52 80 59 10 213 207(