5

Bore size (mm) B TA TL TU TC TX TE TO TR TT TS TH TF Z** TDH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 105 20+0.084 0 80 95 100 70 15 130 110 150 20 11 22 14 60 80 129 20+0.084 0 MB-S10 100 114 120

Electric Grippers

Basic Compact LEHZ25 LEHZ25L 250 250 200 200 Overhang H [mm] Overhang H [mm] 70%, 40% 150 150 40% Pushing force 100% Pushing force 100% 100 100 70% 50 50 0 0 50 100 150 200 250 0 0 50 100 150 200 250 Gripping point L [mm] Gripping point L [mm] LEHZ32 250 200 Overhang H [mm] 150 40% 100 Pushing force 100% 70% 50 0 0 50 100 150 200 250 Gripping point L [mm] LEHZ40 250 200 Overhang H [mm] 150

5 Port Solenoid Valve Series SY3000/5000/7000/9000

L Dimension 66 923 67 935.5 68 948 69 960.5 70 973 71 985.5 No.

Smooth Cylinder/Low Speed Cylinder

75 80 85 90 95 100 105 110 135 160 75 80 85 90 95 100 105 110 115 140 165 85 90 95 100 105 110 115 120 125 150 175 50 55 60 65 70 75 80 85 90 95 120 145 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 CQ-M5 x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 120L x 145L CQ-M5 x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L x 95L x 100L x 125L x 150L

Electric Actuator

less 50 70 85 100 100 70 20 15 104F (40C) LEY25 LEY25 112 31.5 Lead 3: LEY25AC Lead 3: LEY25C 27 Lead 6: LEY25AB 90 Lead 6: LEY25B 22.5 Lead 12: LEY25AA Force [lbf] Force [lbf] Lead 12: LEY25A 67.4 8 13.5 45 9 22.5 4.5 Max. 65% 0 30 40 50 60 70 80 90 0 40 50 60 70 80 90 100 Set value of pushing force [%] Set value of pushing force [%] Max. 95% Set value of pushing force [%] Duty ratio [%

Air Cylinder Series CA2

Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder. Wiping grease from the sliding part of the air cylinder forcefully may cause malfunction. 1110

ISO Cylinder

1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 1 to 50 51 to 100 101 to 150 8 46 (52) 64 (70) 76 (82) 86 (92) 10 46 (50) 64 (68) 76 (80) 86 (90) 12 50 (53.5) 75 (78.5) 91 (94.5) 105 (108.5) 16 56 (59.5) 71.5 (75) 87 (90.5) 82 (85.5) 97.5 (101) 113 (116.5) 98 (101.5) 113.5 (117) 129 (132.5) 111 (114.5) 126.5 (130) 142 (145.5) 20 62 112 137 95 145 170 115

AC Servo Motor Driver (Pulse input type/Positioning type ）

[degree] speed [r/min] [ms] [ms] 1 120.000 1000 100 150 100 1 05 2 -320 .000 500 150 100 200 1 10 3 -230.000 3000 200 300 150 3 15 4 70.000 1500 300 100 Disabled 0 (Note) 20 Note.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

42 Motor cable (7) 44 60 5.5 +0.030 0 5H9 ( ) depth 5 Motor option: With lock (2.2) L Encoder cable (7) A (Table traveling distance: Stroke + 6) Note 2) Motor cable (7) (201) (62) 10 62 70 (66) Stroke (64) Encoder Z-phase detecting position Note 3) (231) 48 21 (4) 30 84 6.5 60 46.8 M4 x 0.7 thread depth 8 (F.G. terminal) 7.5 +0.030 0 5H9 ( ) depth 5 n x 5.5 6 60 150 B D x 150 (= E) 15 15

Table of Contents

70 59 60 485 580 428 505 320 333 150 150 150 150 320 400 70 94 58 65 200 200 480 610 220 220 225 238 Model HAA15 HAA22 B C D E F G H J K L M N P Q R S 1B union union 1 2 B 1 HA AT ID AMG AFF AM Misc. 14-15-3 1 Water Cooled Aftercooler Series HAW Model/Standard Specifications Series HAW can cool high temperature compressed air from compressors down to 40C or less and efficiently remove moisture

Air Slide Table Series MXS

35 70 70 76 80 I 12 12 12 12 12 33 50 67 82 J 47 47 47 57 70 90 114 155 180 K 35 45 55 65 75 100 125 150 175 KA 162 218 258 NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 Z 90.5 ZZ 108 108 108 118 131 172 213 271 311 FF 40 40 40 50 35 60 70 75 80 Model MXS25-10 MXS25-20 MXS25-30 MXS25-40 MXS25-50 MXS25-75 MXS25-100 MXS25-125 MXS25-150 90.5 90.5 100.5 113.5 154.5 195.5 253.5 293.5

Table of Contents

With brake: 150 Without brake: 115 Housing 36.5 32 Thread size M4 x 0.7 6 4 70 M5 x 0.8 6 4 70 Effective thread length (mm) Quantity P.C.D. B 89 A A B Section BB Coupling P.C.D.

Mechanically Jointed Rodless Cylinder Series MY1

Wn X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 65 mm 0 mm 5 mm Y Wb 4.35 kg 150 mm 0 mm 42.5 mm Wc 0.795 kg 150 mm 111 mm 42.5 mm X 65 150 Wd 0.5 kg 150 mm 210 mm 42.5 mm n=a, b, c, d 3.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN E B (Max.)

Magnetically Coupled Rodless Cylinder

Order 50, 100, 150, 200 300 6 50, 100, 150, 200, 250, 300 500 10 Symbol Specifications 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 15 -XB9 -XB13 -X116 -X168 -X210 -X322 -X324 -X431 -X2423 Low speed (15 to 50 mm/s) 1000 20 Ultra low speed (7 to 50 mm/s) 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 Air-hydro 1500 32 Helical insert thread 100, 150, 200, 250, 300, 350

1

232 262 110 192 222 120 202 232 80 135 152 50 150 210 229 75 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 125 180 197 120 180 199 65 110 170 189 125 185 204 110 180 204 120 190 214 125 195 219 150 220 244 175 245 269 200 270 294 100 80 175 247 271 200 272 296 125 197 221 150 222 246 110 182 206 120 192 216 110 90 CXWM32-225 38 240 28 220 543 227 296 523 563

Integrated Controller

s2 3000 mm/s2 20 15 10 5000 mm/s2 5 10 mm/s2 0 0 0 Speed: V [mm/s] 50 100 150 200 250 300 350 400 450 Speed: V [mm/s] EQFS40HC/Ball Screw Drive Horizontal/Lead 5 Vertical/Lead 5 90 80 70 60 50 40 30 20 10 0 45 40 35 30 25 20 15 10 5 0 3000 mm/s2 Work load: W [kg] Work load: W [kg] 10 mm/s2 3000 mm/s2 5000 mm/s2 0 0 Speed: V [mm/s] 50 100 150 200 250 Speed: V [mm/s] 50 100 150 200 250 Static

CL

71 81 101 119 133 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 96 108 115 129 140 44 52 64 78 92 9 9 12 12 15 18 18 42 50 59 76 92 85 95 102 113 124 15 17 17 21 21 16 20 20 25 30 80 90 105 130 150 26 27 26 30 31 32 40 40 52 52 54 59 67 72 76 60 70 86 102 116 10 13 18 23 25 10 12 15 17 19 11.5 13.5 13.5 W/o rod boot W/ rod boot (One side) (Both sides) ZZ 271 300 314 368 388 Bore (mm) 40

CA2

Bore size (mm) Standard stroke (mm) 2040 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Data 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Intermediate strokes not listed above are also available.

AC Servo Motor Driver (Network card type ）

PA14] = 0) 360 = 0 360 = 0 360 = 0 360 = 0 50 50 50 50 330 330 330 330 150 210 150 210 150 210 150 210 Bit 7: 0 Bit 6: 0 Bit 7: 0 Bit 6: 1 Bit 7: 1 Bit 6: 0 Bit 7: 1 Bit 6: 1 The servo motor rotates in a direction specified with a sign of the position data.