MB

The overall length is longer than the cylinder with air cushion as follows because the bumpers are attached to the both sides of the piston; 32, 40: +6 mm, 50, 63: +8 mm, 80, 100: +10 mm, 125: +12 mm 32 40 50 63 80 100 90 90 102 141 145 164 102 124 124 164 200 200 125 235 132 Stroke range (mm) Bore size (mm) Width across flats S ZZ Effective thread length A C B D Ee11 F MA G H MB J K MM P

10

239 264 289 125 120 130 140 150 170 190 210 230 250 270 290 310 Bore size [mm] S ZZ 32 90 141 40 90 145 50 102 164 63 102 164 80 124 200 100 124 200 125 132 235 Model without air cushion is designed to include rubber bumpers.

5

90 15 158 132 184 26 13.5 24 17 75 100 129 25+0.084 0 Double clevis pivot bracket B DX Z + Stroke DD DB B 90 4 x DT B A DS DH DE DC DO DO 4 x DR DA DL DU DU (mm) Part no.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25 37.5 50 87 100 325 300 250 275 225 250 200 225 175 200 150 175 125 150 25 100 125 51 75 112 69 64 12.5 25 37.5 50 87 100 325 316 250 291 225 266 200 241 175 216 150 191 125 166 30 100 141 56 75 128 86 68 12.5 25 37.5 50 103 116 341 316 250 291 225 266 200 241 175 216 150 191 125 166 32 100 141 56 75 128 91 76 12.5 25 37.5 50 103 116 341 300 200 280 180 260 160 240 140 220 120 200 100 180

CLS

0 5 5.5 6 204 106 36 167 195 162 40 18.5 149 86 135 90 118 M18 x 1.5 Up to 1200 0.1 0.3 +0.100 0 226 124 40.5 187 216 182 40 18.5 165 97 135 90 M20 x 1.5 131 0.1 0.3 Up to 1200 +0.100 0 0.1 0.3 277 152 58 237 261.5 225 50 23 200 117 160 M24 x 1.5 110 155 Up to 1200 With Rod Boot With Auto Switch Without rod boot With rod boot Bore size (mm) 125 140 160 180 200 250 Bore size (mm) Stroke

Cylinder with Lock

[mm] Bore size Standard stroke Max. stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160

CL

1600 Refer to p.5.4-90 for Series CL Made to Order specifications.

C95

200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250 Max. 209 Min. 35 Max. 31 Max. 25 Max. 50 Max. 220 Max. 280 Max. 195 Max. 209 Min. 35 Max. 31 Max. 35 Max. 50 Max. 260 Max

CQ2

Mounting at non-rotating side Model C C' Model C D 55 60 65 70 75 80 85 90 95 100 65 70 75 80 85 90 95 100 105 65 70 75 80 85 90 95 100 105 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85

CXWM/CXWL

90 90 90 Model CXWM20-50 CXWM20-75 CXWM20-100 CXWM20-125 CXWM20-150 CXWM20-175 CXWM20-200 52 77 102 127 152 177 202 64 89 114 139 164 189 214 34.5 34.5 39.5 44.5 57 69.5 82 Note) For 25 stroke, the shock absorber is mounted on a single side of the plate.

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

15

300 200 Lead 8: LEY32DB 200 100 Lead 16: LEY32DA 100 Lead 20: LEY32A 0 60 30 120 90 0 60 30 120 90 Ratio to rated torque [%] Ratio to rated torque [%] * When using the force control or speed control, set the maximum value to be no more than 90% of the rated torque.

Rotary Table/

Rotation 90 Rotation 90 Rotation 9 Rotary Table Series MSQ Construction o i t !

Series KV2 Fittings

100/200 100/200 100/200 100/200 100/200 100/200 100/200 100/100 100/200 100/100 100/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation. 6 Series KV2 90 Female Elbow KV2LF_ _-_ _ L1 Applicable Tube M D1 D2 L2 Hex Thread D3 D4 App.

Single Axis Electric Actuator Series LJ1H

Model LC7R-K1A (Refer to page 200 for details.)

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/

Table of Contents

(100) N M 67 (74) 80 (90) 82 (92) M 67 (74) 80 (90) 82 (92) N M 67 (74) 80 (90) 82 (92) Normally open Normally closed VXR215006 04 06 04 VXR2152, 1 1 VXR2262-10 VXR2272-12 80 90 125 101 (112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1

V100

Red (DC) Blue 100 VAC 110 VAC 200 VAC 220 VAC Red Blue 100 VAC 110 VAC Red 200 VAC 220 VAC Push type (Tool required) Push down on the manual override button with a small screwdriver until it stops. Release the screwdriver and the manual override will return.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Main circuit of switch MSM022P1A 200 Output Black lead wire 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation HC-PQ23 200 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yaskawa Electric Corporation Blue lead wire 200/230 SGDE-02AP SGME-02AF12 H S For motor mounting dimensions, refer to the dimensions for series LJ1 30 on page 143 as a reference for mounting and design

CS1

90 43 31 to 1000 Lube Non-lube Air-hydro 1/2 M30 X 1.5 160 161 128 212 112 255 M14 X 1.5 50 47 36 59 16 15 20 90 43 14 19 31 35 to 1000 3/4 M36 X 1.5 18.5 180 182 144 236 118 275 M16 X 1.5 53 56 20 19 40 90 59 43 14 17 36 39 to 1200 3/4 M40 X 1.5 115 18.5 200 204 162 265 132 320 M18 X 1.5 60 63 24 25 17 39 45 70 48 20 41 to 1200 Lube Non-lube 3/4 1 M45 X 1.5 115 18.5 225 226 182 280 150