Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

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Pressure 0.6 MPa 0.5 MPa 0.5 MPa 200 200 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 150 150 0.2 MPa 0.2 MPa 100 100 0.1 MPa 0.1 MPa 50 50 0 0 10 10 50 50 20 20 30 30 40 40 60 60 70 70 Gripping point L (mm) Gripping point L (mm) MHS3-63D MHS3-63D 500 500 Pressure 0.6 MPa Pressure 0.6 MPa 400 400 Gripping force (N) Gripping force (N) 0.5 MPa 0.5 MPa 300 300 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 200 200 0.2

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

[mm] 100 1000 70 10 75 LEY u L = 50 mm Max. speed = Over 200 mm/s i L = 100 mm Max. speed = Over 200 mm/s LES 10 10 Load mass m [kg] Load mass m [kg] LEYG32M LEYG32M LEPY LEPS LEYG32M LEYG32M LEYG25M LEYG25M 1 1 LER LEYG25M LEYG25M LEH 0.1 0.1 LEY -X5 Stroke [mm] 100 1000 70 10 75 Stroke [mm] 100 1000 70 10 75 11LEFS Horizontal Mounting, Ball Bushing Bearing o L = 50 mm Max. speed = 200

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

Electric Actuator

: In-line) 80 80 Lead 5: LEY32;C Regeneration (100%) Lead 4: LEY32D;C 70 70 Lead 10: LEY32;B Lead 8: LEY32D;B 60 60 Regeneration (50%) Vertical work load [kg] Regeneration (100%) Vertical work load [kg] 50 50 40 40 Lead 20: LEY32;A Lead 16: LEY32D;A 30 30 20 20 10 10 0 0 0 200 400 600 800 1000 1400 1200 0 200 400 600 800 1000 1400 1200 Speed [mm/s] Speed [mm/s] Allowable Stroke Speed [mm/

Compact Hydraulic Cylinder

V 200 V or less 3-wire (NPN equiv.)

Magnetically Coupled Rodless Cylinder

, 300 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500 15 750 1 axis 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600 20 1000 15 35 52 176 70 88 123 105 100, 200, 300, 400, 500, 600, 800 25 1200 CY3B CY3R 20 62 94 314 125 157 219 188 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 98 147 25 490 196 245 343 294 1500 32 CY1S 161 241 804 322 402 563 32 483 Note) Strokes are

Mechanically Jointed Rodless Cylinder Series MY1

84 87 105 A B MY-S32 45 64 11.7 6 11 6.6 M8 x 1.25 113 131 A B MY-S50 55 80 14.8 8.5 14 9 M10 x 1.5 136 158 170 200 A B MY-S63 70 100 18.3 10.5 17.5 11.5 M12 x 1.75 206 236 A set of side supports consists of a left support and a right support.

Environment

200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 1000 1000 800 800 1500 1500 m Me L8 [mm] L8 [mm] L8 [mm] L8 [mm] 600 600 L8 Wall 1000 1000 Y 400 400 500 500 200 200 0 0 0 0 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work

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400 300 200 100 0 VF B VFR VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 800 700 600 500 400 300 200 100 0 VZS C VFS VS4 800 700 600 500 400 300 200 100 0 VQ7 D EVS VFN 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out

1

M12 x 1.75 32 40 50 63 117 117 12 16 20 25 24 24 24 28 33 34 36 38 200 121 122 124 124 48 48 48 52 45 46 48 50 300 171 172 174 174 83 84 86 88 124 200 200 300 300 105 105 167 167 15 17 29 29 25 27 39 39 77 77 20 24 24 24 40 44 44 44 120 120 200 200 200 300 300 300 124 124 128 124 20 72 320 90 74 148 220 121 171 28 64 210 236 35 47 85 100 11 32.5 89 48 188 210 166 17.5 M14 x 2.0 200 200

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

CS160-1618-G4 300 PNY-70 -X CS1WN300A-PS SDR-70 NLP-300A P7 G90 CS160-1618-G5 It is not available with auto switch.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Air Cylinder Series MB

ML1C Bore size (mm) Standard stroke (mm) 32 40 50 63 80 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400,

Air Cylinder Series CA2

V 200 V or less 3-wire (NPN equiv.)

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4 70 >= 7 >= 70, 9= 5,'., ?4 0( 9= 5,'., ?

Integrated Controller

200 200 200 0 0 5 10 15 20 25 30 35 40 0 0 10 20 30 40 50 60 70 0 0 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 Horizontal/Bottom 800 800 800 800 L2 L2 [mm] L2 [mm] L2 [mm] L2 [mm] 600 600 600 600 Y 400 400 400 400 Mer m 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50

AC Servo Motor Driver (Pulse input type/Positioning type ）

To comply with SEMI-F47 standard, it is unnecessary to change the initial value (200 ms). However, when the instantaneous power failure time exceeds 200 ms, and the instantaneous power failure voltage is less than 70% of the rated input voltage, the power may be normally turned off even if a value larger than 200 ms is set in the parameter.

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70 0 0 40 80 120 160 200 100 200 300 Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) IDG100L (Type B products group) Refer to pages 14-19-28 to 29.

High Vacuum Angle Valve

Model XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 Rated voltage for heater 90 to 240 VAC Heater assembly quantity 1 1 1 1 H4 100C 100 V 200/40 200/50 400/100 600/150 Heater assembly quantity used Heater power W (Nominal value) Inrush/Power consumption (Option symbol, Operating voltage) 200 V 800/40 800/50 1600/100 2400/150 Heater assembly quantity 1 1 1 1 2 H5 120C 100 V 200/40 400/70 400/