High Vacuum Angle Valve

to space saving With restriction on exhaust direction (one way only: from valve element side to bellows side) B XL -100/160 Chamber A Model A [mm] B [mm] Weight [kg] Conductance [L/s] XLA-100-X152 108 300 10.6 300 XLA-160-X152 138 315 18.5 800 Vacuum pump Vacuum pump XL -100/160 Variations Leakage [Pam3/s] Flange size Option Model Valve type Operating pressure [Pa(abs)] Internal1 External1

Table of Contents

160 300 150 1000 850 1000 860 400 260 400 250 1200 1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

Compact Cylinder

JIS Symbol Double acting, Double rod Standard Strokes (mm) Bore size (mm) Standard stroke 125, 140, 160 180, 200 10, 20, 30, 40, 50, 75, 100, 125, 150, 175, 200, 250, 300 Made to Order (For details, refer to pages 177 to 207.)

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

] 0.42 0.33 0.59[0.25] Rc 1/8 3 position VFR 160 VZ520--C8 VP4 Note) [ ]: Denotes the normal position.

Air Cylinder

301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 32 36 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 32 36 72 85 97 110 135 160 185 12.5 25 37.5

Smooth Cylinder/Low Speed Cylinder

D-X 1227 Smooth Cylinder Series CS2Y 125, 140, 160 How to Order 160 CS2 Y L 300 L 300 160 M9BW CDS2 With auto switch Y With auto switch (Built-in magnet) Number of auto switches Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs. Smooth Cylinder Made to Order Mounting For details, refer to page 1229.

C95

, 125, 160, 200, 250, 320, 400, 500, 600 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 Intermediate strokes are available.

5-Port Solenoid Valve

0.45 MPa 300 300 0.3 MPa 0.3 MPa 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor rotations Number of restrictor rotations SY3A3R-C6 SY5A3R-C6 500 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 0.6 MPa 0.6 MPa 400 400 0.45 MPa 0.45 MPa 0.3 MPa 0.3 MPa 300 300 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor

NCQ2/CQ2

Note 7) Note 7) Stroke standard (pneumatic) Long stroke 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Bore 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Note 7) Only CQ2 is available with 180 and 200 bores.

C95

200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250 Max. 209 Min. 35 Max. 31 Max. 25 Max. 50 Max. 220 Max. 280 Max. 195 Max. 209 Min. 35 Max. 31 Max. 35 Max. 50 Max. 260 Max

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

, 180 200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63

smcmaintenancepartslist

NBR Valve seal Tube gasket Standard (non-lube) Piston gasket 125 140 160 180 200 250 300 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Retaining plate gasket Guide gasket Component part numbers: @3, @5, @6, @7, @8, #0. Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g).

Battery-less

750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range

Table of Contents

160 Gripping force (N) Gripping force (N) Pressure 0.6 MPa 0.5 MPa 0.5 MPa F 120 120 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 80 80 0.2 MPa 0.2 MPa 40 40 0.1 MPa 0.1 MPa 10 10 20 20 30 30 40 40 50 50 0 0 F F Gripping point L (mm) Gripping point L (mm) MHS3-50D MHS3-50D Internal grip 350 350 300 300 Gripping force (N) Pressure 0.6 MPa Gripping force (N) 250 250 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 200

CM2

301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 19 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 36 19 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 36 19 32 12.5 25 37.5 50 75 100 125

Air Cylinder Series MB

Made to Order For details, refer to page 300.

CQ2

2.3-100 10 to 300 Double acting Double rod CQ2W 125, 140 160 2.3-104 10 to 300 Long stroke 32, 40, 50 63, 80 100 Double acting Single rod CQ2 2.3-108 125 to 300 Anti-lateral load 32, 40, 50 63, 80 100 Double acting Single rod CQ2S 32 to 40/5 to 100 50 to 100/10 to 100 2.3-118 Clean series (Bore 12 to 63) Air-hydro (Bore 20 to 100) With One-touch fitting (Bore size 32 to 63) Foot and flange

Table of Contents

Cylinder Speed Chart Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed (mm/s) System 50 63 80 100 125 140 160 180 200 250 300 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 VK Horizontal actuation A VZ VF 0 1000 VFR 900 800 700 600 500 400 300 200 100 0 VP4 Courtesy of Steven

Compact Hydraulic Cylinder

Auto switch models Bore size (mm) 32 40 50 63 80 100 D-M9m/M9mV D-M9mW/M9mWV D-M9mAL/M9mAVL D-F5m/J5m D-F5mW/J59W D-F5BAL/F59F/F5NTL D-A5m/A6m/A59W D-Z7m/Z80 BMB5-032 BA7-040 BA7-080 BA7-080 BS5-160 BT-03 BT-04 BT-08 BT-08 BT-16 BT-16 BMB4-050 BA4-080 BA4-080 BS4-160 BS4-160 Note 1) D-M9 cannot be mounted to 100. Note 2) D-A5m/A6m/A59W/Z7m/Z80 cannot be mounted to 32.