Air Cylinder

201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 30 36 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 32 36 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 32 36 72 85 97 110 135 160 185

4/5 Port Solenoid Valve

suppressor AC ( Hz) 50 60 1 100 VAC 2 200 VAC With light/surge voltage suppressor YOZ is not available.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700,

5 Port Solenoid Valve Series SY3000/5000/7000/9000

SY3120-C6 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5120-01 800 700 600 500 400 300 200 100 0 SY7120-02 800 700 600 500 400 300 200 100 0 SY9120-03 Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CS1 Pressure 0.5 MPa Load rate: 50% Stroke 1000 mm 6 10 16 125 140 160 180 200 20 25 32 40 40 50 63 80 100 Series CM2 Pressure 0.5 MPa Load

Aluminum High Vacuum Angle Valve

A XL Series Case Model Weight (kg) A (mm) Conductance (L/s) XLA-16 XLA-25 XLA-40 XLA-50 XLA-63 XLA-80 XLA-100 XLA-160 B (mm) 40 103 0.25 5 50 113 0.45 14 65 158 1.1 45 Little heavy metal contamination 70 170 1.6 80 88 196 2.9 160 90 235 5.0 200 The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination

5

D-X 211 Smooth Cylinder CS2Y Series 125, 140, 160 How to Order L CS2 Y 160 300 L M9BW CDS2 Y 300 160 With auto switch With auto switch (Built-in magnet) Number of auto switches Nil 2 pcs. S 1 pc. 3 3 pcs. n n pcs. Smooth cylinder Made to Order Refer to page 213 for details.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

center Pressure center Single Double Closed center Exhaust center Pressure center 2 position 2.3 2.8 0.57 0.37 0.71 0.45 Rc 1/8 Rc 1/8 1.9 1.2 3.3[0.85] VZ540--01 2.1 3.4[1.3] 2.1 0.48 0.35 0.78[0.25] 0.46 0.36[0.57] 0.45 0.57 0.86[0.41] 0.56 0.36 0.48 0.43[0.54] 3 position 240(160) 200(120) 240(160) 2 position 2.9 0.61 0.35 0.74 0.41 2.3 VK 1.9 1.3 3.6[0.83] VZ540--02 2.2 3.7[1.4] 2.1 0.50

Table of Contents

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

Applicable Auto Switch Model

Cylinder series Bore size (mm) Technical Data 20 25 32 40 CDM2, CDBM2 CDLM2 BM3 020 BM3 025 BM3 032 BM3 040 Part No. of auto switch mounting band Cylinder series Bore size (mm) 20 25 32 40 50 63 80 100 125 140 160 180 200 CDA1, CDBA1, CDV3 BD1 -04M BD1 -05M BD1 -06M BD1 -08M BD1 -10M CDVS, CDLA, CE2, CNA CDL1 BS1 -125 BS1 -140 BS1 -160 CDS1 BS1 -180 BS1 -200 BD1 -01M BD1 -02M BD1 -02 BD1

CM2

201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore size (mm) 20 17 36 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 17 36 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 17 36 32

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 120mm

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 200mm

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 200mm

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 110mm

Mounting: A (Both Ends Tapped), Bore Size: 63mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 40mm

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 120mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: Rc, Full Stroke: 300mm, First Stroke: 200mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: Rc, Full Stroke: 250mm, First Stroke: 200mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 110mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -

Mounting: Both Ends Tapped, Bore Size: 63mm, Thread: Rc, Full Stroke: 200mm, First Stroke: 40mm, Auto Switch: -, Lead Wire or Prewired Connector: -, Number: -