MGP

to 275 st Over 275st Over 275st 75st or less 45 11 7.5 Rc 1/8 32 15 34 30 96 44 110 78 98 63 48 300 83 121 171 32 46 11 7.5 Rc 1/8 38 18 38 30 104 44 118 86 106 72 48 124 200 300 84 122 172 40 48 14 9 Rc 1/4 34 21.5 47 40 130 60 146 110 130 92 124 200 300 48 86 124 174 50 14 9 Rc 1/4 39 28 55 50 130 70 158 124 142 110 52 128 200 300 50 88 124 174 63 MGPM (slide bearing)/Dimensions A, DB,

CNA

50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 1000 1000 100 80 500 400 300 500 400 300 63 100 100 80 50 40 80 200 200 63 63 100 100 Load weight: m (kg) Load weight: m (kg) 50 50 50 40 30 50 40 30 40 40 20

CNA

(3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa 1000 1000 CLQ 100 500 400 300 500 400 300 80 MLGP 100 63 200 200 50 40 80 RLQ Load weight: m (kg) Load weight: m (kg) 100 100 63 50 MLU 50 40 30 50 40 30 40 ML1C 20 20 [Example] D10 10 5 4 3 5 4 3 -X 202 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P

C95

130 130 130 + 100(n-2) n = 2, 4, 6, 8 130 + 100(n-2) n = 2, 4, 6, 8 135 135 135 135 + 100(n-2) n = 2, 4, 6, 8 135 + 100(n-2) n = 2, 4, 6, 8 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 160 160 + 55(n-4)/2 n = 4, 8, 12, 16 250 10 200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) Note 2) Dimensions: Side Entry Connector [-FS] Formula L1 = 10.5n + 14.5, L2 = 10.5n + 25 n: Station (Maximum 16 stations) n L 1 35.5 46 125 135.5 16 15 182.5 193 275 285.5 14 172 182.5 262.5 273 13 161.5 172 250 260.5 12 151 161.5 237.5 248 11 140.5 151 225 235.5 10 130 140.5 212.5 223 9 119.5 130 212.5 223 8 109 119.5 200 210.5 7 98.5 109 187.5 198 6 88 98.5 175 185.5 5 77.5 88

C95

130 130 130 + 100(n-2) n = 2, 4, 6, 8 130 + 100(n-2) n = 2, 4, 6, 8 135 135 135 135 + 100(n-2) n = 2, 4, 6, 8 135 + 100(n-2) n = 2, 4, 6, 8 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 160 160 + 55(n-4)/2 n = 4, 8, 12, 16 250 10 200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)

ISO Standard Hydraulic Cylinder

24 26 25 42 16 18 11 41 74 1/2 33 63 25 to 800 90 90 64.3 14 84 12 M27 x 2 M12 x 1.25 13 117 36 65 36 145 30 23 32 50 16 17 13 39 80 1/2 33 80 25 to 800 115 115 82.7 18 96 16 M33 x 2 M16 x 1.5 9 149 45 83 45 180 41 26 41 60 20 20 17 46 93 3/4 40 100 25 to 1000 130 130 96.9 18 113 16 M42 x 2 M16 x 1.5 10 162 56 97 56 200 50 25 52 72 22 20 19 45 101 3/4 40 Bore size (mm) RD ZZ S Y Z V SS -

24

Over 100 st 200 st or less Over 200 st 300 st or less Over 300 st 32 6.5 16 35.5 30 96 44 110 78 98 63 24 48 124 200 300 33 45 83 121 171 42 4 4.5 3 6 M8 x 1.25 16 21 40 13 18 39.5 30 104 44 118 86 106 72 24 48 124 200 300 34 46 84 122 172 50 4 4.5 3 6 M8 x 1.25 16 22 50 9 21.5 47 40 130 60 146 110 130 92 24 48 124 200 300 36 48 86 124 174 66 5 6 4 8 M10 x 1.5 20 24 63 13 28 58 50 130 70

Mechanically Jointed Rodless Cylinder Series MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 m 160 160 150 150 140 140 (2400) (2400) (2400) (2400) (2400) (2400) l 130 130 (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) (2000) (2000) m l 90 90 (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.

Table of Contents

200 300 300 0.4 MPa 0.4 MPa 0.4 MPa 0.4 MPa 150 150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

Table of Contents

mm/sec Cylinder stroke: 200 mm AQ The set pressure can be either fixed or variable.

CG1

7 5.5 32 2 14 44 Up to 200 7 6.6 38 2 18 53 Up to 200 8 6.6 46 2 25 61 End boss is machined on the flange for E.

Hydraulic Filters

130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150

Air Cylinder

) $ $ $ $ $ $ $ $ $ $ IC circuit 5 V Yes $ 100 V Grommet IC circuit No 100 V or less Relay, B54 B64 A33 A34 A44 $ Yes No 100 V, 200 V PLC 12 V 200 V or less 24 V 2-wire A33C A34C A44C Terminal conduit PLC 100 V, 200 V Yes DIN terminal Relay, A59W B59W PLC $ $ Diagnostic indication (2-color indication) Grommet Water resistant type auto switches can be mounted on the above models, but

MY1

(400) 200 l l MY1HT63 MY1HT50 100 2.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 Stations 2 135.5 125 104 16 3 148 137.5 120 14 4 160.5 150 136 12.5 5 185.5 175 152 17 6 198 187.5 168 15 7 210.5 200 184 13.5 8 223 212.5 200 11.5 9 248 237.5 216 16 10 260.5 250 232 14 L1 L2 L3 L4 (mm) Stations 11 273 262.5 248 12.5 12 298 287.5

CNA

100 100 Load weight m(kg) Load weight m(kg) 63 63 63 50 50 50 50 40 30 50 40 30 MLGC 40 40 40 CNA 20 20 10 10 CB 5 4 3 5 4 3 CV/MVG 2 2 CXW 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 CXS Max. speed V(mm/s) Max. speed V(mm/s) CXT Graph n Graph c 0.4MPa P < 0.5MPa 0.4MPa P < 0.5MPa 1000 1000 MX 100 100 100 500 400 300 500 400 300 80 80 80 MXU 100 100 100 63 63 63 200 200

Combination Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.