MGP

63 MGPA -400 50 63 0.6 Plate displacement mm Plate displacement mm 0.3 50 63 MGPA -300 50 63 MGPA -300 0.5 MGPA16-150 MGPA16-150 MGPA16-100 0.25 MGPA16-100 0.4 50 63 MGPA -200 50 63 MGPA -150 50 63 MGPA -100 50 63 MGPA -200 0.2 MGPA16-75 MGPA16-75 50 63 MGPA -150 0.3 0.15 50 63 MGPA -100 MGPA16-50 MGPA16-50 0.2 0.1 MGPA16-10 MGPA16-10 0.1 0.05 50 63 MGPA -50 50 63 MGPA -50 0 0 0 10 20 30

Metal Seal/Rubber Seal Series VQ Body Ported

Dimensions Equation L1 = 10.5n + 14.5, L2 = 10.5 n + 25 n: station (Maximum 16 stations) n L 1 16 15 182.5 193 262.5 273 14 172 182.5 250 260.5 13 161.5 172 237.5 248 12 151 161.5 225 235.5 11 140.5 151 212.5 223 10 130 140.5 212.5 223 9 119.5 130 200 210.5 8 109 119.5 187.5 198 7 98.5 109 175 185.5 6 88 98.5 162.5 173 5 77.5 88 150 160.5 4 67 77.5 150 160.5 3 56.5 67 137.5 148 2 46 56.5

CHKD/CHKG

x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 145L x 170L x 195L x 220L x 245L x 270L CQ-M16 x 120L x 125L x 130L x 135L x 140L x 145L x 150L x 155L x 160L x 165L x 190L x 215L x 240L x 265L x 290L 80 85 90 95 100 105 110 115 120 125 150 175 200 225 250 85 90 95 100 105 110 115 120 125 130 155 180 205 230 255 100 105 110 115 120 125 130 135 140 145 170 195 220 245 270 120 125 130 135

CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

24

124 M14 x 2.0 28 11 MGPM (Slide bearing)/A, DB, E Dimensions MGPL (Ball bushing), MGPA (High precision ball bushing)/A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E Bore size [mm] A DB E 150 st or less Over 150 st 150 st or less Over 150 st 80 146.5 193 30 0 46.5 100 166 203 36 0 37 150 st or less Over 150 st 150 st or less Over 150 st 80 160 193 25 13.5 46.5 100 180 203 30 14 37 End

Mechanically Jointed Rodless Cylinder Series MY1

Wn X-axis Xn Y-axis Yn Z-axis Zn Z Wa 0.88 kg 65 mm 0 mm 5 mm Y Wb 4.35 kg 150 mm 0 mm 42.5 mm Wc 0.795 kg 150 mm 111 mm 42.5 mm X 65 150 Wd 0.5 kg 150 mm 210 mm 42.5 mm n=a, b, c, d 3.

Table of Contents

150 0.3 MPa 0.3 MP 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 200 200 0.3 MPa 0.3 MPa 0.3 MPa 0.3 MP 0.3 MPa 100 100 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 0.2 MPa 0.2 MP 0.2 MPa 0.2 MPa 100 100 50 50 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 0.1 MPa 0.1 MP 0.1 MPa 50 100 150 200 0 0 50 100 150 200 0 40 80 120 160 200 0 40 80 120 160 200 Gripping point R (mm) Gripping point

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt C' D' 45 50 55 60 65 70 50 55 60 65 70 75 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 55 60 65 70 75 80 85 90 95 100 125 150 D 40 45 50 55 60 65 45 50 55 60 65 70 45 50 55 60 65 70 75 80 85 90 45 50 55 60 65 70 75 80 85 90 60 65 70 75 80 85 90 95 100 105 130 155 D 55 60 65 70 75 80 85 90 95 100 125 150 65 70 75 80 85 90 95 100 105 130 155 65 70

CG1

(mm) Bore (mm) Standard stroke (mm) Long stroke (mm) ZZ TB GB A H J K P TA B1 NA D AL H1 KA S C E I MM F GA Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 20 25 32 40 50 63 80 100 106 (114) 111 (119) 113 (121) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) 11 11 10 (11) 10 (12) 12 (13) 12 (13) 12 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4

Hydraulic Filters

130 130 150 150 150 190 190 65 65 65 75 75 75 85 85 72 72 72 86 86 86 106 106 90 90 90 115 115 115 145 145 110 110 110 130 130 130 170 170 6 6 6 6 6 6 8 8 195 195 195 245 245 245 19 19 19 19 19 19 20 20 10 10 10 10 10 10 20 20 63 63 63 63 63 63 76 76 14 14 14 17 17 17 17 17 90 90 90 126 126 126 197 197 30 30 30 60 60 80 120 120 177 177 177 227 227 227 285 285 110 110 110 130 130 130 150

Combination Cylinder

150 42 50 59 76 92 100 110 130 160 180 14 18 18 22 26 71 80 99 117 131 11 11 14 17 17 M14 X 1.5 M18 X 1.5 MGQ M18 X 1.5 M22 X 1.5 MGG M26 X 1.5 Long stroke Dimensions except those below are same as one in table above.

C95

8, 12, 16 175 170 175 + 55(n-4)/2 n = 4, 8, 12, 16 185 185 + 55(n-4)/2 n = 4, 8, 12, 16 130 130 130 130 + 100(n-2) n = 2, 4, 6, 8 130 + 100(n-2) n = 2, 4, 6, 8 135 135 135 135 + 100(n-2) n = 2, 4, 6, 8 135 + 100(n-2) n = 2, 4, 6, 8 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 160 160 + 55(n-4)/2 n = 4, 8, 12, 16 250 10 200

C95

8, 12, 16 175 170 175 + 55(n-4)/2 n = 4, 8, 12, 16 185 185 + 55(n-4)/2 n = 4, 8, 12, 16 130 130 130 130 + 100(n-2) n = 2, 4, 6, 8 130 + 100(n-2) n = 2, 4, 6, 8 135 135 135 135 + 100(n-2) n = 2, 4, 6, 8 135 + 100(n-2) n = 2, 4, 6, 8 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 150 150 + 55(n-4)/2 n = 4, 8, 12, 16 120 120 + 55(n-4)/2 n = 4, 8, 12, 16 160 160 + 55(n-4)/2 n = 4, 8, 12, 16 250 10 200

Hygienic Design Cylinder Series HY

135 160 185 95 100 105 110 115 120 125 130 135 140 165 190 115 120 125 130 135 140 145 150 155 180 205 115 120 125 130 135 140 145 150 155 180 205 HY C M 10 13.5 9 9 13 D9.5 -X Individual -X Technical data 889 Series HY Specific Product Precautions 1 Be sure to read before handling.

Air Cylinder Series CM2

37.5 37.5 151 to 200 50 50 50 50 201 to 300 75 75 75 75 301 to 400 100 100 100 100 401 to 500 125 125 125 125 101 to 150 88 92 92 96.5 151 to 200 101 105 105 201 to 300 126 130 130 301 to 400 151 155 155 401 to 500 176 180 180 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256 260 262 294 Bore size 20 25 32 40 23.5 23.5

Air Cylinder

(mm) 40 50 63 80 +0.070 0 80 60 10 102 85 119 17 9 17 12 45 60 62 93 15 CA2-S04 +0.070 0 80 60 10 112 95 129 17 9 17 12 45 60 74 103 15 CA2-S06 +0.070 0 100 70 15 130 110 150 20 11 22 14 55 73 90 107 18 +0.084 0 120 90 15 166 140 192 26 13.5 24 17 75 100 110 129 25 MB-S10 100 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 135 25 Double clevis pivot bracket Material: Cast iron B Z

MY1

Mass m Y Y-axis Yn Z-axis Zn X-axis Xn X Wa 5mm 0mm 65mm 0.88kg 210 65 111 Z Wb 42.5mm 0mm 150mm 4.35kg 150 Wc 42.5mm 111mm 150mm 0.795kg Wd 42.5mm 210mm 150mm 0.5kg Y 42.5 5 n = a, b, c, d 3 Composite center of gravity calculation m = mn = 0.88 + 4.35 + 0.795 + 0.5 = 6.525kg 1 m X = x (mn x Xn) 1 6.525 = (0.88 x 65 + 4.35 x 150 + 0.795 x 150 + 0.5 x 150) = 138.5mm 1 m Y = x (mn x yn

Series VQ Metal Seal/Rubber Seal Body Ported

VQZ < >: AC Note 2) VQD Dimensions (mm) Equation L1=10.5n+14.5 L2=10.5n+25 n: Station (Max. 16) n L 1 16 15 182.5 193 262.5 273 14 172 182.5 250 260.5 13 161.5 172 237.5 248 12 151 161.5 225 235.5 11 140.5 151 212.5 223 10 130 140.5 212.5 223 9 119.5 130 200 210.5 8 109 119.5 187.5 198 7 98.5 109 175 185.5 6 88 98.5 162.5 173 5 77.5 88 150 160.5 4 67 77.5 150 160.5 3 56.5 67 137.5 148 2 46

Air Cylinder Series MB

177 202 51 25 12.5 25 150 227 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 37.5 50 75 100 125 101 114 126 139 164 189 214 56 29 12.5 25 150 239 175 200 264 289 37.5 50 75 100 125 101 114 126 139 164 189 214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180 200 250 290 310 With Mounting Bracket

High Vacuum Angle Valve

80 600/130 800/180 200 V 800/40 1600/80 1600/80 2400/130 3200/180 * The inrush current of the heater flows for several tens of seconds when using 100 V, while it flows for several seconds when using 200 V.