Table of Contents

65.3 18 24 9 28 Up to 300 15 13 5 M8 x 1.25 20 0 0.033 45 13 30 10 5.5 19.5 10 70.5 22 30 9 33.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 -X 45 13 30 12 5.5 19.5 10 76.5 22 34.5 9 37.5 Up to 300 15 17 6 M10 x 1.25 26 0 0.033 50 16 39 14 7 21 15 84.5 24 42.5 10 46.5 Up to 300 21.5 22 8 M14 x 1.5 32 0 0.039 20ZZ Z U S RR QY Q NN Bore size (mm) 20 25 32 40 Data 142 133 14 62 9 14 19.8 M20 x

Electric Actuators

work piece center of gravity (mm) 100 L1 0 10 30 20 Transfer load m (kg) 300 L2 200 Mer m Rolling Yawing 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 1000 a = 500 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 98 Non-standard Motor/Horizontal Mount Specification Series LJ1S30 Dimensions/LJ1S303SC(X10) Scale: 10% 4-M8 x 1.25 thread

CATALOG

5.5 20 25 39 28 3.2 35.8 42 16 28 47.6 35 93 114 25 ~300 19.5 22 45.5 10 14 2 12 12 31 5 8 M10x1.25 29 18 69 11 10 -0.025 -0.047 10 5.5 25 30 43 33 3.2 39.8 42 20 28 53 40 98 119 32 ~300 19.5 22 54 12 18 2 12 11 38 5.5 10 M10x1.25 36 18 71 10 12 -0.032 -0.059 10 6.6 32 35 54.5 40 4.5 49.4 48 22 28 67.7 40 101 125 40 ~300 27 30 63.5 16 25 2 13 12 47 6 14 M14x1.5 44 18 78 10 14 -0.032 -0.059

Air Slide Table

100 120 0 50 100 150 200 250 300 L3: Overhang Allowable range: 120 mm L3: Overhang Allowable range: 300 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ25(A)-10, 20, 30, 40Z MXQ25(A)-50, 75Z 10 10 V = mm/s V = mm/s V = 100 9 9 V = 100 8 8 Load mass m [kg] Load mass m [kg] 7 7 6 6 V = 200 5 5 V = 200 4 4 V = 300 V = 300 3 3 2 2 V = 500 V = 500 1 1 0 0 0 10 20 30 40 50 60 70 80 0

Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

hole 36 (EA, EB port) 1/8 39.4 L plug connector (L): 10-SY7120-L(-F2) C8, N9 C10, N11 M plug connector (M): 10-SY7120-M(-F2) C8, N9 C10, N11 DIN terminal (D, Y): 10-SY7120(-F2) C8, N9 C10, N11 M8 connector (WO): 10-SY7120-WO(-F2) C8, N9 C10, N11 D Y Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 110 [112.2] 66 58.5 47.2 Max. 10 16.1 31.5 [38.5] 32.1 19 36 M8 x 1 Approx. 300

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8

Battery-less

30 to 570 20 to 380 10 to 190 [mm/s] Up to 450 10 to 700 5 to 360 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10

Electric Actuator

Specific Product Precautions 10 10 Lead 16: LEFS32A 0 0 Speed: V [mm/s] 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Speed: V [mm/s] Vertical LEFS40/Ball Screw Drive Horizontal 60 60 Lead 10 50 50 Work load: W [kg] Work load: W [kg] 40 40 Lead 20 30 30 20 20 Lead 10 10 10 0 0 0 100 200 300 400 500 600 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] 3 Series LEF SpeedWork

SYJ300/500/700

(L): 10-SYJ52M-L-M5 (-F) M plug connector (M): 10-SYJ52M-M-M5 (-F) DIN Terminal (D): 10-SYJ52M-D-M5 (-F) M8 connector (WO): 10-SYJ52M-WO-M5 (-F) Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 60.9 28.1[35.1] MAX.10 74.6 53.4 42.1 12.7 32.6 M8 x 1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 65.5[67.7] 75.5 55.7[57.9] 64.6 57.2 50.7 34.7 8 9 8 9 8 9 8 9 14.5 3 14.5 3

A

5.5 20 25 39 28 3.2 35.8 42 16 28 47.6 35 93 114 25 ~300 19.5 22 45.5 10 14 2 12 12 31 5 8 M10x1.25 29 18 69 11 10 -0.025 -0.047 10 5.5 25 30 43 33 3.2 39.8 42 20 28 53 40 98 119 32 ~300 19.5 22 54 12 18 2 12 11 38 5.5 10 M10x1.25 36 18 71 10 12 -0.032 -0.059 10 6.6 32 35 54.5 40 4.5 49.4 48 22 28 67.7 40 101 125 40 ~300 27 30 63.5 16 25 2 13 12 47 6 14 M14x1.5 44 18 78 10 14 -0.032 -0.059

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

291 15 287 274 14 270 257 13 253 240 12 236 223 11 219 206 10 202 189 9 185 172 8 168 155 7 151 138 6 134 121 5 117 104 4 100 87 L plug connector (L) DIN terminal (D) M plug connector (M) Built-in speed controllers (Lead wire length) MAX. 11 300 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX. 10 : With light/surge voltage suppressor 3-3-46 46 5 Port Solenoid Valve Base Mounted

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LEFS32lll-250l 445 256 380 6 2 300 LEFS32lll-300l 495 306 430 6 2 300 LEFS32lll-350l 545 356 480 8 3 450 LEFS32lll-400l 595 406 530 8 3 450 LEFS32lll-450l 645 456 580 8 3 450 LEFS32lll-500l 695 506 630 10 4 600 LEFS32lll-550l 745 556 680 10 4 600 LEFS32lll-600l 795 606 730 10 4 600 LEFS32lll-650l 845 656 780 12 5 750 LEFS32lll-700l 895 706 830 12 5 750 LEFS32lll-750l 945 756 880 12 5 750

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Table of Contents

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

Mechanically Jointed Rodless Cylinder Series MY1

20 MY3M 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m1 MY1HT/m2 MY1HT/m3 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load mass kg Load mass kg Load mass kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 D20 20 20 -X 10 10 10 Individual -X 100 200 300 400

15

(Recommended height 5 mm) Dimensions [mm] Stroke L A B n D E 150 389 156 328 4 150 200 439 206 378 6 2 300 250 489 256 428 6 2 300 300 539 306 478 6 2 300 350 589 356 528 8 3 450 400 639 406 578 8 3 450 450 689 456 628 8 3 450 500 739 506 678 10 4 600 550 789 556 728 10 4 600 600 839 606 778 10 4 600 650 889 656 828 12 5 750 700 939 706 878 12 5 750 750 989 756 928 12 5 750 800 1039 806

Made to Order

Without auto switch magnet Bore size 20 to 32 With auto switch magnet Bore size 32 T G With auto switch magnet Bore size 20, 25 L A + Stroke A G L Bore size (mm) T 125 stroke or more 10 10 10 10 10 125 to 300 stroke 12 22 23 23 25 27 75, 100 stroke 50 56.5 58.5 64 73.5 85 125 to 300 stroke 67.5 77 78.5 80 91 102.5 100 stroke or less 5 5 5 5 5 100 stroke or less 4.5 5 7 17 18 18 20 22

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Pressure Switches/ Pressure Sensors 28 L plug connector (L): 10-SYJ3143-L-M5 M8 connector (WO): 10-SYJ3143-WO-M5 M plug connector (M): 10-SYJ3143-M-M5 Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 64.3 [66.5] 54.5 [56.7] 63.4 56 49.5 R1 P R2 R1 P R2 R1 P R2 10 10 10 10 10 10 28 28 28 14 14 14 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6

SX

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series MB/CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation SX3120-C6 0 800 700 600 500 400 300 200 100