Integrated Controller

50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight [kg] 1.74 1.81 1.98 2.24 2.42 2.59 2.77 2.94 3.12 2.74 2.85 3.14 3.42 3.82 4.11 4.39 4.68 4.97 5.25 5.54 In-line Motor Series EQY16D Stroke [mm] 30 50 100 150 200 250 300 Product weight [kg] 0.72 0.76 0.87 1.01 1.12 1.23 1.34 Series EQY25D EQY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100

5 Port Solenoid Valve Series SV1000/2000/3000/4000

L Dimension n: Stations L n 2 148 137.5 119.3 14.5 5 185.5 175 150.8 17.5 6 185.5 175 161.3 12 7 198 187.5 171.8 13 8 210.5 200 182.3 14 9 223 212.5 192.8 15 10 235.5 225 203.3 16 11 248 237.5 213.8 17 12 248 237.5 224.3 12 13 260.5 250 234.8 13 14 273 262.5 245.3 14 15 285.5 275 255.8 15 16 298 287.5 266.3 16 17 310.5 300 276.8 17 18 310.5 300 287.3 11.5 4 173 162.5 140.3 16.5 3 160.5 150

Single Axis Electric Actuator Series LJ1H

8kg 10kg Speed (mm/s) Speed (mm/s) 250 250 LJ1H10 Model Mounting orientation 10kg 200 200 Load movement direction 150 150 600 100 100 400 L1 (mm) a = 1000 Pitching Yawing Vertical Vertical 50 50 m a a = 2000 200 a = 3000 0 100 200 300 400 500 0 100 200 300 400 500 L1 Mep Stroke (mm) Stroke (mm) 0 2 4 6 8 10 When an actuator is operated under conditions that exceed the lines in the graphs

Air Cylinder Series CM2

Up to 400 6.8 3.2 102 131 133 142 to 400 Up to 300 Up to 300 4 4 8 7 9 9 41 111 19 10 9 40 37 60 75 30 14 10 40 40 60 40 112 120 122 47 28 40 55 20 25 6.8 3.2 102 135 Up to 300 Up to 450 137 146 to 450 Up to 300 Up to 300 4 4 8 7 9 9 41 113 19 10 9 40 37 60 75 30 14 10 40 40 60 40 114 122 124 47 28 40 55 20 25 6.8 3.2 104 137 Up to 300 Up to 450 139 148 to 450 Up to 300 Up to 300 5 4 7

Cylinder with Lock

2500*1 40 250 50 300 63 300 80 300 100 300 *1 The maximum rod length of the MWB32-XC68 is 1800 mm.

5-Port Solenoid Valve

0.45 MPa 300 300 0.3 MPa 0.3 MPa 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor rotations Number of restrictor rotations SY3A3R-C6 SY5A3R-C6 500 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 0.6 MPa 0.6 MPa 400 400 0.45 MPa 0.45 MPa 0.3 MPa 0.3 MPa 300 300 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor

IZx-OMT0049

] Installation distance in widthfrom ionizer to work piece [mm] 50 50 100 100 0.5s 0.5s 150 150 200 200 1s 2s 1s 2s 250 250 5s 5s 300 300 5-4.

Air Cylinder

9 14 133 142 Up to 300 8 10 32 32 52 36 108 116 118 25 Up to 450 47 4 6.8 28 102 3.2 40 55 20 8 25 135 Up to 450 Up to 300 40 37 7 4 60 75 41 111 Up to 300 9 10 19 30 9 14 137 146 Up to 300 9 10 40 40 60 40 112 120 122 32 Up to 450 47 4 6.8 28 104 3.2 40 55 20 8 25 137 Up to 450 Up to 300 40 37 7 4 60 75 41 113 Up to 300 9 10 19 30 9 14 139 148 Up to 300 9 10 40 40 60 40 114 122 124 40

MGP

300, 350, 400 32 to 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 Applicable auto switches Lead wire length (m) Auto switch model no.

1

Tie-rod Length Changeable Range CS1 125 140 CA2, CVS, CV3, CBA All bore size 0 300 Model Bore size (mm) M Min. M Max. 200 22 250 26 300 32.5 160 18 180 20.5 270 15.5 Rod side 50 Head side 300 6-17-16 14 Simple Specials: -XC79: Tapped Hole, Drilled Hole, Pinned Hole Machined Additionally These changes are dealt with Simple Specials System.

Basic type / Direct mount type Series CY3B/CY3R

250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

Compact 5-Port Solenoid Valve

L5 17.5 14 17 14 17 13.5 16.5 13.5 16.5 13 16 13 16 12.5 15.5 n L 17 18 19 20 21 22 23 24 L1 236 242.5 249 255.5 262 268.5 275 281.5 L2 153.9 160.4 166.9 173.4 179.9 186.4 192.9 199.4 L3 260.5 273 273 285.5 285.5 298 310.5 310.5 L4 250 262.5 262.5 275 275 287.5 300 300 L5 12.5 15.5 12 15 12 15 18 14.5 45 Plug-in Connector Connecting Base JSY1000/3000/5000 Series Type 10/Side Ported (Applicable

ISO Cylinder

Lubricant Not required (Non-lube) Stroke length tolerance +1.4 0 mm Piston speed 50 to 1500 mm/s Cushion Rubber bumper Allowable kinetic energy 0.65 J 1.2 J Standard Strokes Bore size [mm] Standard stroke [mm]*1 Max. stroke*2 [mm] 32 10, 25, 40, 50, 80, 100, 125, 160, 200 300 40 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 *1 Other strokes are available on request. *2 For exceeding the

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350

Metal Seal/Rubber Seal Series VQ Body Ported

Note 1) Note 2) Dimensions Formula L1 = 10.5n + 14.5, L2 = 10.5n + 25 n: Station (Maximum 16 stations) n L 1 2 46 56.5 225 235.5 3 56.5 67 237.5 248 4 67 77.5 250 260.5 5 77.5 88 250 260.5 6 88 98.5 262.5 273 7 98.5 109 275 285.5 8 109 119.5 287.5 298 9 119.5 130 300 310.5 10 130 140.5 312.5 323 11 140.5 151 312.5 323 12 151 161.5 325 335.5 13 161.5 172 337.5 348 14 172 182.5 350 360.5 15

Table of Contents

M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2 Rc 1 2B (JIS 10kFF) 2B (JIS 10kFF) 3B (JIS 10kFF) 4B (JIS 10kFF) 4B (JIS 10kFF) 14-16-2 1 Heatless Air Dryer Series ID Model

Environment

300 350 400 30 50 100 150 200 250 300 350 400 450 500 LC3F2 Product weight [kg] Step motor 1.45 1.52 1.69 1.95 2.13 2.30 2.48 2.65 2.83 2.48 2.59 2.88 3.35 3.64 3.91 4.21 4.49 4.76 5.04 5.32 Servo motor 1.41 1.48 1.65 1.91 2.09 2.26 2.44 2.61 2.79 Weight: In-line Motor Type Model LEY25D LEY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product

MB

, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450

Base Mounted Metal Seal/Rubber Seal Series VQ

260.5 198 262.5 273 208.5 262.5 273 219 275 285.5 229.5 287.5 298 240 300 310.5 L1 L2 L3 Dimensions: Side Entry Connector [-FS] n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L 162.5 173 175 185.5 187.5 198 187.5 198 200 210.5 212.5 223 225 235.5 237.5 248 250 260.5 275 285.5 287.5 298 300 310.5 312.5 323 312.5 323 250 260.5 262.5 273 L2 L3 2-4-191 VQ0/1000 Kit (Flat ribbon cable connector) P

10

, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Refer to pages 425 to 432 for cylinders with auto switches. 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Auto