5-Port Solenoid Valve

0.45 MPa 300 300 0.3 MPa 0.3 MPa 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor rotations Number of restrictor rotations SY3A3R-C6 SY5A3R-C6 500 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 0.6 MPa 0.6 MPa 400 400 0.45 MPa 0.45 MPa 0.3 MPa 0.3 MPa 300 300 0.15 MPa 0.15 MPa 200 200 100 100 0 0 0 1 2 3 4 5 6 0 1 2 3 4 5 6 Number of restrictor

NCQ2/CQ2

Note 7) Note 7) Stroke standard (pneumatic) Long stroke 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Bore 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Note 7) Only CQ2 is available with 180 and 200 bores.

C95

200 70 90 90 110 70 90 90 110 Max. 26 90 115 135 165 Max. 25 8 9 12 14.5 270 320 345 380 250 300 320 350 90 115 135 165 16 18 22 26 Max. 50 145 170 185 205 25 32 32 40 25 32 32 40 160 200 250 320 Max. 160 180 230 270 330 Max. 224 Max. 157 199 242 257 289 125 160 200 250 Max. 209 Min. 35 Max. 31 Max. 25 Max. 50 Max. 220 Max. 280 Max. 195 Max. 209 Min. 35 Max. 31 Max. 35 Max. 50 Max. 260 Max

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

, 180 200 Single rod CQ2 7-6-108 10 to 300 Double acting 125, 140 160, 180 200 Double rod CQ2W 7-6-115 10 to 300 Long Stroke 32, 40, 50 63, 80, 100 Single rod CQ2 Double acting 7-6-121 125 to 300 Anti-lateral Load Single rod CQ2S 32, 40, 50 63, 80, 100 Double acting 32 to 40/5 to 100 50 to 100/10 to 100 7-6-132 With End Lock 20, 25, 32 50, 63, 80 100 Single rod CBQ2 Double acting 20 to 63

smcmaintenancepartslist

NBR Valve seal Tube gasket Standard (non-lube) Piston gasket 125 140 160 180 200 250 300 CS1N125A-PS CS1N140A-PS CS1N160A-PS CS1N180A-PS CS1N200A-PS CS1N250A-PS CS1N300A-PS Retaining plate gasket Guide gasket Component part numbers: @3, @5, @6, @7, @8, #0. Seal kit includes a grease pack (125 to 160: 40 g, 180 and 200: 50 g, 250 and 300: 60 g).

Battery-less

750 20 to 550 10 to 300 Actuator specifications 451 to 500 10 to 600 5 to 300 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 20 to 900 12 to 540 6 to 270 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 601 to 700 20 to 630 12 to 420 6 to 230 24 to 800 16 to 620 8 to 310 30 to 750 20 to 550 10 to 300 Parallel Stroke range

Table of Contents

160 Gripping force (N) Gripping force (N) Pressure 0.6 MPa 0.5 MPa 0.5 MPa F 120 120 0.4 MPa 0.4 MPa 0.3 MPa 0.3 MPa 80 80 0.2 MPa 0.2 MPa 40 40 0.1 MPa 0.1 MPa 10 10 20 20 30 30 40 40 50 50 0 0 F F Gripping point L (mm) Gripping point L (mm) MHS3-50D MHS3-50D Internal grip 350 350 300 300 Gripping force (N) Pressure 0.6 MPa Gripping force (N) 250 250 Pressure 0.6 MPa 0.5 MPa 0.5 MPa 200

CM2

301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 19 30 68 81 93 106 131 156 181 12.5 25 37.5 50 75 100 125 143 156 168 181 206 231 256 25 36 19 32 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 147 160 172 185 210 235 260 32 36 19 32 12.5 25 37.5 50 75 100 125

Air Cylinder Series MB

Made to Order For details, refer to page 300.

CQ2

2.3-100 10 to 300 Double acting Double rod CQ2W 125, 140 160 2.3-104 10 to 300 Long stroke 32, 40, 50 63, 80 100 Double acting Single rod CQ2 2.3-108 125 to 300 Anti-lateral load 32, 40, 50 63, 80 100 Double acting Single rod CQ2S 32 to 40/5 to 100 50 to 100/10 to 100 2.3-118 Clean series (Bore 12 to 63) Air-hydro (Bore 20 to 100) With One-touch fitting (Bore size 32 to 63) Foot and flange

Table of Contents

Cylinder Speed Chart Bore size Series MB Pressure 0.5 MPa Load factor 50% Stroke 500 mm Series CS1 Pressure 0.5 MPa Load factor 50% Stroke 1000 mm Average speed (mm/s) System 50 63 80 100 125 140 160 180 200 250 300 1000 Perpendicular, upward actuation 900 800 700 600 500 400 300 200 100 VK Horizontal actuation A VZ VF 0 1000 VFR 900 800 700 600 500 400 300 200 100 0 VP4 Courtesy of Steven

Compact Hydraulic Cylinder

Auto switch models Bore size (mm) 32 40 50 63 80 100 D-M9m/M9mV D-M9mW/M9mWV D-M9mAL/M9mAVL D-F5m/J5m D-F5mW/J59W D-F5BAL/F59F/F5NTL D-A5m/A6m/A59W D-Z7m/Z80 BMB5-032 BA7-040 BA7-080 BA7-080 BS5-160 BT-03 BT-04 BT-08 BT-08 BT-16 BT-16 BMB4-050 BA4-080 BA4-080 BS4-160 BS4-160 Note 1) D-M9 cannot be mounted to 100. Note 2) D-A5m/A6m/A59W/Z7m/Z80 cannot be mounted to 32.

Electric Actuator/Slider Type

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 2000 2000 2000 2000 2000 2000 Minimum Stroke for Auto Switch Mounting 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700,

Aluminum High Vacuum Angle Valve

Uniform baking temperature 108 154 10.6 300 138 200 18.5 800 Common to all series.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

Mechanically Jointed Rodless Cylinder Series MY1

20 MY3M 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m1 MY1HT/m2 MY1HT/m3 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load mass kg Load mass kg Load mass kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 D20 20 20 -X 10 10 10 Individual -X 100 200 300 400

Cylinder with Lock Series CLS

125 160 500 MLU 600 140 400 500 125 400 MLGP 300 300 ML1C 200 200 [Example] 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5 MPa P 0.5 MPa P 250 4000 3000 3000 200 2000 180 250 2000 160 140 200 1000 125 180 700 800 900 Load mass: m (kg) Load mass: m (kg) 1000 700 800 900 160 600 140 600 500 500 125 400 400 300 300 D200

CLS

V (mm/s) Graph (7) Graph (4) 0.5 MPa ) P 0.5 MPa ) P 250 4000 4000 3000 3000 200 180 2000 2000 160 250 140 Load weight: m (kg) Load weight: m (kg) 125 200 1000 1000 700 800 900 700 800 900 180 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V (mm/s) Maximum speed: V (mm/s) 9-9-7 8 Cylinder with Lock Double Acting, Single Rod

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

6 (Slide bearing type) 5 800 st 700 st 4 600 st 3 500 st 2 300 st 400 st st: Stroke (mm) 1 200 st 100 st 0 0 20 40 60 80 100 120 140 160 Allowable end load F (N) MGGM50Stroke 8 (Slide bearing type) 7 Deflection Y (mm) 6 1000 st 5 900 st 4 800 st 700 st 3 600 st 2 400 st 500 st st: Stroke (mm) 100 st 200 st 300 st 0 1 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Allowable end load F