MB

, 175, 200, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300

10

, 175, 200, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Refer to pages 425 to 432 for cylinders with auto switches. 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600

SX

L1 L2 L3 L4 160.5 173 185.5 185.5 198 210.5 223 235.5 M3 Terminal screw A: Orange B: Green 150 162.5 175 175 187.5 200 212.5 225 129 139.5 150 160.5 171 181.5 192 202.5 15.5 16.5 17.5 12.5 13.5 14.5 15.5 16.5 (Rail mounting hole pitch 12.5) Stations n 10 stations 11 12 13 14 15 16 17 stations 248 248 260.5 273 285.5 298 310.5 310.5 L1 L2 L3 L4 237.5 237.5 250 262.5 275 287.5 300 300 213 223.5

Magnetically Coupled Rodless Cylinder

, 200 500 10 15 20 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

MGP

0.5 0.4 MGPA100-300 MGPA100-250 MGPA100-200 MGPA100-150 MGPA100-300 MGPA100-250 MGPA100-200 MGPA100-150 MGPA25-300 MGPA25-300 0.4 0.3 MGPA25-200 MGPA25-200 MGPA25-150 0.3 MGPA25-150 0.2 MGPA100-100 MGPA100-50 MGPA100-100 MGPA100-50 0.2 MGPA25-100 MGPA25-100 MGPA25-50 MGPA25-50 0.1 0.1 0 0 0 20 40 60 80 0 100 200 300 Horizontal load N Horizontal load N Note 1) Displacements shown above do

1

CXSM CXSL 10 to 100 15 110, 120, 125, 150 110, 120, 125, 150, 175, 200 20, 25, 32 10 to 100 225, 250, 275, 300 (CXWM16 to 25) 225, 250 (CXWM32) 225, 250, 275 (CXWL16 to 25) 225 (CXWL32) CXWM 16, 20, 25, 32 25 to 200 CXWL 16, 20, 25, 32 225, 250, 275 25 to 200 ML1 25, 32, 40 1001 to 2000 100 to 1000 CY3B 20, 25, 32, 40 2001 to 3000 100 to 1000 CY1B 50, 63 From 2001 200 to 2000 2001 to 4000

HRX-OM-Q026

/200/250/300-A-20. 8-1 8.1.2 HRSH100/150/200/250/300-A-40. 8-2 8.1.3 HRSH100/150/200/250-W-20. 8-3 HRSH Series HRX-OM-Q026 Contents 8.1.4 HRSH100/150/200/250-W-40. 8-4 8.1.5 Option T High head temp . 8-5 8.1.6 Refrigerant with GWP reference . 8-6 8.1.7 Communication specifications . 8-6 8.2 Dimensions . 8-7 8.2.1 HRSH100-A-20/40. 8-7 8.2.2 HRSH150-A-20/40-, HRSH200-A-20/40. 8-8 8.2.3 HRSH250

Compact 5-Port Solenoid Valve

150 162.5 162.5 175 175 187.5 187.5 200 200 212.5 L5 23 19.5 22.5 19.5 22.5 19 22 19 22 18.5 21.5 18.5 21.5 18 21 Fittings, Replacement Parts, Tools Manifold Options Specific Product Precautions n L 17 18 19 20 21 22 23 24 L1 193.5 200 206.5 213 219.5 226 232.5 239 L2 153.9 160.4 166.9 173.4 179.9 186.4 192.9 199.4 L3 223 235.5 248 248 260.5 260.5 273 273 L4 212.5 225 237.5 237.5 250 250

AC Servo Motor Driver (Network card type ）

The following graphs show overload protection characteristics. 1000 1000 Operating Operating 100 100 Operation time [s] Operating Operation time [s] Servo-lock Servo-lock 10 10 1 1 0.1 0.1 100 200 300 350 0 50 150 250 100 200 300 400 0 50 150 250 350 (Note 1, 2) Load ratio [%] Load ratio [%] (Note 1, 2, 3) LECSN-T5 LECSN-T7, LECSN-T8, LECSN2-T9 Note 1.

Table of Contents

Series AM, AMD, AMH, AMG 150 CA AM AMD AMH AMG Thread type (3) Nil Rc F G N NPT Body size Accessory (Option) A With drain cock (1) Note 3) Corresponds to attachment symbols C, D, and J. Select according to the type of threads used on the body. C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve.

Metal Seal/Rubber Seal Series VQ Body Ported

173 67 77.5 150 160.5 56.5 67 150 160.5 46 56.5 137.5 148 25 35.5 112.5 123 35.5 46 125 135.5 Dimensions: Top Entry Connector [-PU] n L 1 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 L3 L4 87.5 98 250 260.5 237.5 248 225 235.5 212.5 223 200 210.5 187.5 198 187.5 198 175 185.5 162.5 173 150 160.5 137.5 148 125 135.5 125 135.5 112.5 123 100 110.5 How to Order Valves How to Order Manifold Assembly

MGP

The intermediate strokes that do not use a spacer are made to order "XB10" shown on p.5.4-1. 125, 150, 175, 200, 250 MGP 10, 20, 30, 40, 50, 75, 100 12 16 M L MXS 20 25 MGP 20, 30, 40, 50, 75,100, 125, 150, 175, 200 M L 250, 300, 350, 400 MXQ 32 40 50 63 80 100 MXF MGP 25, 50, 75, 100, 125, 150, 175, 200 M L 250, 300, 350, 400 MXW OUT IN MXP Theoretical Force (N) MG Rod diameter (mm) Operating

5 Port Solenoid Valve

150 162.5 175 175 187.5 200 200 212.5 225 225 237.5 250 250 262.5 275 275 110.5 110.5 123 135.5 148 148 160.5 160.5 173 185.5 185.5 198 210.5 210.5 223 235.5 235.5 248 260.5 260.5 273 285.5 285.5 21 Slim Compact Plug-in Manifold Bar Base PCWiring System Compatible Flat Ribbon Cable J kit Slim Compact Plug-in Manifold Bar Base Slim Compact Plug-in Manifold Bar Base MIL Standard M 20 pins

C76

151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 40 96 146 171 196 120 170 195 220 97 147 172 197 97 147 172 197 129 179 204 229 254 154 204 229 254 279 122 172 197 222 247 122 172 197 222 247 6-10-25 26 Series C76 Dimensions [First angle projection] Single

C76

151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 1 to 50 51 to 100 101 to 150 151 to 200 201 to 250 32 40 96 146 171 196 120 170 195 220 97 147 172 197 97 147 172 197 129 179 204 229 254 154 204 229 254 279 122 172 197 222 247 122 172 197 222 247 6-10-25 26 Series C76 Dimensions [First angle projection] Single

Base Mounted Metal Seal/Rubber Seal Series VQ

160.5 89.5 98.5 162.5 173 100.2 109.2 175 185.5 110.9 119.9 175 185.5 121.6 130.6 187.5 198 132.3 141.3 200 210.5 143 152 212.5 223 153.7 162.7 225 235.5 164.4 173.4 237.5 248 175.1 184.1 250 260.5 185.8 194.8 250 260.5 196.5 205.5 262.5 273 207.2 216.2 275 285.5 Dimensions: Side Entry Connector [-FS] n 1 2 3 4 5 6 7 8 9 12 13 14 15 16 10 11 L L3 L4 137.5 148 150 160.5 150 160.5 162.5 173

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 40 54 36 23 12.5 25 37.5 50 75 100 125 150 175 200 225 250 75 88 100 113 138 163 188 213 238 263 288 313 50 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 63 64 51 25 12.5 25 37.5 50 75 100 125 150 175 200 225 250 87 100 112 125 150 175 200 225 250 275 300 325 80 68 56 30

25

back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 0.5 s 100 100 0.5 s 150 150 1 s 200 200 2 s 1 s 250 250 5 s 2 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation distance in height

Electric Actuator

Cable length y 250 (194) 65 15 15 20 20 24 20 5H9 depth 5 ( ) 0.030 0 24 20 Lock cable (3.5) n x 5.5 [mm] 6 Model L 582 634 682 734 782 834 882 934 982 1034 1082 1134 A B n D E LEFS32;-300 LEFS32;-300B LEFS32;-400 LEFS32;-400B LEFS32;-500 LEFS32;-500B LEFS32;-600 LEFS32;-600B LEFS32;-700 LEFS32;-700B LEFS32;-800 LEFS32;-800B 60 430 6 2 300 306 150 530 8 3 450 406 D x 150 (= E) B 15 630 10

C95

Standard Stroke Bore size (mm) Standard stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 32 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 40 300, 350, 400, 450, 500 25, 50, 75, 100, 125, 150, 175, 200, 250, 50 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 63 300, 350, 400, 450, 500, 600 25, 50, 75, 100, 125, 150, 175, 200, 250, 80 300, 350