XM, XY

209 268 483 Stainless steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal XMC, XYC Series How to Order Angle type M9N A A 16 50 M9N XMC XMC Flange size 16, 25, 40 M9N A 25 1 Flange size 50, 63, 80 XYC XYC Flange size 25, 40 Flange size 50, 63, 80 In-line type A 1 50 M9N Note) The XMC and XYC series with solenoid valve are also available.

Smooth Cylinder/Low Speed Cylinder

55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Mounting bolt part no.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 9-15-78

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

MHZ

2 L MRHQ 0 10 20 30 40 50 60 0 50 100 150 Misc.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 8-30-64

5

(mm) Stroke range (mm) Special cap bolt 32 5 to 50 50 33 60 43 5.5 8 48 56 65 75, 100 60 43 M FV 40 5 to 50 56.5 39.5 66.5 49.5 5.5 8 54 62 72 75, 100 66.5 49.5 FT L B + Stroke A + Stroke 50 10 to 50 58.5 40.5 68.5 50.5 6.6 9 67 76 89 75, 100 68.5 50.5 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 32 5 to 50 17 38.5 34 75, 100 40 5 to 50 17 38.5 40 75, 100 L1 50 10 to 50 18 43.5 50

Electric Actuator/Slider Type

1 L = 50 mm Max. speed = Over 200 mm/s !

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 7-9-48

NCQ8

Indicator light Lead wires Oilproof vinyl heavyduty cord 0.1" (2.7 mm) x 0.13" (3.2mm) ellipse, 2.3 x 10-4in2 (0.15mm2), 2 cores: D-M9B(V), 3 cores: D-M9N(V), D-M9P(V) Note 1) Refer to page 50 for solid state switch common specifications. Note 2) Refer to page 50 for lead wire lengths.

Made to Order

MGGB20 to 50--XC6A MGGB20 to 50--XC6B MGGB20 to 50--XC6C MGGF20 to 50--XC6A MGGF20 to 50--XC6B MGGF20 to 50--XC6C Small flange Front mounting flange Small flange AA AA AA AL (mm) (mm) (mm) AA Bore size (mm) 20 25 32 40 50 AA Bore size (mm) 20 25 32 40 50 AL Bore size (mm) 20 25 32 40 50 AA 12 12 12 9 16 16 16 9 16 16 16 9 19 19 19 12 25 25 25 12 1768 C Made to Order Common Specifications:

15

8 50 36* 4.5* 40.1 69.8 61.4 M4 x 12 M5 x 25 10 LZ 32 LC3F2 NZ M5 x 0.8 9 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NY M4 x 0.7 8 70 50 5 47.5 89.8 66.9 M3 x 12 M5 x 40 14 NX M5 x 0.8 9 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NW M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12 M5 x 40 9 NV M4 x 0.7 8 63 50 5 51 89.8 66.9 M4 x 12 M5 x 40 9 NU M5 x 0.8 9 70 50 5 48.8 89.8 66.9 M4 x 12

Air Cylinder

, 50, 75, 100, 125, 150, 200 MB 40, 50, 63 25, 50, 75, 100, 125, 150, 200, 250, 300 Please consult with SMC for strokes which exceed the standard stroke length.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

1 L = 50 mm Max. speed = Over 200 mm/s !

Integrated Controller

50 100 150 200 250 300 350 400 30 50 100 150 200 250 300 350 400 450 500 Product weight [kg] 1.74 1.81 1.98 2.24 2.42 2.59 2.77 2.94 3.12 2.74 2.85 3.14 3.42 3.82 4.11 4.39 4.68 4.97 5.25 5.54 In-line Motor Series EQY16D Stroke [mm] 30 50 100 150 200 250 300 Product weight [kg] 0.72 0.76 0.87 1.01 1.12 1.23 1.34 Series EQY25D EQY32D Stroke [mm] 30 50 100 150 200 250 300 350 400 30 50 100

The RQ series new air cushion construction allows this series to retain the merits of a compact cylinder. The unique air cushion construction eliminates the cushion ring used in conventional type air cushions, which reduces the overall length of the cylinder. The RQ series meets the demands for reduced shock, noise reduction and improved repeatability at the stroke end. Unique air cushion

Table of Contents

Series CQ2 Compact Cylinder: Long Stroke Type Double Acting, Single Rod 32, 40, 50, 63, 80, 100. How to Order . Precautions. Specifications. Construction. Dimensions . Series RQ Compact Cylinder with Air Cushion 20, 25, 32, 40, 50, 63, 80, 100. Features. Series Variations. Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod 20, 25, 32, 40, 50, 63, 80, 100 .