Base Mounted), Voltage: 5 (24VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: T (NPTF), Body/Seal Material: H (Body SUS, Seal FKM)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: NPTF, Port Size: 1/8, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing: Sub-Base

IR1000/2000/3000

Example 1) 0.4MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2MPa setting 2pcs., 0.4MPa setting 2pcs., 0.8MPa setting 1pc. with 5 stations IRM20-5G-021221 Copper-free specifications Ozone Resistant Specifications 3 Accessory (pressure gauge) Nil None Fluoro rubber is used for rubber seal materials.

VM

Frequency Port size (Nominal size) Piston style 0.15 to 1.0MPa 5 to 60C (No freezing) VM/VR Red Green Orange Rc(PT) (6A) 40g VH 300 c.p.m or less R(PT) (6A) 1 8 1 8 Weight 6g Construction/Component Parts Construction/Component Parts w q Description Aluminum alloy Material Notes No. w q Description Brass Material Notes No.

Precision Regulator

With digital pressure switch ARX Switch output specifications Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 AMR Output specifications NPN open collector 1 output PNP open collector 1 output NPN open collector 1 output + Analog voltage output NPN open collector 1 output

Direct operated poppet valve construction , Seal material: FKM , Body material: C37, stainless steel , Port size: Rc 1/8, Available in body ported or based mounted styles, SUB PLATE FOR PVQ33, VALVE, PVQ PROPORTIONAL VALVE, 21, PVQ NO SIZE RATING, .00000 lb

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

M-3G Material PVC Applicable model M3 Stainless steel 304, NBR M-3G2 PVC M-5G1 Stainless steel 304, NBR M-5G2 Gasket Stainless steel 316, Special FKM M5 M-5G3 M-5AL-6, M-5ALH-6 M-5HL-4, 6, M-5HLH4, 6 Nylon 66, GF30% M-5GH For KQ2 M6 thread Stainless steel 304, NBR M6 M-6G KQ2 Series, 10-32 UNF 10-32 UNF M-10/32G M-01H-4, M-5H-4 M-5HL-4, M-5HLH-4 C3604 (With electroless nickel plated

Precision Regulator Series IR1000/2000/3000

Ozone resistant Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 4 For High/Low Temperature Environments Standard model no. T Stations Accessory (Pressure gauge) For high/low temperature environments 2 2 stations Nil None ... ...

Table of Contents

VS4 16 stations Max. 16 stations.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-28-1A For 01T For 01T1 For 01C For 01F AXT625-28-3A Junction cover assembly 9 AXT625-28-7AStations VVF2000-26-5AFor 01T AXT623-22 Stations 13 NBR Rubber plug For 01T For 01T1 For 01C For 01F (Terminal and adapter plate) 8 AXT625-28-1 VVF2000-26-6 Adapter plate Resin Replacement Parts: Sub Assembly

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 15 19 20 15 19 20 14 16 16 14 16 17 14 16 17 9.0 9.0 9.0 VFS5600 VFS5110

VFS

16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100

VFR

AXT625-4-1 AXT625-5 AXT625-17 AXT625-16 18 x 15 x 1.5 10.5 x 7.5 x 1.5 8 x 5 x 1.5 AXT625-28-1A Material Steel plate Steel plate NBR NBR NBR NBR NBR No. Description Material Part no. AXT625-28-3A For 01T For 01T1 For 01C For 01F For 01SU Junction cover assembly AXT625-28-7AStations o VVF2000-26-5AStations AZ738-10AStations For 01T For 01SU AXT623-22 NBR Rubber plug !

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(3.5) 21.5 N7T: One-touch fitting for 1/4" N9T: One-touch fitting for 5/16" 01T: 1/8 NPTF U side n A 2 A 2 Manual override 5 SMC SMC 4 (L4) (L3) L2 L1 P=16 P=16 15.5 3 2 1 18 Station 5 D side 50.5 22.5 300 (Lead wire length) 3 70 Cover diameter 1.4 Cross sectional area 0.2mm2 59 PE port (30) R 3 1 P 25.5 11 M5 x 0.8 External pilot port 1/4 NPTF 20 12.5 (Only external pilot type (R)) P(SUP

CATALOG

2.36 1 15/16 9/32 2 1/4 4 3/4 9/16 3/8 5/8 1 1/4 7/16-20 1 1/8 1 1/8 5/16-24 5/16-18 200 (2) 3/4 2.6 3/8 2 1/2 0.3 1.26 1.06 1 1.71 5/8 3 5/8 2.4 1 15/16 7/16 2 1/4 4 3/4 9/16 3/8 7/8 1 1/2 7/16-20 1 1/8 1 1/8 5/16-24 3 3/8-16 1 1/4 250 (2.5) 3/4 3.1 3/8 0 1.3 1.06 1 1.75 5/8 3 3/4 2.48 1 15/16 19/32 2 3/8 4 7/8 9/16 3/8 1 7/8 325 (3.25) 1 1/8 3.9 1 1/2 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1.18

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 BRACKET ASSEMBLY NUMBER (IF ORDERED SEPARATELY) F1 Type SX3/5/7000-16-2A (With Mounting Screw) F2 Type SX3/5/7000-16-1A (With Mounting Screw) Courtesy of Steven Engineering, Inc. !

Valve Type: 33 (N.C. Base Mounted), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 40 (4mm)

Valve Type: 33 (N.C. Base Mounted), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 23 (2.3mm)

Valve Type: N.C. Base Mounted, Voltage: 12VDC, Electrical Entry: Grommet, Orifice Size: 4mm, Port Size: -, Thread Type: -, Body/Seal Material: -, Option: -

Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing