Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 L M8 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 16 Y-G02 Y-G03 Y-G04 Y-G05 34 41 42 56 8.5 10.5 14 18 16 20 22 28 25 30 30 40 10.3 12.8 12 16 11.5 14 14 20 34 41 42 56 8.5 16 25 30 30 40 M8 x 1.25 10.3 11.5 21 I-G02 I-G03 I-G04 I-G05 8 10 18 22 8 10 10 14 8 10 18 22 8 10 10 14 IY-G02 IY-G03 IY-G04 IY-G05 +0.058 0 +0.4 +0.2 0.2 0.4 +0.058 0 20 10.5 12.8 14 25.6 20 M10 x 1.25 +0.058

Shock Absorbers and Rate Controls

(SMAII BORE} UFM10 x t ) UF r/220 uF s/16 18 + UF I-72 [ ' Dtr_ C l' I j rIl l l T F I r H o .L 8 a.22 & _l -! g.3t g 1 R r I -1 .2( 20 F G (otolog llo.

IR1000/2000/3000

For IRV2000, IRV3000 Zero position Heaven Zero position Ground Fig. (2) Fig. (1) 14-5-16 16 Vacuum Regulator Series IRV1000/2000/3000 Standard Specifications F.R.L.

IR1000/2000/3000

Example 1) 0.4MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2MPa setting 2pcs., 0.4MPa setting 2pcs., 0.8MPa setting 1pc. with 5 stations IRM20-5G-021221 Copper-free specifications Ozone Resistant Specifications 3 Accessory (pressure gauge) Nil None Fluoro rubber is used for rubber seal materials.

Precision Regulator

With digital pressure switch ARX Switch output specifications Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 AMR Output specifications NPN open collector 1 output PNP open collector 1 output NPN open collector 1 output + Analog voltage output NPN open collector 1 output

Body Ported), Voltage: 6 (12VDC), Electrical Entry: G (Grommet), Orifice Size: 16 (1.6mm), Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: F (G)

Valve Type: N.C. Body Ported, Voltage: 12VDC, Electrical Entry: Grommet, Orifice Size: 1.6mm, Port Size: 01 [Base Mount w/Sub-Plate 1/8(6A) or Body Ported 1/8(6A)], Thread Type: G, Body/Seal Material: -, Option: -

Direct operated poppet valve construction , Seal material: FKM , Body material: C37, stainless steel , Port size: Rc 1/8, Available in body ported or based mounted styles, SUB PLATE FOR PVQ33, VALVE, PVQ PROPORTIONAL VALVE, 21, PVQ NO SIZE RATING, .00000 lb

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

M-3G Material PVC Applicable model M3 Stainless steel 304, NBR M-3G2 PVC M-5G1 Stainless steel 304, NBR M-5G2 Gasket Stainless steel 316, Special FKM M5 M-5G3 M-5AL-6, M-5ALH-6 M-5HL-4, 6, M-5HLH4, 6 Nylon 66, GF30% M-5GH For KQ2 M6 thread Stainless steel 304, NBR M6 M-6G KQ2 Series, 10-32 UNF 10-32 UNF M-10/32G M-01H-4, M-5H-4 M-5HL-4, M-5HLH-4 C3604 (With electroless nickel plated

Precision Regulator Series IR1000/2000/3000

Ozone resistant Example 1) 0.4 MPa setting with 6 stations IRM10-6G-16 Example 2) 0.2 MPa setting 2 pcs., 0.4 MPa setting 2 pcs., 0.8 MPa setting 1 pc. with 5 stations IRM20-5G-021221 4 For High/Low Temperature Environments Standard model no. T Stations Accessory (Pressure gauge) For high/low temperature environments 2 2 stations Nil None ... ...

S Couplers

With check valve Without check valve With check valve Without check valve KKA3P-01F -02F -03F KKA4P-02F -03F -04F KKA6P-03F -04F -06F KKA7P-04F -06F -10F KKA8P-06F -10F -12F KKA9P-10F -12F -14F KKA3P-01F-1 -02F-1 -03F-1 KKA4P-02F-1 -03F-1 -04F-1 KKA6P-03F-1 -04F-1 -06F-1 KKA3S-01F -02F -03F KKA4S-02F -03F -04F KKA6S-03F -04F -06F KKA7S-04F -06F -10F KKA8S-06F -10F -12F KKA9S-10F -12F -14F

1

16 32 32 PROFINET M12 M12 16 16 PROFIBUS DP 32 32 EtherNet/IP M12 D-sub Note) 16 16 32 CC-Link M12 16 Note) Enclosure is IP40 when the communication connector is D-sub. eClamp bracket assembly Part no.

CATALOG

2.36 1 15/16 9/32 2 1/4 4 3/4 9/16 3/8 5/8 1 1/4 7/16-20 1 1/8 1 1/8 5/16-24 5/16-18 200 (2) 3/4 2.6 3/8 2 1/2 0.3 1.26 1.06 1 1.71 5/8 3 5/8 2.4 1 15/16 7/16 2 1/4 4 3/4 9/16 3/8 7/8 1 1/2 7/16-20 1 1/8 1 1/8 5/16-24 3 3/8-16 1 1/4 250 (2.5) 3/4 3.1 3/8 0 1.3 1.06 1 1.75 5/8 3 3/4 2.48 1 15/16 19/32 2 3/8 4 7/8 9/16 3/8 1 7/8 325 (3.25) 1 1/8 3.9 1 1/2 1 1/2 1/2 3/8-24 3 3/4 0 1.57 1.18

5-Port Solenoid Valve

If the layout is specified, indicate it on the manifold specification sheet. i Mounting and Option Symbol Mounting Option Name plate Station number Nil Direct mounting 32 M12 NB NBN 16 NC NCN 32 *4 D-sub ND NDN 16 VA VAN CC-Link 32 M12 VB VBN 16 DA DAN EtherCAT 32 M12 DB DBN 16 FA FAN PROFINET 32 M12 FB FBN 16 EA EAN EtherNet/IP 32 M12 EB EBN 16 *3 GAN Ethernet POWERLINK 32 M12 *3 GBN 16

V100

Lead wire color VQZ 4 1 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Black Brown Red Orange Yellow Pink Blue Purple Gray White White Yellow Orange Yellow Pink Blue Purple Gray Orange Red VZ 5 10 16 11 20 17 VS VFN Multi-connector pin arrangement DIN rail mounting bracket Pin no. 1 SOL.

V

Model A L D Applicable Fitting Size d KQP-04 16 32 6 4mm KQP-03 16 32 6 5/32 KQP-06 18 35 8 6mm KQP-07 18 35 8 1/4 KQP-08 20.5 39 10 8mm KQP-09 20.5 39 10 5/16 KQP-10 22 43 12 10mm KQP-11 22 43 12 3/8 BRACKET ASSEMBLY NUMBER (IF ORDERED SEPARATELY) F1 Type SX3/5/7000-16-2A (With Mounting Screw) F2 Type SX3/5/7000-16-1A (With Mounting Screw) Courtesy of Steven Engineering, Inc. !

VS 8-2/VS 8-4

PNP, M12, 8 inputs NPN, M12, 8 inputs PNP, M8, 8 inputs NPN, M8, 8 inputs Digital input unit PNP, M8, 8 inputs, with open detection function NPN, M8, 8 inputs, with open detection function 7 PNP, M12, 16 inputs NPN, M12, 16 inputs PNP, M12, 8 outputs Digital output unit NPN, M12, 8 outputs 2-channel input Analog input unit M12 connector End plate 8 7/8 inch connector CC-Link (+COM.), 16 outputs

Micro Mechanical Valve Series VM1000

T.T. 6 2 x M20 x 1 Lock nut Thickness 6, Width across flats 27 Max. 10 Symbol 2 port 56 (A) 2 23 R port (3 port only) 52 33.5 12 10 1 (P) (108) 3 port (A) 2 22 13 12 10 32 1 (P) 3 (R) 16 * 0.5 MPa supply 2 x 1/4 2 x 5.5 mounting hole 30 25 F .O.F .* 56 N P .T. 3.5 mm O.T. 2 mm T.T. 5.5 mm 40 16 Series VM200 Series VM200 Toggle lever VM220-02-08A VM230-02-08A Panel mounting hole T.T. 6 2

VM

Description Brass, NBR NBR Material Material Note Valve seat Body O-ring Valve q w e r Dimensions VR1210 VR1220 20 3-1/4 3-1/8 16 OUT 21 38 OUT 20 16 SMC IN IN 29 16 SMC IN IN 6.6 mounting hole 21.2 5.5 mounting hole 50 17.2 38 5-7-3 61 Series VR1210/1220 How to Order 01 VR2110 Option X3 Secondary tank connection board 1 4 Rc N.O.

VM

Description Brass, NBR NBR Material Material Note Valve seat Body O-ring Valve q w e r Dimensions VR1210 VR1220 20 3-1/4 3-1/8 16 OUT 21 38 OUT 20 16 SMC IN IN 29 16 SMC IN IN 6.6 mounting hole 21.2 5.5 mounting hole 50 17.2 38 5-7-3 61 Series VR1210/1220 How to Order 01 VR2110 Option X3 Secondary tank connection board 1 4 Rc N.O.