ITV0000

fitting/tube into a breathing hole.

HRX-OM-M005

a sub tank capacity.

Direct operated poppet valve construction, Seal material: FKM, Body material: C36, stainless steel, Port size: M5, Current proportional valve, PVQ, PROPORTIONAL VALVE, 0.00000 lb

Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Voltage: 6 (12VDC), Electrical Entry: M (M Plug Connector), Lead Wire: O (w/o Lead Wire), Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Voltage: 5 (24VDC), Electrical Entry: M (M Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector), Lead Wire: Lead Wire, Orifice Size: 04 (0.4mm), Port Size: M5 (w/Sub-Plate M5x0.8), Body/Seal Material: A (Body C36, Seal FKM)

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC12V, Specification: Standard / Low Vacuum Compatible, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M5, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal

Voltage: 12VDC, Electrical Entry: M Plug Connector, Lead Wire: w/o Lead Wire, Orifice Size: 0.4mm, Port Size: w/Sub-Plate M5x0.8, Body/Seal Material: Body C36, Seal FKM

Size: 30, Thread: Rc, Port Size: 04 (1/2), Options: 6L (6 + L), -A: -A

Size: 40, Thread: N (NPT), Port Size: 04 (1/2), Options: 6L (6 + L), -A: -A

Size: 40, Thread: Rc, Port Size: 04 (1/2), Options: 6L (6 + L), -A: -A

Size: 40, Thread: F (G), Port Size: 04 (1/2), Options: 6L (6 + L), -A: -A

Process Pump

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Process Pump

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Compact Cylinder Series CQS

x 35L x 40L x 45L x 50L M5 x 55L x 60L x 6L x 70L x 75L x 80L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L 6.5 10 Mounting bolt 6.5 7 10 Note) When mounting a cylinder with throughhole, be sure to use the attached plain washer.

MXS

Model H G A B C J* K E D F 16.5 MXS-AT6 5 MXS 6 7 21 19 8 5 10.5 2.5 M2.5 X 8 M5 X 0.8 * MXS6, MXS8 26.5 MXS-AT6-X11 15 D 16.5 MXS-AT8 5 E E H MXS 8 M3 X 10 M6 X 1 8 25 9 6 12.5 3 22.5 26.5 MXS-AT8-X11 15 36.5 MXS-AT8-X12 25 5 G 20 MXS-AT12 MXS12 12 32 13 8 18.5 4 31 M4 X 8 M8 X 1 30 MXS-AT12-X11 15 B C 40 MXS-AT12-X12 25 24.5 MXS-AT16 5 F K K F A J MXS16 M5 X 10 M10 X 1 14 40 15 10 23 5

High Vacuum Angle Valve

(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100