Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: F (Port Location Both Sides, Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: J (Port Location Both Sides, External Pilot), A,B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting w/o

Series: SS5Y3 (SY3000 Manifold), Model: 10S6 (Side-Ported, Serial Interface, EX600), SI Unit: WS (Wireless Remote Unit), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 3 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A,B Port Size: N7 (ø1/4" One-touch Fitting)

Stations: 12 Stations, Port Size: N7 (w/ø1/4" One-Touch Fitting), SI Unit: WS (Wireless Remote), End Plate Type: 3 (Power Supply w/7/8" Connector, Max. Supplied current 8 A, SI Unit Common: N (- COM)

Stations: 04 Stations, Port Size: N7 (w/ø1/4" One-touch Fitting), SI Unit: WS (Wireless Remote), End Plate: 3 [Power Supply w/7/8" Connector (Max. Supplied Current 8 A)], SI Unit Common: N (-COM)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]

[Separate Type Connector Connection] Separated sensor, Output Method: Analog, Analog Output Specification: Current, Pipe Port Type: [One-Touch Couplings] One-Touch Couplings (Straight), Plumbing Thread Type: -, Plumbing Thread Nominal: -, Pressure Resistance(MPa): 1, Flow Rate Type: Standard, Operating Temperature Range(°C): -10～60, Operating Humidity Range(%): 35～85, Number of Inputs: 2,

HRX-OM-X010

HRZ Series 8.1 Specification 8-5 8-5 HRX-OM-X010 Chapter 8 Appendix 8.1.2 Cooling capacity Fluid : Fluorinated Fluid Flow rate : Rated flow Facility water temp. : 25deg.C HRZ***-WS-F 12 HRZ010-WS-F 10 HRZ008-WS-F Cooling capacitykW 8 HRZ004-WS-F 6 4 HRZ002-WS-F 2 0 -20 -10 0 10 20 30 40 50 60 70 80 90 Circulating fluid setting temp.deg.C Figure 8-1 Cooling capacity (HRZ-WS-F) *Common to 50

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: 01 (Rc1/8), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

HRX-OM-M005

) Table 8-1 Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Model HRZD020-WS-WS Channel 1 2 Cooling method Water cooled refrigerant type Temperature control system PID control PID control Cooling capacity*1 kW 9.5 (Circulating fluid at 20C) 9.5 (Circulating fluid at 20C) Operating temperature range C -30 to 90 -30 to 90 Temperature stability C 0.1*2

Large Capacity Compressed Air Filters Series AFW

AFW1500-N30D-WS 1,500 1/2 1/2 215 3 flg. ** 32 39 7.5 16 2,550 AFW1500-N30FM-WS 1,500 1/2 1/2 326 4 flg. ** 32 39.5 9.75 18.25 3,570 AFW2100-N40FM-WS 2,100 C 1/2 1/2 439 6 flg. ** 32 41 12 20.5 6,460 AFW3800-N60FM-WS 3,800 3/4 3/4 647 8 flg. ** 32 41.5 14.5 24 11,050 AFW6500-N80FM-WS 6,500 3/4 3/4 778 10 flg. ** 32 42.5 17.5 28 17,000 AFW10-N100FM-WS 10,000 CF CF CF 12 flg. ** CF CF CF CF

Refrigerated Thermo-chiller

Power consumption: Facility water: Max.82% reduction (SMC comparison) Max.90% reduction (SMC comparison) 20 l/min Conventional model HRZ010-WS Conventional model HRZ010-WS 6.2 kWh/h 2 l/min 1.1 kWh/h Operating conditions: 10C, 0 kW with 50% load, 2 kW with 50% load Operating conditions: 10C, 0 kW with 50% load, 2 kW with 50% load High Performance + Temperature stability: 0.1C (when a load

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

Clamp Cylinder with Lock Series CLK1

Hs 33 37.5 43 43 n-2 2 D-H7, D-H7W D-H7F 15 + 45 ( ) (n = 2, 4, 6...) A B 3 5.5 7 7 15 60 65 + 45 (n-2) D-H7, D-H7W D-H7F 30.5 28.5 30 30 n-2 2 15 + 50 ( ) (n = 2, 4, 6...) Approx. Hs 30.5 35 40.5 47.5 D-H7C 15 65 10 65 + 50 (n-2) A B Approx. Hs 3 5.5 7 7 n-2 2 D-H7C 31.5 28.5 30 30 15 + 50 ( ) (n = 2, 4, 6...)

HRX-OM-I051

Brake lever Caster w/ brake (2 pcs. on the front) M12 anchor bolt M8 nut (2 pcs.)

SGC200-OMJ0004

4) 4) , , , , 1)-10-20 2) 1) 1) 1) 1) 50mm 2/s 2) 2) 2) 2) 3) 3) 3) 3) 4) 5), 6) 4 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / Nm Rc1/8 79 Rc1/4 1214 Rc3/8 2224 Rc1/2 2830 Rc3/4 4550 Rc1 6570 , , , , 1.5~2 1) 2) 3) 2 5 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / 30 1 1) 2)1 0.1MPa