Stations: 11 Stations, Port Size: N7 (w/ø1/4" One-touch Fitting), SI Unit: WS (Wireless Remote), End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)]

Stations: 04 Stations, Port Size: N7 (w/ø1/4" One-touch Fitting), SI Unit: WS (Wireless Remote), End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)]

Stations: 04 Stations, Port Size: N7 (w/ø1/4" One-touch Fitting), SI Unit: WS (Wireless Remote), End Plate: 2 [Power Supply w/M12 Connector (Max. supplied Current 2 A)], SI Unit Common: N (-COM)

Stations: 04 Stations, Port Size: N7 (w/ø1/4" One-touch Fitting), SI Unit: WS (Wireless Remote), End Plate: 3 [Power Supply w/7/8" Connector (Max. Supplied Current 8 A)], SI Unit Common: N (-COM)

HRX-OM-X010

HRZ Series 8.1 Specification 8-5 8-5 HRX-OM-X010 Chapter 8 Appendix 8.1.2 Cooling capacity Fluid : Fluorinated Fluid Flow rate : Rated flow Facility water temp. : 25deg.C HRZ***-WS-F 12 HRZ010-WS-F 10 HRZ008-WS-F Cooling capacitykW 8 HRZ004-WS-F 6 4 HRZ002-WS-F 2 0 -20 -10 0 10 20 30 40 50 60 70 80 90 Circulating fluid setting temp.deg.C Figure 8-1 Cooling capacity (HRZ-WS-F) *Common to 50

HRX-OM-M005

) Table 8-1 Specification for fluorinated fluid (wide temperature) double inverter (HRZD020-WS-WS) Model HRZD020-WS-WS Channel 1 2 Cooling method Water cooled refrigerant type Temperature control system PID control PID control Cooling capacity*1 kW 9.5 (Circulating fluid at 20C) 9.5 (Circulating fluid at 20C) Operating temperature range C -30 to 90 -30 to 90 Temperature stability C 0.1*2

Large Capacity Compressed Air Filters Series AFW

175 D Flanged Models Threaded Models 1/4 N/A 5.5 1-1/4 5.91 18.11 1.65 4.80 476 AFW275-N12D-WS 280 1/4 N/A 5.5 1-1/2 5.91 18.11 1.65 4.80 545 AFW325-N14D-WS 320 1/4 N/A 8.8 1-1/2 7.09 18.98 2.05 5.75 680 AFW400-N14D-WS 400 A 1/4 N/A 8.8 2 7.09 18.98 2.05 5.75 1,189 AFW700-N20D-WS 700 1/4 N/A 18.7 2-1/2 7.87 23.43 2.64 8.27 1,445 AFW850-N25D-WS 850 B 1/4 N/A 18.7 3 7.87 23.43 2.64 8.27 2,550

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø1/4 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: S (Bracket for w/Flow Adjustment Valve)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: Yes, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/Flow Adjustment Valve

Refrigerated Thermo-chiller

fluid temperature (C) Heating Capacity HRZ010-WS/010-W1S/010-W2S 7 HRZ010-WS 6 Heating capacity (kW) 5 HRZ010-W1S 4 3 HRZ010-W2S 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Pump Capacity (Thermo-chiller Outlet) HRZ010-WS HRZ010-W1S 1 0.5 [Outlet port: Max.]

CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 F Shaft: 12d9 Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

Clamp Cylinder with Lock Series CLK1

Unclamp side lock (F) 3-Rc 1/4 Clamp side port 3-Rc 1/4 Unclamp side port 52 N L + Stroke Rear cushion valve Top width across flats 3 4-M6 x 1 Thread depth 12 17 1010 GA W GB 45 45 14 30 BX M 3 25 43 IA BY Max.Wc 40 30 D 13 35 36 Ws Width across flats K Width across flats 44 0.050 0.093 +0.027 0 +0.3 0 +0.4 0 Shaft: 12d9 F Clevis width CLK1A: 16.5 R15 Hole: 12H8 CLK1B: 19.5 S + Stroke 27

HRX-OM-I051

of Model Label . 1-7 1.5 Safety Measures . 1-8 1.5.1 Safety Precautions . 1-8 1.5.2 Safety Interlock system . 1-9 1.5.3 Lockout/Tagout . 1-10 1.5.4 Protective equipment . 1-12 1.6 Emergency Measures. 1-13 1.6.1 Emergency off [EMO] switch . 1-13 1.7 Waste Disposal . 1-15 1.7.1 Disposal of refrigerant and compressor oil. 1-15 1.7.2 Circulating fluid disposal. 1-16 1.7.3 System disposal . 1

SGC200-OMJ0004

JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) , 1. 2. 3. 1. 2. 3. 4. 2 SGC200*-OMJ0004-A / / / / 1 1 1 1 1.5 1.5 1.5 1.5 *3) *3) *3) *3) 3) 3) 3) 3) 1 1 1 1 1 1 1 1 () 3 SGC200*-OMJ0004-A SGC/SGH Series SGC/SGH Series SGC/SGH Series SGC/SGH Series 2 2 2 2 / / / / ( ( ( ( ) ) ) ) () IP65 IP65 IP65 IP65 80100 ( ) 1) 1) 1) 1) 2) 2) 2) 2) 5 3) 3) 3) 3) , , , , 4) 4)

Table of Contents

2 1 1 1 1 1 L, H -X 1 X416 20LH, HL 1 1 1 2 1 1 Data L, H, LS, SL, HS, SH L, H X417 LH, HL Note 1) For LS, SL, HS and SH, the stroke adjusting unit is mounted on one side only.

Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B d M6 x 1.0 M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 4 8 8 10