5

(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7 D-H7W D-H7NF 10 15 60 15 + 45(n 2) 2 (n = 2, 4, 6) Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) D-C73C D-C80C 5 15 65 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-B5 D-B64 D-G5 D-K59 5 15 75 15 + 50(n 2) 2 (n = 2, 4, 6) Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 10 20 75 20 + 50(n 2) 2 (n = 2,

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

AC Servo Motor Driver

INSTALLATION 2 1 to 2 6 2.1 Installation direction and clearances . 2 3 2.2 Keep out foreign materials . 2 4 2.3 Cable stress . 2 5 2.4 Inspection items . 2 5 2.5 Parts having service lives . 2 6 3.

Vacuum

Selection Graph 1-l Selection graph of pad diameter by lift force (horizontal o2 o5O\ Selection Graph 2-1 Selection graph of pad diameter by lift force (vertical s2 o50) 0.005 0.01 0.05 01 0.5 1 0.005 0 01 0.05 0.1 Litting Force (kgDwn Lifting Force (kgf)Win Selection Graph 1-2 Selection graph of pad diameter by lift force (horizontal o50 o250) Selection Graph2-2 Selection graph of pad diameter

Vacuum

Selection Graph 1-l Selection graph of pad diameter by lift force (horizontal o2 o5O\ Selection Graph 2-1 Selection graph of pad diameter by lift force (vertical s2 o50) 0.005 0.01 0.05 01 0.5 1 0.005 0 01 0.05 0.1 Litting Force (kgDwn Lifting Force (kgf)Win Selection Graph 1-2 Selection graph of pad diameter by lift force (horizontal o50 o250) Selection Graph2-2 Selection graph of pad diameter

5-Port Solenoid Valve

screw (For DIN rail mounting) With Residual Pressure Release Valve 5.5 (86.7) (DIN rail) 01 : 16.2 C : 14.5 B A B A A 4 B A A 4 B A A 4 B A (Connector entry upward direction) A 4 A 4 PE 5EA 1P X 3EB 106.2 23.2 24.6 116.6 96.2 20 20 Vacuum Release Valve with Restrictor 81.6 74.1 30.2 20 49.4 43.8 40.2 40 35 B 2 B 2 B 2 B 2 B 2 2 x M2.6 2 x 4-40 UNC [For NPT(F) thread] 1/8 [4(A), 2(B) port

AC Servo Motor Driver (CC-Link Type ）

RX(n+2)2 to RX(n+2)9) 5 23 5.

•

M Dllferent surfaces 35 301" 2) 110 + 30(n 2) D-A44 l< + (" = 2. 4. 6. 8.. ) o ~_+-_+-~L-_+ :: Same surface 55 55(" 2) 110 "t' 50(n 2) !i I + (" = 2. 4. 6. 8 .. ) With I pc. 15 "0 With 2 pes.

REA/REB

axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products

REA/REB

AS2001F-06-X214 AS2001F-06-X214 AS3001F-08-X214 AS3001F-08-X214 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 RS Q G AS2201F-01-06-X214 AS2301F-01-06-X214 2.

REA/REB

2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Sine Rodless Cylinder Series REA/REB

: 2 pcs.

Round Type Hydraulic Cylinder

(n 2) 2 20 + 35 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9 5 20 CHQ 55 (n = 2, 4, 6) Note 3) (n 2) 2 55 + 35 (n 2) (n = 2, 3, 4, 5) 20 + 35 D-M9W 10 20 55 CHK (n = 2, 4, 6) Note 3) (n 2) 2 60 + 35 (n 2) (n = 2, 3, 4, 5) 25 + 35 D-M9A 10 25 60 CHN (n = 2, 4, 6) Note 3) (n 2) 2 50 + 35 (n 2) (n = 2, 3, 4, 5) 15 + 35 D-A9 5 15 50 CHM CHM (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) (n = 2,

JXCx-OMT0023

2.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

2!6 @4 @1 @8 MX MTS MY #0 #1 $1 w @9 i #2 !1 o q u r y e @6 @5 @3 @7 CY CY1L10 to 40 @2 $0 #9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !

High Power Cylinder Series RHC

In-line type 0.1 0.3 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS421F (26) AS431F (24) AS4200 (26) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS420 (102

CG1

Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

INSTALLATION 2 1 to 2 6 2.1 Installation direction and clearances . 2 2 2.2 Keep out foreign materials . 2 3 2.3 Cable stress . 2 4 2.4 SSCNET cable laying. 2 4 2.5 Inspection items . 2 6 2.6 Parts having service lives . 2 6 3.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46

1

How to Order X214 01 S AS 2 2 0 0 Body size Option Port size Model Thread type Control method Speed Controller with One-touch Fitting Elbow Type, Metal Body/Series AS Refer to How to Order in page 15-9-43 for standard specifications. How to Order X214 2 2 1 01 06 S AS 1FG Body size Option Applicable tubing O.D.